Abstract: A device management program causes a terminal device to function as a storing unit configured to store first access point information concerning a first access point and first device information, which is device information concerning a connected device, in correlation with each other in advance, a communication-state confirming unit configured to confirm a communication state at predetermined timing, an access-point-information acquiring unit configured to, when the communication state is a communication error state, acquire second access point information concerning a second access point that is in the communication error state, a determining unit configured to determine whether the second access point information and the first access point information coincide, a communication-state-information acquiring unit configured to acquire information concerning a communication state with the device when the second access point information and the first access point information coincide, and a communication-state n

Abstract: According to one embodiment, a substrate processing apparatus has a treatment tank, a holder to hold the substrate while in the treatment tank, a chemical discharge pipe below a position of the holder for supplying a chemical solution to the treatment tank, a bubble discharge pipe below the position of the holder for discharging a gas. The first bubble discharge pipe is closer along a horizontal direction to a centerline of the treatment tank than is the chemical discharge pipe. A rectifying plate is disposed below the position of the holder and extends from a position above the chemical discharge pipe to a position above the first bubble discharge pipe at an incline with respect to the first direction horizontal.

Abstract: A device management program causes a terminal device to function as a storing unit configured to store first access point information concerning a first access point and first device information, which is device information concerning a connected device, in correlation with each other in advance, a communication-state confirming unit configured to confirm a communication state at predetermined timing, an access-point-information acquiring unit configured to, when the communication state is a communication error state, acquire second access point information concerning a second access point that is in the communication error state, a determining unit configured to determine whether the second access point information and the first access point information coincide, a communication-state-information acquiring unit configured to acquire information concerning a communication state with the device when the second access point information and the first access point information coincide, and a communication-state n