Abstract: A substrate processing apparatus 100 includes a processing unit, a reservoir 31, a processing liquid pipe 32, a pump 34, a filter 35, a first flow rate section 36, a first return pipe 51, a first adjustment valve 52, a second return pipe 41, a branch supply pipe 16, a second flow rate section 42, and a controller. The first flow rate section 36 is placed in the processing liquid pipe 32 and measures a flow rate or pressure of the processing liquid flowing through the processing liquid pipe 32. The first adjustment valve 52 is placed in the first return pipe 51 and adjusts a flow rate of the processing liquid flowing through the first return pipe 51. The controller controls an opening degree of the first adjustment valve 52 based on the flow rate or the pressure of the processing liquid measured by the first flow rate section 36.

Abstract: A control system comprises a mobile object control unit for controlling a mobile object; an update control unit for controlling reception of an update program of the mobile object control unit from a server and controlling update of the mobile object control unit by the program; an acquisition unit for acquiring reception information indicating a communication manner for receiving from the server for each program; and a communication control unit for controlling receiving the program from the server, based on the reception information, wherein the acquisition unit is for, when both a first update program and a second update program received after update by the first update program is executed have not been received, acquiring information about change of reception information of the first update program, and the communication control unit is for controlling receiving the first update program based on the information about change acquired by the acquisition unit.

Abstract: A laser transmitter device includes a laser light source, first and second optical elements, and first and second detection elements. The first optical element has a first optical characteristic with wavelength dependency, whose light transmissivity or reflectivity shows a monotone increase or decrease within a wavelength range over channels. The second optical element has a second optical characteristic with wavelength dependency, whose transmissivity or reflectivity changes in a cycle corresponding to intervals of the channels or two times the intervals. The first detection element detects an intensity of light emitted from the laser light source and coming via the first optical element, and generates a first electric signal reflecting the first optical characteristic. The second detection element detects an intensity of light emitted from the laser light source and coming via the second optical element, and generates a second electric signal reflecting the second optical characteristic.

Abstract: A laser transmitter device includes a laser light source, first and second optical elements, and first and second detection elements. The first optical element has a first optical characteristic with wavelength dependency, whose light transmissivity or reflectivity shows a monotone increase or decrease within a wavelength range over channels. The second optical element has a second optical characteristic with wavelength dependency, whose transmissivity or reflectivity changes in a cycle corresponding to intervals of the channels or two times the intervals. The first detection element detects an intensity of light emitted from the laser light source and coming via the first optical element, and generates a first electric signal reflecting the first optical characteristic. The second detection element detects an intensity of light emitted from the laser light source and coming via the second optical element, and generates a second electric signal reflecting the second optical characteristic.