Abstract: A coating head is constructed of a solvent feed mechanism connected to a forward side in a direction of movement of a coating solution feed mechanism, and a gas jet mechanism connected to a rearward side in the direction of movement. While moving the coating head relative to a substrate, a solvent is supplied onto the substrate from the solvent feed mechanism, then a coating solution is supplied onto a film of the solvent from the coating solution feed mechanism, and finally a gas is jetted to an uneven surface of the coating solution from the gas jet mechanism to smooth a thin film surface of the coating solution.

Abstract: A processing liquid is supplied onto a substrate rotated by a spin chuck in a coating processing unit so that a film of the processing liquid is formed, and a rinse liquid is supplied to a peripheral edge of the substrate so that a processing liquid on the peripheral edge of the substrate is removed. An edge cut width between a position of an outer peripheral portion of the substrate rotated by the spin chuck in an edge exposure unit and a position of an outer peripheral portion of a film on the substrate is detected. Based on the detected edge cut width, a positional deviation of the center of the substrate held in the spin chuck from a rotation center of the spin chuck in the coating processing unit is determined while a supply state of the rinse liquid by an edge rinse nozzle is determined.

Abstract: In imaging using 2-dimensional selective excitation pulses, regardless of applications thereof, a technique for obtaining a high quality image is provided. In the technique, a 2-dimensional selective excitation sequence is carried out while changing a coefficient for determining the cylinder diameter of a region excited by the 2-dimensional selective excitation sequence and a time difference for determining an offset position. The obtained excitation region and a desired region are compared with each other, and the coefficient and time difference with which the obtained excitation region and the desired region match each other are determined to be the optimum ones. The determination processing may be performed as an initial adjustment, may be performed according to need in each imaging, or may be performed on a per-application basis.

Abstract: A high-quality image is obtained using a two-dimensional selective excitation method even if the static magnetic field is not uniform. Therefore, non-uniformity of a static magnetic field of a region to be focused in particular in a selective excitation region excited by 2DRF is measured, and a result of the measurement is reflected in an imaging sequence using the 2DRF. For example, a resonance frequency of magnetization obtained from the measurement result is set as an irradiation frequency of the 2DRF. In addition, a shim gradient magnetic field is applied so as to correct the non-uniformity of the magnetization obtained from the measurement result. These are applied only in the imaging sequence using the 2DRF, and an irradiation frequency and a shim gradient magnetic field set in a conventional method are used in other imaging sequences.

Abstract: An image with a desired contrast is obtained while suppressing body motion artifacts caused by both random motion and periodic motion of an object. In order to do so, an imaging sequence using a non-Cartesian sampling method is executed so as to synchronize with a biological signal only at the start time and a repetition time (TR), which is an execution interval between shots within the imaging sequence, is maintained. In addition, a time difference between a delay time and a start time of each shot is calculated, and a shot with a predetermined time difference or more is executed again after the TR time.

Abstract: In order to provide a technique for accurately realizing an examination, which is for acquiring a plurality of images of the same examination section, without a complicated operation and an extension of an examination time, body movement information of a subject is acquired immediately before each imaging in an examination, and it is determined whether or not there is a change in the position of the subject by comparing it with body movement information immediately before reference imaging. Only when there is a change in the position of the subject, an imaging slice setting image is acquired again. Then, a recommended imaging slice is calculated using the newest imaging slice setting image.

Abstract: An information recording and reproducing apparatus for increasing a speed of tilt control, including a portion for storing reference data, a portion for storing sample values data, a portion for obtaining positional information, a stilt servo generator, a tilt adjuster.

Abstract: When performing imaging in synchronization with a biological movement of an examinee by using a pulse sequence applying a pre-saturation pulse, it is possible to reduce irregularities of echo signal intensity and artifact on the image generated by the irregularities. Especially, it is possible to prevent artifact attributed to blood in the ventricle when performing delay contrast imaging. For this, before measuring the echo signal, an IR pulse or the like for adjusting magnetization to a desired state is applied so as to suppress irregularities of the echo signal intensity and prevent artifact.

Abstract: An X-ray image diagnosis apparatus allows setting information indicating an object direction in a radiographed image without any errors. This invention is an X-ray detection apparatus which detects X-rays applied to an object and generates a radiographed image of the object. This apparatus includes a unit to display, in a display area, a symbol which has a form corresponding to the object and for which a vector representing a direction as a reference for the symbol is defined, a button to change the direction of the symbol displayed in the display area, and a unit to output information concerning the direction of the vector in association with a radiographed image of the object, when the direction of the symbol displayed in the display area is changed to match the direction of the object with the direction of the symbol displayed in the display area.

