Abstract: A valve device that greatly reduces man-hours for flow adjustment includes a valve body that defines a flow path, a valve element provided so as to be capable of opening and closing the flow path of the valve body, an operation member that operates the valve element and is moveably provided between a closed position where the valve element closes the flow path and an open position where the valve element opens the flow path, set in advance, in opening and closing directions that allow the valve element to open and close the flow path, a main actuator that moves the operation member in the opening direction, and a piezoelectric actuator for adjusting a position of the operation member positioned in the open position.

Abstract: Provided is a diaphragm valve that improves the durability of a diaphragm by focusing on the ratio of the radius of curvature of a pressing surface of a diaphragm presser to the radius of curvature of the diaphragm. SRb/SRa=0.4 to 0.6 is satisfied, wherein SRa represents the radius of curvature of a diaphragm 5 and SRb represents the radius of curvature of a pressing surface of a diaphragm presser 6.

Abstract: A fluid controller that reduces an increase in cost by additional components or additional processes for setting means, and solves the problem that a set value of an upward movable amount of a stem changes is provided. An upper surface of an outer peripheral edge portion of a diaphragm holder 7 and a lower surface of an inner peripheral edge portion of a holder adapter 15 are formed so as to oppose to each other with a first gap A interposed therebetween. By setting the first gap A to a predetermined value, an upward movable amount of the diaphragm holder 7 is set.

Abstract: Provided is a diaphragm valve in which seat leak occurrence is drastically decreased. A depression 14 is provided at a radially middle part of a top of the seat 11. A first seal portion 17 is provided between a diaphragm 6 and a radially inward part 15 of the top of the seat 11. A second seal portion 18 is provided between a diaphragm 6 and a radially outward part 16 of the top of the seat 11. An outer circumferential surface 14b of the depression 14 has a cylindrical surface.

Abstract: A pipe joint includes a first member, a second member, a weld experiencing transverse contraction and joining a first outer cylindrical end portion and a second outer cylindrical end portion butted with their end faces meeting over the entire circumference, an annular sealed area produced by the transverse contraction of the weld causing a first pressing portion and a second pressing portion to be displaced toward each other, a heat transmission suppressing member arranged in a space delimited by a weld forming area and a to-be-sealed area, inside the first and second members assembled, to suppress transmission of heat applied in welding from the weld forming area to a to-be-sealed area, and a first stop ring fitted in an outer cylindrical surface of the heat transmission suppressing member to hold the heat transmission suppressing member against an inner surface of the first or the second member.

Abstract: A first ring and a second ring are inserted through the pipe. The pipe is inserted through a fastening member, and a tip of the pipe is inserted into a first concave part of the joint. By screwing a screw part of the fastening member to a screw part of the joint, the first ring and the second ring are pressed against the first contact surface provided to the first concave part, and bite into the pipe to fix the pipe. Further, the pipe fixed by the first ring and the second ring is moved to a joint side by a pressing force to press an orifice plate installed in the joint. Consequently, it is possible to maintain sealability of a flow path in the joint at a plurality of places including a place of the orifice plate.

Abstract: Provided are a fixing device for a lower-stage member which facilitates a leveling operation for making upper surfaces of lower-stage members coplanar, and can further enhance a vibration absorbing effect generated by an elastic member, and a fluid control device which includes the fixing device. A fixing device for a lower-stage member is configured such that respective lower-stage members (2) are fixed once and, thereafter, a desired lower-stage member (2) is moved upwardly against an elastic force (21) so as to finely adjust positions of upper surfaces of a plurality of lower-stage members (2). The elastic member (21) is formed of an annular body made of rubber or a synthetic resin. A cutout (21a, 21b) which imparts the elastic deformation by bending when a force in the vertical direction is applied to the elastic member (21) is formed on an upper portion and a lower portion of an inner peripheral surface of the elastic member (21).

