Patents by Inventor Tomoaki Fujinami

Tomoaki Fujinami has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chromium oxide photomask material and the production thereof
    Patent number: 3951547
    Abstract: A colored photomask has a glass substrate with a masking film deposited thereon formed of a non-stoichiometric chromium oxide composition produced by heating chromic oxide or metallic chromium in a clear oxidizing atmosphere of oxygen or an oxygen-nitrogen mixture at a total pressure of 0.5 .times. 10.sup.-.sup.4 to 5 .times. 10.sup.-.sup.4 Torr and at an oxygen pressure of 0.1 .times. 10.sup.-.sup.4 to 5 .times. 10.sup.-.sup.4 Torr to generate the vapor from the chromic oxide or metallic chromium, and depositing the rising vapor onto one surface of the glass substrate heated and positioned within the oxidizing atmosphere in a manner similar to a known vacuum-plating process, and at least one window in the masking film formed by etching the film.
    Type: Grant
    Filed: May 19, 1972
    Date of Patent: April 20, 1976
    Assignee: Ulvac Corporation
    Inventors: Tomoaki Fujinami, Isao Hattori