Abstract: There is provided an MRI apparatus that is capable of imaging ON/OFF in response to a biological gating signal and changing conditions for imaging, even while the moving bed imaging is performed, and further reducing a load on a subject to be examined, which is caused by fluctuations in the bed moving velocity. A controller that controls a bed to transport the examined subject in a static magnetic field and a unit to apply an RF magnetic field and a gradient magnetic field for imaging configures settings so that the bed moving velocity is kept constant considering an entire imaging time, and further controls the magnetic applying unit for applying the RF magnetic field and the gradient magnetic field so that a moving velocity of the FOV (imaging area) in the subject coordinate system is made different from the bed moving velocity.

Abstract: There is provided an MRI apparatus that is capable of imaging ON/OFF in response to a biological gating signal and changing conditions for imaging, even while the moving bed imaging is performed, and further reducing a load on a subject to be examined, which is caused by fluctuations in the bed moving velocity. A controller that controls a bed to transport the examined subject in a static magnetic field and a unit to apply an RF magnetic field and a gradient magnetic field for imaging configures settings so that the bed moving velocity is kept constant considering an entire imaging time, and further controls the magnetic applying unit for applying the RF magnetic field and the gradient magnetic field so that a moving velocity of the FOV (imaging area) in the subject coordinate system is made different from the bed moving velocity.

Abstract: A method capable of eliminating occurrence of a development failure when a DI water discharge nozzle 20 is scanned to dry a substrate by spinning is provided. A substrate W is held in a horizontal posture by a spin chuck 10 and rotated about a vertical axis by a rotation motor 14, and when an outlet of the nozzle 20 is scanned from a position opposed to a center of the substrate W to a position opposed to a circumferential edge while a cleaning solution being discharged, immediately after the nozzle 20 has started to move, only one dried core is produced in the vicinity of the center of the substrate W, and thus production of not less than two dried cores in the vicinity of the center of the substrate W is prevented. The dried region is spread all over the surface of the substrate W.

Abstract: The invention provides a method capable of preventing the occurrence of collapse of resist pattern accompanied by size reduction in pattern dimensions can be prevented when processing a resist film having been exposed and formed on the surface of a substrate, and in which there is no fear that posterior processes are adversely affected. In the step of processing a resist film having been exposed and formed on the surface of a substrate, a developer mixed with a hydrophobizing agent is fed onto the resist film on the substrate surface; or before rinsing the resist film having been processed, a solvent containing a hydrophobic resin is fed onto the resist film on the substrate surface. Thus, a resist exposed surface is made to be hydrophobic before the rinsing, and thereafter rinsed and dried by spinning.

Abstract: The invention provides a method capable of suppressing liquid splash at the circumferential edge of a substrate, and preventing liquid droplets due to liquid splash from adhering to the substrate again when moving a discharge nozzle for scanning while discharging a cleaning solution from the discharge nozzle to the surface of the substrate to make spin drying of the substrate. When a substrate W is held in a horizontal posture by a spin chuck 10 and rotated about a vertical axis with a rotation motor 14, while discharging the cleaning solution onto the surface of the substrate from an outlet of a de-ionized water discharge nozzle 20, the rotation speed of the substrate is decreased in a process that the outlet of the discharge nozzle is traveled from a position opposed to a center of the substrate to a position opposed to the circumferential edge of the substrate.

Abstract: A substrate is first spin-coated with an antireflection film material is carried out to the substrate to form antireflection film on the substrate. Next, a mixed solvent of HMDS and xylene is supplied in a predetermined quantity to the upper surface of the antireflection film, and is spin-dried in this state. The mixed solvent effects surface modifying treatment to reduce a hydrogen bonding component of surface energy of the antireflection film. Subsequently, the substrate receives heat treatment. This completes formation of the antireflection film on the substrate. As a result, the antireflection film has increased adhesion energy in water with respect to resist film, without impairing essential characteristics of the antireflection film.

Abstract: When performing imaging in synchronization with a biological movement of an examinee by using a pulse sequence applying a pre-saturation pulse, it is possible to reduce irregularities of echo signal intensity and artifact on the image generated by the irregularities. Especially, it is possible to prevent artifact attributed to blood in the ventricle when performing delay contrast imaging. For this, before measuring the echo signal, an IR pulse or the like for adjusting magnetization to a desired state is applied so as to suppress irregularities of the echo signal intensity and prevent artifact.

Abstract: An object of the present invention is to further increase the speed of tilt control while suppressing a useless tilt control operation. Values of focus bias voltages (reference bias values V1 to V6) at a plurality of radial positions P1 to P6 are obtained and stored using a reference disk with a high flatness precision. Prior to a recording and reproducing operation, the values of focus bias voltages (Fo bias values vs1 to vs6) at the radial positions P1 to P6 are obtained, and each of tilt amounts T1 to T6 at the respective radial positions is obtained from a differential value between the reference bias value and the Fo bias value at each radial position. During recording/reproduction, a radial position Pn placed immediately before the recording/reproducing position is detected. Then, tilt control is performed with a tilt amount Tn at the radial position Pn being set as the tilt amount at the recording/reproducing position.