Patents by Inventor Tomohiro Maruko
Tomohiro Maruko has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240043986Abstract: The sputtering target of the present disclosure includes: an aluminum matrix; and (1) a material or phase containing aluminum and further containing either a rare earth element or a titanium group element or both a rare earth element and a titanium group element or (2) a material or phase containing either a rare earth element or a titanium group element or both a rare earth element and a titanium group element, at a content of 10 to 70 mol % in the aluminum matrix.Type: ApplicationFiled: June 26, 2020Publication date: February 8, 2024Applicant: FURUYA METAL CO., LTD.Inventors: Tomohiro Maruko, Yu Suzuki, Shohei Otomo, Hironobu Nakamura
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Publication number: 20230360897Abstract: A sputtering target-backing plate assembly comprising, a target has a thickness of 2.0 to 15.0 mm is joined to a backing plate, the backing plate has a recessed section having a depth of 0.5 to 5.0 mm on a plate surface, the target is fitted into the recessed section, and the assembly has a swaging structure in which an outer-peripheral-side surface of the target is clamped by a recessed section inner-peripheral-side surface of the backing plate.Type: ApplicationFiled: September 14, 2021Publication date: November 9, 2023Applicant: FURUYA METAL CO., LTD.Inventors: Tomohiro Maruko, Yu Suzuki, Shohei Otomo, Hironobu Nakamura
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Publication number: 20220356558Abstract: A sputtering target including aluminum and either a rare earth element or a titanium group element or both a rare earth element and a titanium group element, and the sputtering target has a fluorine content of 100 ppm or less.Type: ApplicationFiled: June 26, 2020Publication date: November 10, 2022Applicant: FURUYA METAL CO., LTD.Inventors: Tomohiro Maruko, Yu Suzuki, Shohei Otomo, Hironobu Nakamura
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Publication number: 20220319824Abstract: A ruthenium-based sputtering target having a cast structure, in which a sputter surface of the sputtering target includes at least two or more types of regions, and crystal surfaces in the regions are different from each other, each of the crystal surfaces being specified by a main peak of X-ray diffraction. An object of the present disclosure is to provide a Ru-based sputtering target having no void, having high purity and a low degree of structural anisotropy, and capable of forming a Ru-based film having low particle properties, high film thickness uniformity, and high surface uniformity, and a method for manufacturing the same. According to the present disclosure, there is provided a ruthenium-based sputtering target having a cast structure, in which a sputter surface of the sputtering target includes at least two or more types of regions, and crystal surfaces in the regions are different from each other, each of the crystal surfaces being specified by a main peak of X-ray diffraction.Type: ApplicationFiled: June 10, 2020Publication date: October 6, 2022Inventors: Tomohiro MARUKO, Hitoshi ARAKAWA, Shohei OTOMO, Yu SUZUKI
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Publication number: 20220275499Abstract: A sputtering target is a sputtering target including aluminum and either a rare earth element or a titanium group element or both a rare earth element and a titanium group element, and the sputtering target has a chlorine content of 100 ppm or less.Type: ApplicationFiled: June 26, 2020Publication date: September 1, 2022Applicant: FURUYA METAL CO., LTD.Inventors: Tomohiro Maruko, Yu Suzuki, Shohei Otomo, Hironobu Nakamura
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Publication number: 20220266376Abstract: A method for producing the metal cylinder material according to the present disclosure includes: a process A of forming a slitted cylinder-shaped body including at least one slit extending from one end face to the other end face of a cylinder barrel portion consisting of at least one metal plate material; a process B of forming a filler-equipped cylinder-shaped body including a filling portion obtained by filling the slit with a filler for the filler to be filled throughout the slit in a length direction of the slit; and a process C of, by inserting at least a probe of a friction stir rotation tool including the probe at least into the filling portion and executing FSP, reforming at least the filling portion of the filler-equipped cylinder-shaped body to obtain the metal cylinder material including an FSP portion.Type: ApplicationFiled: August 7, 2020Publication date: August 25, 2022Applicant: FURUYA METAL CO., LTD.Inventors: Genki Ano, Tomohiro Maruko, Tomoaki Miyazawa, Yuichi Iwamoto
