Abstract: Processing a wafer using a double side grinder having a pair of grinding wheels. Warp data is obtained by a warp measurement device for measuring warp of a wafer as ground by the double side grinder. The warp data is received and a nanotopography of the wafer is predicted based on the received warp data. A grinding parameter is determined based on the predicted nanotopography of the wafer. Operation of the double side grinder is adjusted based on the determined grinding parameter.

Abstract: Processing a wafer using a double side grinder having a pair of grinding wheels. Warp data is obtained by a warp measurement device for measuring warp of a wafer as ground by the double side grinder. The warp data is received and a nanotopography of the wafer is predicted based on the received warp data. A grinding parameter is determined based on the predicted nanotopography of the wafer. Operation of the double side grinder is adjusted based on the determined grinding parameter.

Abstract: Processing a wafer using a double side grinder having a pair of grinding wheels. Warp data is obtained by a warp measurement device for measuring warp of a wafer as ground by the double side grinder. The warp data is received and a nanotopography of the wafer is predicted based on the received warp data. A grinding parameter is determined based on the predicted nanotopography of the wafer. Operation of the double side grinder is adjusted based on the determined grinding parameter.

Abstract: An active type vibration isolating support system includes: an elastic body for elastically supporting a vibratory body; a liquid chamber to be defined by the elastic body; a movable member for changing capacity of the liquid chamber; and an actuator for driving the movable member. The actuator has: a fixed core; a movable core coupled to the movable member for being arranged opposite to the fixed core via an air gap; and a coil for generating an electromagnetic attracting force between the fixed and movable cores. The movable member and the movable core are coupled together through coupling units capable of adjusting the air gap. Thus, without preparing several types of coupling members, it is possible to obtain a desired vibration isolating characteristic by freely adjusting the air gap between the fixed core and the movable core.

Abstract: An active type vibration isolating support system includes: an elastic body for elastically supporting a vibratory body; a liquid chamber to be defined by the elastic body; a movable member for changing capacity of the liquid chamber; and an actuator for driving the movable member. The actuator has: a fixed core; a movable core coupled to the movable member for being arranged opposite to the fixed core via an air gap; and a coil for generating an electromagnetic attracting force between the fixed and movable cores. The movable member and the movable core are coupled together through coupling units capable of adjusting the air gap. Thus, without preparing several types of coupling members, it is possible to obtain a desired vibration isolating characteristic by freely adjusting the air gap between the fixed core and the movable core.

Abstract: A process is disclosed for culturing microorganisms or cells isolated from a multicellular organism while exposing the microorganism or cells to sound waves of 5 to 100 kHz. This procedure effects the proliferation and the expression of functions of the cells so exposed. An apparatus for culturing the cells according to this process is also disclosed.

Abstract: The present invention provides a method for forming a novel carbonaceous material, which has properties such as acceptor properly useful as a secondary cell electrode material and a host material for catalyst, comprising of the steps of electrochemically polymerizing a nitrogen-containing organic compound as a monomer constituent, and heat-treating the resultant polymer as a carbon precursor.