Abstract: There is provided a shape measuring device surface capable of measuring a three-dimensional shape at high speed and with high accuracy. Low-coherence light emitted from a low-coherence light source enters a beam splitter through a collimator and is split into a measuring light and a reference light by the beam splitter. The measuring light is expanded and parallelized by a telecentric optical system so that a measuring object is irradiated with the measuring light. The measuring light reflected from the measuring object is combined with the reference light reflected from a CCP to be allow to interfere with each other to enter a photodetector. The photodetector includes light-receiving elements that are arranged in a matrix shape. A three-dimensional shape of a portion irradiated with the measuring light is measured based on a light intensity of an interference light detected at each of the light-receiving elements of the photodetector.

Abstract: A dimension measuring apparatus includes a light beam splitting element for splitting light emitted from a white light source into measuring light flux and reference light flux, a reference light scanning optics for varying optical path length of the reference light flux, a detector for detecting interference signal produced by the light fluxes, and a controller for determining the surface height of the object from the optical path length of the reference light flux corresponding to maximum value of the interference signal. The reference light scanning optics includes a rotary member, first and second reflective elements disposed to be symmetrical with respect to the rotation axis of the rotary member, and light beam deflecting members that direct the reference light flux to be incident on the first reflective element along the direction parallel and opposite to the incident direction of the reference light flux on the second reflective element.

Abstract: A dimension measuring apparatus includes a light beam splitting element for splitting light emitted from a white light source into measuring light flux and reference light flux, a reference light scanning optics for varying optical path length of the reference light flux, a detector for detecting interference signal produced by the light fluxes, and a controller for determining the surface height of the object from the optical path length of the reference light flux corresponding to maximum value of the interference signal. The reference light scanning optics includes a rotary member, first and second reflective elements disposed to be symmetrical with respect to the rotation axis of the rotary member, and light beam deflecting members that direct the reference light flux to be incident on the first reflective element along the direction parallel and opposite to the incident direction of the reference light flux on the second reflective element.