Patents by Inventor Tomohiro Murata
Tomohiro Murata has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7800116Abstract: A semiconductor device includes: a first semiconductor layer which is made of a first group III nitride semiconductor; a cap layer which is formed on the first semiconductor layer, which is made of a second group III nitride semiconductor, and which has an opening for exposing the first semiconductor layer; and a source electrode and a drain electrode which are formed on the cap layer so as to oppose to each other with the opening interposed. A gate electrode is formed on the bottom face of the opening with an insulating film interposed. The insulating film is formed on at least a part of the first semiconductor layer which is exposed through the opening.Type: GrantFiled: March 28, 2008Date of Patent: September 21, 2010Assignee: Panasonic CorporationInventors: Tomohiro Murata, Masayuki Kuroda, Tetsuzo Ueda
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Publication number: 20100207165Abstract: According to a method for fabricating a semiconductor device, a first semiconductor layer made of a first nitride semiconductor is formed over a substrate. Thereafter, a mask film covering part of the upper surface of the first semiconductor layer is selectively formed on the first semiconductor layer. A multilayer film, in which second and third nitride semiconductors having different band gaps are stacked, is selectively formed on the first semiconductor layer with the mask film used as a formation mask. On the multilayer film, an ohmic electrode is formed.Type: ApplicationFiled: April 28, 2010Publication date: August 19, 2010Applicant: PANASONIC CORPORATIONInventors: Tomohiro MURATA, Yutaka Hirose, Yasuhiro Uemoto, Tsuyoshi Tanaka
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Publication number: 20100129992Abstract: A semiconductor device of the present invention includes: a III-V nitride semiconductor layer including a channel region in which carriers travel; a concave portion provided in an upper portion of the channel region in the III-V nitride semiconductor layer; and a Schottky electrode consisting of a conductive material forming a Schottky junction with the semiconductor layer, and formed on a semiconductor layer, which spreads over the concave portion and peripheral portions of the concave portion, on the III-V nitride semiconductor layer. A dimension of the concave portion in a depth direction is set so that a portion of the Schottky electrode provided in the concave portion can adjust a quantity of the carriers traveling in the channel region.Type: ApplicationFiled: January 28, 2010Publication date: May 27, 2010Applicant: Panasonic CorporationInventors: Tomohiro MURATA, Yutaka Hirose, Tsuyoshi Tanaka, Yasuhiro Uemoto
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Publication number: 20100090250Abstract: A semiconductor device includes: a semiconductor layer; at least one electrode formed on a semiconductor layer to be in contact with the semiconductor layer; and a passivation film covering the semiconductor layer and at least part of the top surface of the electrode to protect the semiconductor layer and formed of a plurality of sub-films. The passivation film includes a first sub-film made of aluminum nitride.Type: ApplicationFiled: December 14, 2009Publication date: April 15, 2010Applicant: PANASONIC CORORATIONInventors: Tomohiro MURATA, Hiroaki Ueno, Hidetoshi Ishida, Tetsuzo Ueda, Yasuhiro Uemoto, Tsuyoshi Tanaka, Daisuke Ueda
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Patent number: 7656010Abstract: A semiconductor device includes: a semiconductor layer; at least one electrode formed on a semiconductor layer to be in contact with the semiconductor layer; and a passivation film covering the semiconductor layer and at least part of the top surface of the electrode to protect the semiconductor layer and formed of a plurality of sub-films. The passivation film includes a first sub-film made of aluminum nitride.Type: GrantFiled: September 18, 2007Date of Patent: February 2, 2010Assignee: Panasonic CorporationInventors: Tomohiro Murata, Hiroaki Ueno, Hidetoshi Ishida, Tetsuzo Ueda, Yasuhiro Uemoto, Tsuyoshi Tanaka, Daisuke Ueda
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Publication number: 20090050937Abstract: A semiconductor device of the present invention includes: a III-V nitride semiconductor layer including a channel region in which carriers travel; a concave portion provided in an upper portion of the channel region in the III-V nitride semiconductor layer; and a Schottky electrode consisting of a conductive material forming a Schottky junction with the semiconductor layer, and formed on a semiconductor layer, which spreads over the concave portion and peripheral portions of the concave portion, on the III-V nitride semiconductor layer. A dimension of the concave portion in a depth direction is set so that a portion of the Schottky electrode provided in the concave portion can adjust a quantity of the carriers traveling in the channel region.Type: ApplicationFiled: October 24, 2008Publication date: February 26, 2009Applicant: PANASONIC CORPORATIONInventors: Tomohiro MURATA, Yutaka Hirose, Tsuyoshi Tanaka, Yasuhiro Uemoto
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Patent number: 7479651Abstract: A semiconductor device comprises an active layer formed on a substrate, a superlattice layer formed on the active layer, and an ohmic electrode formed on the superlattice layer. In the superlattice layer, a first thin film and a second thin film are alternately laminated. The second thin film is made of a semiconductor which has polarization characteristics different from those of the first thin film and a band gap larger than that of the first thin film. An interface region between an upper surface of the first thin film and a lower surface of the second thin film or an interface region between a lower surface of the first thin film and an upper surface of the second thin film, is doped with an impurity.Type: GrantFiled: December 5, 2005Date of Patent: January 20, 2009Assignee: Panasonic CorporationInventors: Tomohiro Murata, Yutaka Hirose, Tsuyoshi Tanaka
