Abstract: An imprint apparatus for performing an imprint process of forming a pattern of an imprint material on a substrate using a mold, including a control unit configured to control a process concerning inspection of the imprint process, wherein the imprint process includes an arrangement process including stage driving of driving a stage between a first position below the mold and a second position below a dispenser, and in a case where a plurality of states are obtained, in each of which a shot region is sub-pixel shifted with respect to an imaging surface in accordance with the stage driving during the arrangement process, the control unit obtains a plurality of first sub-pixel shift images corresponding to the plurality of states, and inspects the imprint process based on the plurality of first sub-pixel shift images.

Abstract: Techniques described herein are directed to a scheduling platform configured to determine a time for scheduling a meeting. The scheduling platform receives a request for a new meeting and may associate the new meeting with available times on a calendar of a representative. The scheduling platform utilizes prediction model(s) to determine a probability of acceptance of an invitation to the meeting scheduled at each of the available times. Additionally, the scheduling platform may determine a joint probability of a multibook instance in which two or more invitations to meetings scheduled at a same time may be accepted. The scheduling platform selects the time for the new meeting based on the probability of acceptance and/or the joint probability of the multibook instance. The scheduling platform may deliver invitations that have a higher probability of acceptance in order to maximize a density of accepted meetings on a representative calendar.

Abstract: Systems and methods of shaping a film and/or determining shaping conditions for shaping a film which may comprise: shaping a test film with a first set of shaping conditions; analyzing a time series of spread camera images obtained while shaping the test film to estimate a set of test film spreading characteristics; and creating an estimate of a probable reduction in non-fill defects based on the test film spreading characteristics.

Abstract: An imprint apparatus includes a mold holder that holds a mold, a substrate holder that holds a substrate by suction, a driving device that brings the mold into contact with an imprint material on the substrate by relatively bringing the mold holder and the substrate holder close to each other, and a controller. The controller controls the driving device so as to bring the mold into contact with the imprint material in a state in which the substrate is deformed into a convex shape with respect to the mold by controlling pressures inside the plurality of suction regions based on surface shape data of the substrate held by the substrate holder.

Abstract: Provided is a coating apparatus that includes: a discharge unit that discharges a liquid on an object; a measurement unit that is able to be disposed at a position facing a discharge surface of the discharge unit and measures a height position of the discharge surface using the facing position as a reference position; and a controller that calculates a thickness of an attached substance containing a material of the liquid attached to the discharge surface based on the height position measured by the measurement unit and determines implementation of a maintenance treatment based on the calculated thickness of the attached substance.

Abstract: An imprint apparatus includes a mold holder that holds a mold, a substrate holder that holds a substrate by suction, a driving device that brings the mold into contact with an imprint material on the substrate by relatively bringing the mold holder and the substrate holder close to each other, and a controller. The controller controls the driving device so as to bring the mold into contact with the imprint material in a state in which the substrate is deformed into a convex shape with respect to the mold by controlling pressures inside the plurality of suction regions based on surface shape data of the substrate held by the substrate holder.

Abstract: A mold holding mechanism holds a mold including a deforming portion and a support supporting the deforming portion, the deforming portion having a first surface on which a pattern to be transferred to an imprint material by imprinting is formed, and a second surface on an opposite side of the first surface, the support being held by the mold holding mechanism. The mold holding mechanism includes a space definition component defining a first space together with the second surface, the space definition component including a first flow path making the first space and a pressure controller, configured to control a pressure of the first space, communicate with each other, and a second flow path making the first space and a second space, different from the first space, communicate with each other.

Abstract: Provided is a coating apparatus that includes: a discharge unit that discharges a liquid on an object; a measurement unit that is able to be disposed at a position facing a discharge surface of the discharge unit and measures a height position of the discharge surface using the facing position as a reference position; and a controller that calculates a thickness of an attached substance containing a material of the liquid attached to the discharge surface based on the height position measured by the measurement unit and determines implementation of a maintenance treatment based on the calculated thickness of the attached substance.

Abstract: A stage apparatus includes a moving part and chuck. The moving part can hold a substrate and move. The chuck has a holding surface divided into regions whose holding strength can be regulated individually. Some parts of the divided regions hold a part of the substrate. The moving part and the chuck are physically isolated.

Abstract: The present invention provides an exposure apparatus including a stage control system configured to control a stage for holding a substrate in accordance with a command value, a specifying unit configured to specify an exposure start time at which exposure on the substrate starts upon detecting exposure light illuminated on the substrate, and a main control system configured to calculate positions of the stage at a plurality of times in an exposure period for the substrate based on position information of the stage at an exposure start time specified by the specifying unit, obtain an average position of the stage in at least a partial period in the exposure period from the calculated positions of the stage at the plurality of times, and give a command value for matching the average position of the stage with a target position to the stage control system.

Abstract: A scanning exposure apparatus exposes a plurality of shot regions on a substrate to light while scanning an original and the substrate. The apparatus includes: a stage which holds the substrate and moves; and a controller which controls movement of the stage based on a driving profile that defines the movement of the stage. A portion in the driving profile, which defines the movement of the stage during exposure of at least one shot region, is formed by a sine wave having a frequency lower than a resonance frequency in a stage controller.

