Patents by Inventor Tomohiro HAYASAKA

Tomohiro HAYASAKA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CHUCKING DEVICE AND VACUUM PROCESSING APPARATUS
    Publication number: 20170346418
    Abstract: The present invention provides a technology for reducing the attractive force of a chucking device at its surface contacting an object to be chucked to thereby eliminate or minimize the generation of dust when chucking and removing the object, and to enable control for making the attractive force of the chucking device uniform.
    Type: Application
    Filed: August 10, 2017
    Publication date: November 30, 2017
    Applicant: ULVAC, INC.
    Inventors: Ken MAEHIRA, Kou FUWA, Tomohiro HAYASAKA