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Publication number: 20080237605Abstract: A semiconductor device includes: a first semiconductor layer which is made of a first group III nitride semiconductor; a cap layer which is formed on the first semiconductor layer, which is made of a second group III nitride semiconductor, and which has an opening for exposing the first semiconductor layer; and a source electrode and a drain electrode which are formed on the cap layer so as to oppose to each other with the opening interposed. A gate electrode is formed on the bottom face of the opening with an insulating film interposed. The insulating film is formed on at least a part of the first semiconductor layer which is exposed through the opening.Type: ApplicationFiled: March 28, 2008Publication date: October 2, 2008Inventors: Tomohiro MURATA, Masayuki KURODA, Tetsuzo UEDA
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Publication number: 20080067546Abstract: A semiconductor device includes: a semiconductor layer; at least one electrode formed on a semiconductor layer to be in contact with the semiconductor layer; and a passivation film covering the semiconductor layer and at least part of the top surface of the electrode to protect the semiconductor layer and formed of a plurality of sub-films. The passivation film includes a first sub-film made of aluminum nitride.Type: ApplicationFiled: September 18, 2007Publication date: March 20, 2008Inventors: Tomohiro MURATA, Hiroaki UENO, Hidetoshi ISHIDA, Tetsuzo UEDA, Yasuhiro UEMOTO, Tsuyoshi TANAKA, Daisuke UEDA
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Patent number: 7339207Abstract: A semiconductor device has: a buffer layer formed on a conductive substrate and made of AlxGa1?xN with a high resistance; an element-forming layer formed on the buffer layer, having a channel layer, and made of undoped GaN and N-type AlyGa1?N; and a source electrode, a drain electrode and a gate electrode which are selectively formed on the element-forming layer. The source electrode is filled in a through hole provided in the buffer layer and the element-forming layer, and is thus electrically connected to the conductive substrate.Type: GrantFiled: June 20, 2006Date of Patent: March 4, 2008Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Tomohiro Murata, Yutaka Hirose, Yoshito Ikeda, Tsuyoshi Tanaka, Kaoru Inoue, Daisuke Ueda, Yasuhiro Uemoto
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Publication number: 20070254419Abstract: A semiconductor device has a first nitride semiconductor layer, a second nitride semiconductor layer formed on the first nitride semiconductor layer and having such a composition as to generate a 2-dimensional electron gas layer in the upper portion of the first nitride semiconductor layer, and an electrode having an ohmic property and formed selectively on the second nitride semiconductor layer. The second nitride semiconductor layer includes a contact area having at least one inclined portion with a bottom or wall surface thereof being inclined toward the upper surface of the first nitride semiconductor layer and defining a depressed cross-sectional configuration. The electrode is formed on the contact area.Type: ApplicationFiled: June 26, 2007Publication date: November 1, 2007Applicant: MATSUSHIDA ELECTRIC INDUSTRIAL CO., LTD.Inventors: Atsuhiko Kanda, Tsuyoshi Tanaka, Yasuhiro Uemoto, Yutaka Hirose, Tomohiro Murata
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Publication number: 20070176204Abstract: A field effect transistor includes a first semiconductor layer made of a first group III-V nitride; a second semiconductor layer formed on the first semiconductor layer, made of a second group III-V nitride and having a gate recess portion for exposing the first semiconductor layer therein; and a gate electrode formed on the first semiconductor layer in the gate recess portion. A product of stress applied by the second semiconductor layer to the first semiconductor layer and the thickness of the second semiconductor layer is 0.1 N/cm or less.Type: ApplicationFiled: January 30, 2007Publication date: August 2, 2007Inventors: Tomohiro Murata, Hidetoshi Ishida
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Patent number: 7247891Abstract: A semiconductor device has a first nitride semiconductor layer, a second nitride semiconductor layer formed on the first nitride semiconductor layer and having such a composition as to generate a 2-dimensional electron gas layer in the upper portion of the first nitride semiconductor layer, and an electrode having an ohmic property and formed selectively on the second nitride semiconductor layer. The second nitride semiconductor layer includes a contact area having at least one inclined portion with a bottom or wall surface thereof being inclined toward the upper surface of the first nitride semiconductor layer and defining a depressed cross-sectional configuration. The electrode is formed on the contact area.Type: GrantFiled: October 22, 2004Date of Patent: July 24, 2007Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Atsuhiko Kanda, Tsuyoshi Tanaka, Yasuhiro Uemoto, Yutaka Hirose, Tomohiro Murata
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Patent number: 7188136Abstract: In an information distributing method, an information providing resource receives from an information user unit a request statement including a code to identify first information and information (URI) to identify second information quoted in the first information. According to the identifying information of the second information included in the request statement, the information providing resource determines whether or not transmission of the second information to an information providing unit is allowed. The information providing side can control the operation in which the second information thereof is quoted to be opened in the first information.Type: GrantFiled: April 17, 2000Date of Patent: March 6, 2007Assignee: Hitachi, Ltd.Inventors: Hirokazu Aoshima, Tomohiro Murata, Tsukasa Saitou, Kazuya Uemura, Yoshio Endou