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Publication number: 20220176447Abstract: The method of producing a solid spherical powder according to the present disclosure includes: a step A of preparing a first powder raw material containing agglomerated particles and/or solidified particles having a particle diameter of 1 ?m to 1,000 ?m and introducing the first powder raw material into a plasma flame to produce a hollow spherical powder having a surface layer shell having a thickness of 1 ?m to 50 ?m; a step B of subjecting the hollow spherical powder to pulverization treatment to pulverize a hollow shape of the hollow spherical powder, thus obtaining a second powder raw material which is solid; and a step C of introducing the second powder raw material into a plasma flame, melting and solidifying the second powder raw material to obtain the solid spherical powder.Type: ApplicationFiled: March 25, 2020Publication date: June 9, 2022Inventors: Genki ANO, Tomohiro MARUKO, Tomoaki MIYAZAWA, Yuichi IWAMOTO, Satoshi KITA
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Publication number: 20210347669Abstract: The volatilization suppressing component according to the present disclosure has a metallic base material; and a laminated film having at least a first layer formed on a portion or the entirety of a surface of the metallic base material, and a second layer formed on the first layer, wherein the first layer is an adhesive layer between the metallic base material and the second layer, and the second layer is a protective layer for the first layer.Type: ApplicationFiled: September 27, 2019Publication date: November 11, 2021Inventors: Shoji SAITO, Tomoaki MIYAZAWA, Tomohiro MARUKO, Yuichi IWAMOTO, Atsushi ITO
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Patent number: 11141811Abstract: A tool for friction stir welding includes a tool part, a shank part and a cap part. The tool part and the shank part have a hexagonal frustum-shaped concave section and a hexagonal frustum-shaped convex section to enable movement of the tool part with respect to the shank part in a direction parallel to an axis of rotation while movement of the tool part with respect to the shank part in a direction around the axis of rotation is restricted, by the hexagonal frustum-shaped concave section and the hexagonal frustum-shaped convex section of the tool part and the shank part are fitted to each other. After the hexagonal frustum-shaped concave section and the hexagonal frustum-shaped convex section are fitted to each other, by the tool part and the shank part being covered by the cap part, the tool part is fixed to the shank part.Type: GrantFiled: March 9, 2018Date of Patent: October 12, 2021Assignee: FURUYA METAL CO., LTD.Inventors: Tomohiro Maruko, Tomoaki Miyazawa, Yuichi Iwamoto
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Patent number: 10989607Abstract: A thermocouple capable of preventing a decrease in strength of a temperature measuring junction portion while maintaining temperature responsiveness and productivity in comparison with a conventional thermocouple. A thermocouple including two wires and a clamping member, the clamping member clamping the two wires while distal end portions of the wires being in contact with each other in parallel to provide a temperature measuring junction portion, in which when it is assumed that diameters of the two wires are d1 and d2 (where d1?d2) respectively; a length of the temperature measuring junction portion in a longitudinal direction of the two wires is L; a maximum width of the temperature measuring junction portion in a parallel direction of the two wires is D; and a maximum width in a direction orthogonal to the parallel direction in a cross section of the temperature measuring junction portion is E, the following equations are satisfied: 0.Type: GrantFiled: November 4, 2016Date of Patent: April 27, 2021Assignee: FURUYA METAL CO., LTD.Inventors: Tomohiro Maruko, Tomoaki Miyazawa, Shoji Saito, Yuya Okawa, Kensuke Morita, Yoshiteru Arai
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Publication number: 20210069838Abstract: The repair/modification method for metallic substrates according to the present invention includes: a step for preparing a metallic substrate having a first region that is divided in an in-plane direction of the substrate, the first region containing a defect and/or a structurally discontinuous portion; and a step for repairing the defect and/or modifying the structurally discontinuous portion by pressing a friction tool which does not have a probe against a top surface of the first region while rotating the friction tool so as to generate frictional heat while pressing on the top surface.Type: ApplicationFiled: January 23, 2019Publication date: March 11, 2021Inventors: Genki ANO, Tomohiro MARUKO, Tomoaki MIYAZAWA, Yuichi IWAMOTO
