Abstract: An actuator includes: a casing; a reciprocating member provided in the casing to be reciprocatable; a drive part provided in the casing to drive the reciprocating member; a booster mechanism which is configured to amplify a drive force applied by the drive part to the reciprocating member; and a moving member which is configured to move on receiving the force amplified by the booster mechanism. The booster mechanism includes a plurality of levers which are arranged in a circumferential direction of the moving member. Each of the levers has an effort portion which is configured to receive the force from the reciprocating member, a fulcrum portion which is configured to come into contact with the casing to serve as a center of a revolution of the lever, and a load portion which is configured to transmit the force to the moving member.

Abstract: A valve device includes a valve body that defines flow paths, a diaphragm provided so as to be capable of opening and closing the flow paths, an operation member provided so as to be capable of moving in opening and closing directions that open and close the flow paths by operating the diaphragm, a main actuator that applies a driving force corresponding to an operating pressure applied in the opening direction or the closing direction of the opening and closing directions with respect to the operation member, a switching mechanism capable of selectively switching a position of the operation member that regulates a degree of opening of the flow paths between a first open position and a second open position in accordance with a magnitude of the operating pressure, and regulating mechanisms capable of independently regulating the first open position and the second open position.

Abstract: An information processor includes a controller that is configured to: produce, on the basis of use information of a device manufactured under a manufacturing condition based on spec information, appropriate spec information representing an appropriate spec which is appropriate to the device; and determine a manufacturing condition for the device on the basis of the appropriate spec information.

Abstract: An actuator includes a casing having a first annular groove formed in an inner peripheral portion thereof; a piston having a second annular groove formed in an outer peripheral portion thereof, provided in the casing to form a pressure chamber together with the casing, and driven by a drive fluid from an outside of the actuator; and an annular seal member having a first fitting portion to be fitted into the first annular groove and a second fitting portion to be fitted into the second annular groove to seal the pressure chamber.

Abstract: An actuator includes: a casing; a pressure reducing valve and a piston. The pressure reducing valve is provided in the casing to reduce a pressure of a driving fluid supplied from an outside of the casing to a predetermined level. The piston is provided in the casing to form a pressure chamber together with the casing. The piston is driven by the driving fluid that has been pressure-reduced to the predetermined level.

Abstract: A gas supply system is provided with an automatic valve that is provided in a flow passage and adjusts a flow rate of process gas supplied to a chamber by automatic opening and closing, and a manual valve that is provided downstream of the automatic valve in the flow path and in immediate vicinity of the chamber and adjusts the flow rate of the process gas by manual opening and closing. The manual valve is a direct diaphragm valve having a diaphragm that is placed and separated on and from a seat in conjunction with a stem and a disk along with opening and closing, and includes a stroke adjusting mechanism that adjusts a valve stroke.

Abstract: To provide a valve device capable of easily and precisely adjusting a flow rate of a flowing fluid, and an actuator used in the valve device. The problem is solved by an actuator including pistons housed in a housing, a supply port of compressed air provided to a casing constituting the housing, and an adjustment member that is provided to a position separated from the supply port and regulates an upper limit position of possible movement of the piston that comes into contact with the adjustment member. The piston comes into contact with the adjustment member and is positioned in the upper limit position when compressed air is supplied through the supply port. The adjustment member s provided so as to allow adjustment of the upper limit position from outside the housing.

Abstract: A valve device that greatly reduces man-hours for flow adjustment includes a valve body that defines a flow path, a valve element provided so as to be capable of opening and closing the flow path of the valve body, an operation member that operates the valve element and is moveably provided between a closed position where the valve element closes the flow path and an open position where the valve element opens the flow path, set in advance, in opening and closing directions that allow the valve element to open and close the flow path, a main actuator that moves the operation member in the opening direction, and a piezoelectric actuator for adjusting a position of the operation member positioned in the open position.

Abstract: A fluid controller that reduces an increase in cost by additional components or additional processes for setting means, and solves the problem that a set value of an upward movable amount of a stem changes is provided. An upper surface of an outer peripheral edge portion of a diaphragm holder 7 and a lower surface of an inner peripheral edge portion of a holder adapter 15 are formed so as to oppose to each other with a first gap A interposed therebetween. By setting the first gap A to a predetermined value, an upward movable amount of the diaphragm holder 7 is set.

Abstract: Provided is a diaphragm valve that improves the durability of a diaphragm by focusing on the ratio of the radius of curvature of a pressing surface of a diaphragm presser to the radius of curvature of the diaphragm. SRb/SRa=0.4 to 0.6 is satisfied, wherein SRa represents the radius of curvature of a diaphragm 5 and SRb represents the radius of curvature of a pressing surface of a diaphragm presser 6.

Abstract: Provided is a diaphragm valve in which seat leak occurrence is drastically decreased. A depression 14 is provided at a radially middle part of a top of the seat 11. A first seal portion 17 is provided between a diaphragm 6 and a radially inward part 15 of the top of the seat 11. A second seal portion 18 is provided between a diaphragm 6 and a radially outward part 16 of the top of the seat 11. An outer circumferential surface 14b of the depression 14 has a cylindrical surface.

