Abstract: Provided are a profile measurement system and a profile measurement method capable of suppressing the influence of vibration with a simple configuration. The profile measurement system includes: a transmissive optical component having a reference plane opposed to a surface of a sample; a light source which irradiates the surface of the sample with light having a predetermined wavelength region through the transmissive optical component; an imaging spectrometer which measures a reflection spectrum for each position on a linear region defined on the surface of the sample; and a calculation unit which calculates a distance between each position on the linear region and the reference plane based on the measured reflection spectrum for each position on the linear region.

Abstract: The polarization angle ?1 of a polarizer (14) is set, and the reflection intensity S1 in a cross Nicol state and the reference reflection intensity Ref1 of a liquid crystal cell (15) are measured. A different polarization angle ?2 is then set, and the reflection intensity S2 in a cross Nicol state and the reference reflection intensity Ref2 of the liquid crystal cell are measured. The rations S1/Ref1, S2/Ref2 of measured intensities and the ratio S1·Ref2/S2·Ref1 is determined in order to cancel the background components of the reference reflection intensities Ref1, Ref2 thus determining the value of cell gap accurately.

Abstract: The polarization angle &thgr;1 of a polarizer (14) is set, and the reflection intensity S1 in a cross Nicol state and the reference reflection intensity Ref1 of a liquid crystal cell (15) are measured. A different polarization angle &thgr;2 is then set, and the reflection intensity S2 in a cross Nicol state and the reference reflection intensity Ref2 of the liquid crystal cell are measured. The rations S1/Ref1, S2/Ref2 of measured intensities and the ratio S1·Ref2/S2 Ref1 is determined in order to cancel the background components of the reference reflection intensities Ref1, Ref2 thus determining the value of cell gap accurately (FIG. 1).

Abstract: Light is directed to a VA (Vertical Alignment) liquid crystal panel whose optical axis is in a direction perpendicular to the panel surface in such a manner that the light is incident obliquely on the VA liquid crystal panel surface, by which birefringence that results only from the liquid crystal layer is artificially generated so that measurement of the thickness (cell gap) of the VA liquid crystal is accurately performed.

Abstract: An optical waveguide having a detour is disposed at either or both of the light-receiving and light-emitting ends of a dispersion optical system in a spectroscope. Even though light being propagated through the optical waveguide has specified polarizing characteristics, the light is depolarized by passing through the optical waveguide and many times reflecting therein. Accordingly, unpolarized light not affected by the polarization selectivity of the dispersion optical system or the like can be emitted from the spectroscope.