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Patent number: 7187014Abstract: A semiconductor device has a sapphire substrate, a semiconductor layer made of GaN provided on the sapphire substrate, a multilayer film provided on the semiconductor layer, and an electrode in ohmic contact with the multilayer film. The multilayer film has been formed by alternately stacking two types of semiconductor layers having different amounts of piezopolarization or different amounts of spontaneous polarization and each containing an n-type impurity so that electrons are induced at the interface between the two types of semiconductor layers. This allows the contact resistance between the electrode and the multilayer film and a parasitic resistance in a current transmission path to be reduced to values lower than in a conventional semiconductor device.Type: GrantFiled: June 8, 2004Date of Patent: March 6, 2007Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Yutaka Hirose, Daisuke Ueda, Tsuyoshi Tanaka, Yasuhiro Uemoto, Tomohiro Murata
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Publication number: 20060289894Abstract: A semiconductor device has: a buffer layer formed on a conductive substrate and made of AlxGa1?xN with a high resistance; an element-forming layer formed on the buffer layer, having a channel layer, and made of undoped GaN and N-type AlyGa1?N; and a source electrode, a drain electrode and a gate electrode which are selectively formed on the element-forming layer. The source electrode is filled in a through hole provided in the buffer layer and the element-forming layer, and is thus electrically connected to the conductive substrate.Type: ApplicationFiled: June 20, 2006Publication date: December 28, 2006Applicant: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.Inventors: Tomohiro Murata, Yutaka Hirose, Yoshito Ikeda, Tsuyoshi Tanaka, Kaoru Inoue, Daisuke Ueda, Yasuhiro Uemoto
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Publication number: 20060284318Abstract: According to a method for fabricating a semiconductor device, a first semiconductor layer made of a first nitride semiconductor is formed over a substrate. Thereafter, a mask film covering part of the upper surface of the first semiconductor layer is selectively formed on the first semiconductor layer. A multilayer film, in which second and third nitride semiconductors having different band gaps are stacked, is selectively formed on the first semiconductor layer with the mask film used as a formation mask. On the multilayer film, an ohmic electrode is formed.Type: ApplicationFiled: May 19, 2006Publication date: December 21, 2006Inventors: Tomohiro Murata, Yutaka Hirose, Yasuhiro Uemoto, Tsuyoshi Tanaka
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Patent number: 7078743Abstract: A semiconductor device has: a buffer layer formed on a conductive substrate and made of AlxGa1-xN with a high resistance; an element-forming layer formed on the buffer layer, having a channel layer, and made of undoped GaN and N-type AlyGa1-yN; and a source electrode, a drain electrode and a gate electrode which are selectively formed on the element-forming layer. The source electrode is filled in a through hole provided in the buffer layer and the element-forming layer, and is thus electrically connected to the conductive substrate.Type: GrantFiled: April 29, 2004Date of Patent: July 18, 2006Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Tomohiro Murata, Yutaka Hirose, Yoshito Ikeda, Tsuyoshi Tanaka, Kaoru Inoue, Daisuke Ueda, Yasuhiro Uemoto
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Publication number: 20060118822Abstract: A semiconductor device comprises an active layer formed on a substrate, a superlattice layer formed on the active layer, and an ohmic electrode formed on the superlattice layer. In the superlattice layer, a first thin film and a second thin film are alternately laminated. The second thin film is made of a semiconductor which has polarization characteristics different from those of the first thin film and a band gap larger than that of the first thin film. An interface region between an upper surface of the first thin film and a lower surface of the second thin film or an interface region between a lower surface of the first thin film and an upper surface of the second thin film, is doped with an impurity.Type: ApplicationFiled: December 5, 2005Publication date: June 8, 2006Inventors: Tomohiro Murata, Yutaka Hirose, Tsuyoshi Tanaka
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Publication number: 20050139838Abstract: A semiconductor device of the present invention includes: a III-V nitride semiconductor layer including a channel region in which carriers travel; a concave portion provided in an upper portion of the channel region in the III-V nitride semiconductor layer; and a Schottky electrode consisting of a conductive material forming a Schottky junction with the semiconductor layer, and formed on a semiconductor layer, which spreads over the concave portion and peripheral portions of the concave portion, on the III-V nitride semiconductor layer. A dimension of the concave portion in a depth direction is set so that a portion of the Schottky electrode provided in the concave portion can adjust a quantity of the carriers traveling in the channel region.Type: ApplicationFiled: December 23, 2004Publication date: June 30, 2005Inventors: Tomohiro Murata, Yutaka Hirose, Tsuyoshi Tanaka, Yasuhiro Uemoto