Abstract: A pipe joint includes a first member, a second member, a weld experiencing transverse contraction and joining a first outer cylindrical end portion and a second outer cylindrical end portion butted with their end faces meeting over the entire circumference, an annular sealed area produced by the transverse contraction of the weld causing a first pressing portion and a second pressing portion to be displaced toward each other, a heat transmission suppressing member arranged in a space delimited by a weld forming area and a to-be-sealed area, inside the first and second members assembled, to suppress transmission of heat applied in welding from the weld forming area to a to-be-sealed area, and a first stop ring fitted in an outer cylindrical surface of the heat transmission suppressing member to hold the heat transmission suppressing member against an inner surface of the first or the second member.

Abstract: A first ring and a second ring are inserted through the pipe. The pipe is inserted through a fastening member, and a tip of the pipe is inserted into a first concave part of the joint. By screwing a screw part of the fastening member to a screw part of the joint, the first ring and the second ring are pressed against the first contact surface provided to the first concave part, and bite into the pipe to fix the pipe. Further, the pipe fixed by the first ring and the second ring is moved to a joint side by a pressing force to press an orifice plate installed in the joint. Consequently, it is possible to maintain sealability of a flow path in the joint at a plurality of places including a place of the orifice plate.

Abstract: Provided are a fixing device for a lower-stage member which facilitates a leveling operation for making upper surfaces of lower-stage members coplanar, and can further enhance a vibration absorbing effect generated by an elastic member, and a fluid control device which includes the fixing device. A fixing device for a lower-stage member is configured such that respective lower-stage members (2) are fixed once and, thereafter, a desired lower-stage member (2) is moved upwardly against an elastic force (21) so as to finely adjust positions of upper surfaces of a plurality of lower-stage members (2). The elastic member (21) is formed of an annular body made of rubber or a synthetic resin. A cutout (21a, 21b) which imparts the elastic deformation by bending when a force in the vertical direction is applied to the elastic member (21) is formed on an upper portion and a lower portion of an inner peripheral surface of the elastic member (21).

Abstract: A multistage piston actuator exerts a driving pressure against a spring pressure into pressure chambers of piston bodies, fitted into a cylinder body, to operate the push rod. Each piston body is combined with a partition fitted into the cylinder body. Each piston body includes a pressure receiving plate portion, and an axial rod and a slidable cylindrical guide portion extending concentrically in opposite directions, the axial rod having an axial air passage connected to the pressure chambers. Each partition includes a base plate portion having a through-hole which receives the axial rod of an adjacent piston body, a large-diameter outermost cylindrical portion fitted into the cylinder body, and a slidable cylindrical guide portion slidably fit-engaged with the slidable cylindrical guide portion of the piston body. The axial rods of each piston body are brought into contact to operate the push rod.

Abstract: Provided is a diaphragm valve that improves the durability of a diaphragm by focusing on the ratio of the radius of curvature of a pressing surface of a diaphragm presser to the radius of curvature of the diaphragm. SRb/SRa=0.4 to 0.6 is satisfied, wherein SRa represents the radius of curvature of a diaphragm 5 and SRb represents the radius of curvature of a pressing surface of a diaphragm presser 6.

Abstract: A bolt-locking apparatus includes a plurality of fitting members 2 and 3 which are relatively non-rotatably fitted to heads of a plurality of bolts 5, and an engaging member 4 fitted to the plurality of fitting members 2 and 3 such that the engaging member 4 straddles the fitting members 2 and 3. Outer peripheral surfaces 2b and 3b of the fitting members 2 and 3 are non-circular in shape. The engaging member 4 includes a plurality of engaging holes (non-circular engaging portions) 8a and 8b which correspond to the non-circular outer peripheral surfaces 2b and 3b of the plurality of fitting members 2 and 3.

Abstract: A multistage piston actuator exerts a driving pressure against a spring pressure into pressure chambers of piston bodies, fitted into a cylinder body, to operate the push rod. Each piston body is combined with a partition fitted into the cylinder body. Each piston body includes a pressure receiving plate portion, and an axial rod and a slidable cylindrical guide portion extending concentrically in opposite directions, the axial rod having an axial air passage connected to the pressure chambers. Each partition includes a base plate portion having a through-hole which receives the axial rod of an adjacent piston body, a large-diameter outermost cylindrical portion fitted into the cylinder body, and a slidable cylindrical guide portion slidably fit-engaged with the slidable cylindrical guide portion of the piston body. The axial rods of each piston body are brought into contact to operate the push rod.

Abstract: As passages forming a main gas passage, each of the passage blocks 3 has a first inverted-V passage, a first outlet passage communicating between the apex of the first inverted-V passage and an outlet of a first on-off valve. As passages forming a vent gas passage, each of the passage blocks 3 has a second inverted-V passage and a second outlet passage communicating between the apex of the second inverted-V passage and an outlet of a second on-off valve. As passages forming a first sub-gas inflow passage, each of the passage blocks has a first inlet passage leading to an inlet of the first on-off valve and a common inlet passage. As passages forming a second sub-gas inflow passage, each of the passage blocks has a second inlet passage leading to an inlet of the second on-off valve and a communication path continued to the common inlet passage.

Abstract: A fluid controller that reduces an increase in cost by additional components or additional processes for setting means, and solves the problem that a set value of an upward movable amount of a stem changes is provided. An upper surface of an outer peripheral edge portion of a diaphragm holder 7 and a lower surface of an inner peripheral edge portion of a holder adapter 15 are formed so as to oppose to each other with a first gap A interposed therebetween. By setting the first gap A to a predetermined value, an upward movable amount of the diaphragm holder 7 is set.