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Patent number: 10793945Abstract: A powder coating apparatus which can form a thin film in which freely selected elements are combined without an impurity being mixed and satisfies that a composition of the obtained thin film is uniform. The powder coating apparatus according to the present invention is a powder coating apparatus including a barrel, exhaust device for evacuating an inside of the barrel, and a sputtering device installed inside the barrel, the barrel having a main axis C directed in a horizontal direction and rotating around the main axis, the sputtering device forming a coating film on a surface of powder put in the barrel, in which the sputtering device has one fixing portion for one target to mount two or more targets, and respective targets are disposed in parallel to each other at the same level position with respect to a direction of the main axis when the target is mounted on the fixing portion.Type: GrantFiled: July 22, 2016Date of Patent: October 6, 2020Assignee: FURUYA METAL CO., LTD.Inventors: Tomohiro Maruko, Keiichiro Jinushi, Amiko Ito
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Publication number: 20190271600Abstract: A thermocouple capable of preventing a decrease in strength of a temperature measuring junction portion while maintaining temperature responsiveness and productivity in comparison with a conventional thermocouple. A thermocouple including two wires and a clamping member, the clamping member clamping the two wires while distal end portions of the wires being in contact with each other in parallel to provide a temperature measuring junction portion, in which when it is assumed that diameters of the two wires are d1 and d2 (where d1?d2) respectively; a length of the temperature measuring junction portion in a longitudinal direction of the two wires is L; a maximum width of the temperature measuring junction portion in a parallel direction of the two wires is D; and a maximum width in a direction orthogonal to the parallel direction in a cross section of the temperature measuring junction portion is E, the following equations are satisfied: 0.Type: ApplicationFiled: November 4, 2016Publication date: September 5, 2019Inventors: Tomohiro MARUKO, Tomoaki MIYAZAWA, Shoji SAITO, Yuya OKAWA, Kensuke MORITA, Yoshiteru ARAI
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Patent number: 10297430Abstract: Method of producing a target having a small average crystal grain size of gold or platinum and having a uniform crystal grain size in an in-plane direction of a target surface and a thickness direction of the target in order to further stabilize film deposition characteristics during sputtering.Type: GrantFiled: January 20, 2015Date of Patent: May 21, 2019Assignee: FURUYA METAL CO., LTD.Inventors: Tomohiro Maruko, Yu Suzuki, Shoji Saito, Amiko Ito, Yusuke Takaishi, Nobuo Kikuchi, Daishi Kaneko, Eiji Matsumoto
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Patent number: 10281337Abstract: A thermocouple that can stably perform direct temperature measurement under a high temperature environment (1500° C. or higher but 2300° C. or lower) and a manufacturing method for the same. A thermocouple according to a first embodiment is a thermocouple including at least a protective tube and element wires, the protective tube and the element wires are insulated from one another by an insulator, and the insulator is either one or both of a powder and a compact, and is composed of at least one of a zirconium oxide, a hafnium oxide, or a composite oxide of zirconium and hafnium.Type: GrantFiled: September 19, 2014Date of Patent: May 7, 2019Assignee: FURUYA METAL CO., LTD.Inventors: Tomohiro Maruko, Tomoaki Miyazawa, Atsushi Ito, Shoji Saito, Yasuhiro Sato
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Patent number: 10215645Abstract: A carbon atmosphere thermometer 10a has: a thermocouple having thermocouple wires 16, 18, a thermocouple temperature measuring junction 14, and an insulating tube 12; a first protection tube 20 surrounding the thermocouple, while at least partially spaced apart from the thermocouple wires 16, 18 and others of the thermocouple; and a second protection tube 22 surrounding the first protection tube 20, while at least partially spaced apart from the first protection tube 20. For this reason, it becomes feasible to protect the thermocouple from the external environment, while preventing the thermocouple from reacting with the first protection tube 20. Furthermore, it becomes feasible to protect the thermocouple and the first protection tube 20 from the external environment, while preventing the first protection tube 20 from reacting with the second protection tube 22.Type: GrantFiled: August 7, 2014Date of Patent: February 26, 2019Assignee: FURUYA METAL CO., LTD.Inventors: Atsushi Ito, Yasuhiro Sato, Tomoaki Miyazawa, Tomohiro Maruko
