Abstract: A MEMS gyroscope for sensing rotational motion about an in-plane extending axis includes a body, a primary in-plane oscillator, a secondary in-plane oscillator and an out-of-plane oscillator. The primary in-plane oscillator includes an actuator element and is suspended from a primary anchor region on the body by a first spring system. The secondary in-plane oscillator is connected to the primary in-plane oscillator by a drive coupling spring system and is suspended from one or more secondary anchor points on the substrate by a second spring system. The out-of-plane oscillator is connected to the secondary in-plane oscillator by a third spring system. The drive coupling spring has higher rigidity in the first in-plane direction than in the out-of-plane direction, and the first spring system has higher rigidity in the first in-plane direction than the second spring system.

Abstract: A micromechanical device includes four open drive frames and four detection masses for double differentially detecting angular velocity about an axis perpendicular to a plane. A coupling frame system couples the four open drive frames into a synchronized anti-phase driving motion. Phases of each of the four pairs of adjacent open drive frames are opposite, and amplitude of the linear primary motion of the four open drive frames are equal. Axes of linear driving motions of the open drive frames are aligned. Anti-phase synchronized driving motion of the open drive frames is relayed through a spring arrangement to an anti-phase synchronized driving motion of the four detection masses. An inner coupling lever system couples the four detection masses into a synchronized anti-phase detection motion. Phases of each of the four pairs of adjacent detection masses are opposite. Axes of linear detection motion of each of the detection masses are aligned.

Abstract: A micro-electro-mechanical device detects angular velocity, for example relating to a three axis gyroscope. The three axis gyroscope includes a two axis gyroscope structure and a one axis gyroscope structure. The gyroscope further includes a lever spring system coupling a linear drive mode oscillation of the two axis gyroscope structure and a linear drive mode oscillation of the one axis gyroscope structure into one combined primary motion. The lever spring system causes the one and two axis gyroscope structures to have equal drive mode oscillation amplitudes. A symmetrical arrangement of the lever spring system causes any reactive forces created in the lever spring system to cancel each other.

Abstract: A micromechanical device includes four open drive frames and four detection masses for double differentially detecting angular velocity about a single axis aligned with the plane of the micromechanical device. A coupling frame system couples the four open drive frames into a synchronized anti-phase driving motion. In each four pairs of adjacent open drive frames, two adjacent open drive frames move in phases opposite to each other. Axes of linear driving motion of each of the drive frames are aligned. Anti-phase synchronized driving motion of the open drive frames is relayed through a spring arrangement to an anti-phase synchronized driving motion of the four detection masses. An inner coupling lever system couples the four detection masses into a synchronized anti-phase detection motion. In each four pairs of adjacent detection masses, phases of two adjacent detection masses are opposite. Axes of linear detection motion of the detection masses are aligned.

Abstract: A microelectromechanical sensor device that comprises a seismic mass, and a spring structure that defines for the seismic mass a drive direction, and a sense direction that is perpendicular to the drive direction. A capacitive transducer structure includes a stator to be anchored to a static support structure, and a rotor mechanically connected to the seismic mass. The capacitive transducer structure is arranged into a slanted orientation where a non-zero angle is formed between the drive direction and a tangent of the stator surface. The slated capacitive transducer structure creates an electrostatic force to decrease quadrature error of the linear oscillation.

Abstract: A micro-electro-mechanical device detects angular velocity, for example relating to a three axis gyroscope. The three axis gyroscope includes a two axis gyroscope structure and a one axis gyroscope structure. The gyroscope further includes a lever spring system coupling a linear drive mode oscillation of the two axis gyroscope structure and a linear drive mode oscillation of the one axis gyroscope structure into one combined primary motion. The lever spring system causes the one and two axis gyroscope structures to have equal drive mode oscillation amplitudes. A symmetrical arrangement of the lever spring system causes any reactive forces created in the lever spring system to cancel each other.

Abstract: A micromechanical device includes four open drive frames and four detection masses for double differentially detecting angular velocity about a single axis aligned with the plane of the micromechanical device. A coupling frame system couples the four open drive frames into a synchronized anti-phase driving motion. In each four pairs of adjacent open drive frames, two adjacent open drive frames move in phases opposite to each other. Axes of linear driving motion of each of the drive frames are aligned. Anti-phase synchronized driving motion of the open drive frames is relayed through a spring arrangement to an anti-phase synchronized driving motion of the four detection masses. An inner coupling lever system couples the four detection masses into a synchronized anti-phase detection motion. In each four pairs of adjacent detection masses, phases of two adjacent detection masses are opposite. Axes of linear detection motion of the detection masses are aligned.

Abstract: A micromechanical device includes four open drive frames and four detection masses for double differentially detecting angular velocity about an axis perpendicular to a plane. A coupling frame system couples the four open drive frames into a synchronized anti-phase driving motion. Phases of each of the four pairs of adjacent open drive frames are opposite, and amplitude of the linear primary motion of the four open drive frames are equal. Axes of linear driving motions of the open drive frames are aligned. Anti-phase synchronized driving motion of the open drive frames is relayed through a spring arrangement to an anti-phase synchronized driving motion of the four detection masses. An inner coupling lever system couples the four detection masses into a synchronized anti-phase detection motion. Phases of each of the four pairs of adjacent detection masses are opposite. Axes of linear detection motion of each of the detection masses are aligned.

Abstract: A microelectromechanical sensor device that comprises a seismic mass, and a spring structure that defines for the seismic mass a drive direction, and a sense direction that is perpendicular to the drive direction. A capacitive transducer structure includes a stator to be anchored to a static support structure, and a rotor mechanically connected to the seismic mass. The capacitive transducer structure is arranged into a slanted orientation where a non-zero angle is formed between the drive direction and a tangent of the stator surface. The slated capacitive transducer structure creates an electrostatic force to decrease quadrature error of the linear oscillation.