Abstract: The present invention provides a control apparatus including a feed-forward controller configured to perform feed-forward control of a controlled object, the apparatus being configured to obtain a first response data sequence of the controlled object measured by applying a first manipulated variable to the controlled object, and determining, assuming that a second response data sequence of the controlled object to be obtained if a second manipulated variable data sequence, obtained by respectively multiplying the first manipulated variable by gains as variables which can vary with time, is applied to the controlled object, is expressed as a linear combination of the first response data sequence with the gains as coefficients of the liner combination, the gains so that a discrepancy between the second response data sequence and a target data sequence falls within a tolerance.

Abstract: The present invention provides an exposure apparatus which exposes a substrate to light, the apparatus comprising a substrate stage, a position measurement unit configured to measure a position of the substrate stage, a structure configured to support the position measurement unit, a force measurement unit configured to measure a force that acts on the structure, a correction unit configured to correct a command for controlling the position of the substrate stage, based on the measurement value obtained by the force measurement unit, and a correction coefficient, and a calculation unit configured to calculate the correction coefficient based on position deviation information between adjacent shot regions in an evaluation substrate including a plurality of shot regions exposed without correction by the correction unit, and the measurement value obtained by the force measurement unit in exposing each shot region.

Abstract: A method and a storage system are provided for implementing a sustained large block random write performance mechanism for shingled magnetic recording (SMR) drives in a redundant array of inexpensive disks (RAID). A Solid State Drive (SSD) is provided with the SMR drives in the RAID. The SSD is used in a hot spare mode, which is activated when a large block random-write event is identified for a SMR drive in the RAID. In the hot spare mode, the SSD temporarily receives new incoming writes for the identified SMR drive. Then the identified SMR drive is updated from the SSD to restore the state of the identified SMR drive, and operations continue with normal writing only using the SMR drives in the RAID.

Abstract: A shingled magnetic recording hard disk drive that uses writeable cache tracks in the inter-band gaps between the annular data bands minimizes the effect of far track erasure (FTE) in the boundary regions of annular data bands caused by writing to the cache tracks. Based on the relative FTE effect for all the tracks in a range of tracks of the cache track being written, a count increment (CI) table or a cumulative count increment (CCI) table is maintained. For every writing to a cache track, a count for each track in an adjacent boundary region, or a cumulative count for each adjacent boundary region, is increased. When the count value for a track, or the cumulative count for a boundary region, reaches a predetermined threshold the data is read from that band and rewritten to the same band.

Abstract: The present invention provides an exposure apparatus including a stage control system configured to control a stage for holding a substrate in accordance with a command value, a specifying unit configured to specify an exposure start time at which exposure on the substrate starts upon detecting exposure light illuminated on the substrate, and a main control system configured to calculate positions of the stage at a plurality of times in an exposure period for the substrate based on position information of the stage at an exposure start time specified by the specifying unit, obtain an average position of the stage in at least a partial period in the exposure period from the calculated positions of the stage at the plurality of times, and give a command value for matching the average position of the stage with a target position to the stage control system.

Abstract: The present invention provides an exposure apparatus which exposes a substrate to light, the apparatus comprising a substrate stage, a position measurement unit configured to measure a position of the substrate stage, a structure configured to support the position measurement unit, a force measurement unit configured to measure a force that acts on the structure, a correction unit configured to correct a command for controlling the position of the substrate stage, based on the measurement value obtained by the force measurement unit, and a correction coefficient, and a calculation unit configured to calculate the correction coefficient based on position deviation information between adjacent shot regions in an evaluation substrate including a plurality of shot regions exposed without correction by the correction unit, and the measurement value obtained by the force measurement unit in exposing each shot region.

Abstract: A method is described for allowing disk drives, such as shingle-written magnetic recording (SMR) drives, to be shipped for customer use with portions of the magnetic media being left untested. The testing is then completed by the drive self-testing in the field. The drive is made functional at the factory by fully testing at least one operational set of regions including an I-region, an E-region and a write cache region. The operational set of regions works as a separate self-contained virtual disk drive and can be used immediately. The remaining untested areas on the media can be tested in the field by a background task and/or when the first write command is received that requires a new track or operational set of regions (on-the fly testing).

Abstract: The present invention provides a control apparatus including a feed-forward controller configured to perform feed-forward control of a controlled object, the apparatus being configured to obtain a first response data sequence of the controlled object measured by applying a first manipulated variable to the controlled object, and determining, assuming that a second response data sequence of the controlled object to be obtained if a second manipulated variable data sequence, obtained by respectively multiplying the first manipulated variable by gains as variables which can vary with time, is applied to the controlled object, is expressed as a linear combination of the first response data sequence with the gains as coefficients of the liner combination, the gains so that a discrepancy between the second response data sequence and a target data sequence falls within a tolerance.

Abstract: A shingled magnetic recording hard disk drive that uses writeable cache tracks in the inter-band gaps between the annular data bands minimizes the effect of far track erasure (FTE) in the boundary regions of annular data bands caused by writing to the cache tracks. Based on the relative FTE effect for all the tracks in a range of tracks of the cache track being written, a count increment (CI) table or a cumulative count increment (CCI) table is maintained. For every writing to a cache track, a count for each track in an adjacent boundary region, or a cumulative count for each adjacent boundary region, is increased. When the count value for a track, or the cumulative count for a boundary region, reaches a predetermined threshold the data is read from that band and rewritten to the same band.