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Patent number: 10215646Abstract: A carbon atmosphere thermometer 10a has: a thermocouple having thermocouple wires 16, 18, a thermocouple temperature measuring junction 14, and an insulating tube 12; a first protection tube 20 surrounding the thermocouple, while at least partially spaced apart from the thermocouple wires 16, 18 and others of the thermocouple; and a second protection tube 22 surrounding the first protection tube 20, while at least partially spaced apart from the first protection tube 20. For this reason, it becomes feasible to protect the thermocouple from the external environment, while preventing the thermocouple from reacting with the first protection tube 20. Furthermore, it becomes feasible to protect the thermocouple and the first protection tube 20 from the external environment, while preventing the first protection tube 20 from reacting with the second protection tube 22.Type: GrantFiled: January 12, 2018Date of Patent: February 26, 2019Assignee: FURUYA METAL CO., LTD.Inventors: Atsushi Ito, Yasuhiro Sato, Tomoaki Miyazawa, Tomohiro Maruko
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Patent number: 10113217Abstract: A platinum wire in which crystal grain growth is slowed in order to prevent damage caused by creep without dispersing a metal oxide, and occurrence of slip at crystal grain boundaries is slowed. A platinum thermocouple wire that is used in a negative electrode of a platinum-based thermocouple and has a nitrogen mass concentration of 10 to 100 ppm, and when structure observation of the cross section of the wire in a longitudinal direction is performed, a structure is observed in which there is a plurality of crystal grains, which have an aspect ratio {(length of major axis)/(length of minor axis perpendicular to major axis)} of 5 or more and elongate in the longitudinal direction of the wire, in a wire thickness direction.Type: GrantFiled: February 6, 2015Date of Patent: October 30, 2018Assignee: FURUYA METAL CO., LTD.Inventors: Tomohiro Maruko, Tomoaki Miyazawa, Shoji Saito, Kensuke Morita
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Publication number: 20180223414Abstract: A powder coating apparatus which can form a thin film in which freely selected elements are combined without an impurity being mixed and satisfies that a composition of the obtained thin film is uniform. The powder coating apparatus according to the present invention is a powder coating apparatus including a barrel, exhaust device for evacuating an inside of the barrel, and a sputtering device installed inside the barrel, the barrel having a main axis C directed in a horizontal direction and rotating around the main axis, the sputtering device forming a coating film on a surface of powder put in the barrel, in which the sputtering device has one fixing portion for one target to mount two or more targets, and respective targets are disposed in parallel to each other at the same level position with respect to a direction of the main axis when the target is mounted on the fixing portion.Type: ApplicationFiled: July 22, 2016Publication date: August 9, 2018Inventors: Tomohiro MARUKO, Keiichiro JINUSHI, Amiko ITO
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Patent number: 10022817Abstract: A tool for friction stir welding includes a tool part, a shank part and a cap part. The tool part and the shank part have a hexagonal frustum-shaped concave section and a hexagonal frustum-shaped convex section to enable movement of the tool part with respect to the shank part in a direction parallel to an axis of rotation while movement of the tool part with respect to the shank part in a direction around the axis of rotation is restricted, by the hexagonal frustum-shaped concave section and the hexagonal frustum-shaped convex section of the tool part and the shank part are fitted to each other. After the hexagonal frustum-shaped concave section and the hexagonal frustum-shaped convex section are fitted to each other, by the tool part and the shank part being covered by the cap part, the tool part is fixed to the shank part.Type: GrantFiled: June 13, 2017Date of Patent: July 17, 2018Assignee: FURUYA METAL CO., LTD.Inventors: Tomohiro Maruko, Tomoaki Miyazawa, Yuichi Iwamoto