Patents by Inventor Tomofumi MOGAMI

Tomofumi MOGAMI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Charge neutralizer and plasma generator
    Patent number: 10984989
    Abstract: A charge neutralizer that includes a vacuum chamber which is capable of having a charged object installed therein and includes a high vacuum processing unit that performs vapor deposition, and a plasma generator configured to supply plasma caused by an electron cyclotron resonance to an inside of the vacuum chamber. The plasma generator includes a plasma source configured to generate the plasma, and a flange configured to install the plasma source inside the vacuum chamber.
    Type: Grant
    Filed: November 28, 2018
    Date of Patent: April 20, 2021
    Inventors: Nobuo Nomura, Tomofumi Mogami, Kazuki Minemura, Daiki Koda, Takato Morishita, Satoshi Hosoda, Hitoshi Kuninaka
  • CHARGE NEUTRALIZER AND PLASMA GENERATOR
    Publication number: 20200279722
    Abstract: A charge neutralizer that includes a vacuum chamber which is capable of having a charged object installed therein and includes a high vacuum processing unit that performs vapor deposition, and a plasma generator configured to supply plasma caused by an electron cyclotron resonance to an inside of the vacuum chamber. The plasma generator includes a plasma source configured to generate the plasma, and a flange configured to install the plasma source inside the vacuum chamber.
    Type: Application
    Filed: November 28, 2018
    Publication date: September 3, 2020
    Inventors: Nobuo NOMURA, Tomofumi MOGAMI, Kazuki MINEMURA, Daiki KODA, Takato MORISHITA, Satoshi HOSODA, Hitoshi KUNINAKA