Patents by Inventor Tomoco Suzuki

Tomoco Suzuki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cleaning composition comprising a chelant and quaternary ammonium hydroxide mixture
    Patent number: 7825079
    Abstract: The invention relates to compositions and methods for cleaning integrated circuit substrates. The compositions are in the form of an aqueous solution and include a quaternary ammonium hydroxide compound and a chelating compound. The chelating compound includes either boric acid or at least one N-substituted aminocarboxylate selected from the group consisting of N-bis(2-hydroxyethyl)glycine(bicine), N-tris(hydroxymethyl)methyl glycine (tricine) and mixtures thereof, and can optionally include glycine, Iminodiacetic acid (IDA), Nitrilo trizacetic acid (NTA), Ethylenediammine Tetraacetic acid (EDTA), or mixtures thereof.
    Type: Grant
    Filed: May 11, 2009
    Date of Patent: November 2, 2010
    Assignee: EKC Technology, Inc.
    Inventors: Tomoco Suzuki, Atsushi Otake
  • Cleaning Composition
    Publication number: 20090281017
    Abstract: The invention relates to compositions and methods for cleaning integrated circuit substrates. The compositions are in the form of an aqueous solution and include a quaternary ammonium hydroxide compound and a chelating compound. The chelating compound includes either boric acid or at least one N-substituted aminocarboxylate selected from the group consisting of N-bis(2-hydroxyethyl)glycine(bicine), N-tris(hydroxymethyl)methyl glycine (tricine) and mixtures thereof, and can optionally include glycine, Iminodiacetic acid (IDA), Nitrilo trizacetic acid (NTA), Ethylenediammine Tetraacetic acid (EDTA), or mixtures thereof.
    Type: Application
    Filed: May 11, 2009
    Publication date: November 12, 2009
    Inventors: Tomoco Suzuki, Atsushi Otake