Abstract: A multistage piston actuator exerts a driving pressure against a spring pressure into pressure chambers of piston bodies, fitted into a cylinder body, to operate the push rod. Each piston body is combined with a partition fitted into the cylinder body. Each piston body includes a pressure receiving plate portion, and an axial rod and a slidable cylindrical guide portion extending concentrically in opposite directions, the axial rod having an axial air passage connected to the pressure chambers. Each partition includes a base plate portion having a through-hole which receives the axial rod of an adjacent piston body, a large-diameter outermost cylindrical portion fitted into the cylinder body, and a slidable cylindrical guide portion slidably fit-engaged with the slidable cylindrical guide portion of the piston body. The axial rods of each piston body are brought into contact to operate the push rod.

Abstract: Provided is a diaphragm valve that improves the durability of a diaphragm by focusing on the ratio of the radius of curvature of a pressing surface of a diaphragm presser to the radius of curvature of the diaphragm. SRb/SRa=0.4 to 0.6 is satisfied, wherein SRa represents the radius of curvature of a diaphragm 5 and SRb represents the radius of curvature of a pressing surface of a diaphragm presser 6.

Abstract: A bolt-locking apparatus includes a plurality of fitting members 2 and 3 which are relatively non-rotatably fitted to heads of a plurality of bolts 5, and an engaging member 4 fitted to the plurality of fitting members 2 and 3 such that the engaging member 4 straddles the fitting members 2 and 3. Outer peripheral surfaces 2b and 3b of the fitting members 2 and 3 are non-circular in shape. The engaging member 4 includes a plurality of engaging holes (non-circular engaging portions) 8a and 8b which correspond to the non-circular outer peripheral surfaces 2b and 3b of the plurality of fitting members 2 and 3.

Abstract: A multistage piston actuator exerts a driving pressure against a spring pressure into pressure chambers of piston bodies, fitted into a cylinder body, to operate the push rod. Each piston body is combined with a partition fitted into the cylinder body. Each piston body includes a pressure receiving plate portion, and an axial rod and a slidable cylindrical guide portion extending concentrically in opposite directions, the axial rod having an axial air passage connected to the pressure chambers. Each partition includes a base plate portion having a through-hole which receives the axial rod of an adjacent piston body, a large-diameter outermost cylindrical portion fitted into the cylinder body, and a slidable cylindrical guide portion slidably fit-engaged with the slidable cylindrical guide portion of the piston body. The axial rods of each piston body are brought into contact to operate the push rod.

Abstract: As passages forming a main gas passage, each of the passage blocks 3 has a first inverted-V passage, a first outlet passage communicating between the apex of the first inverted-V passage and an outlet of a first on-off valve. As passages forming a vent gas passage, each of the passage blocks 3 has a second inverted-V passage and a second outlet passage communicating between the apex of the second inverted-V passage and an outlet of a second on-off valve. As passages forming a first sub-gas inflow passage, each of the passage blocks has a first inlet passage leading to an inlet of the first on-off valve and a common inlet passage. As passages forming a second sub-gas inflow passage, each of the passage blocks has a second inlet passage leading to an inlet of the second on-off valve and a communication path continued to the common inlet passage.

Abstract: A fluid controller that reduces an increase in cost by additional components or additional processes for setting means, and solves the problem that a set value of an upward movable amount of a stem changes is provided. An upper surface of an outer peripheral edge portion of a diaphragm holder 7 and a lower surface of an inner peripheral edge portion of a holder adapter 15 are formed so as to oppose to each other with a first gap A interposed therebetween. By setting the first gap A to a predetermined value, an upward movable amount of the diaphragm holder 7 is set.

Abstract: A bolt-locking apparatus includes a plurality of fitting members 2 and 3 which are relatively non-rotatably fitted to heads of a plurality of bolts 5, and an engaging member 4 fitted to the plurality of fitting members 2 and 3 such that the engaging member 4 straddles the fitting members 2 and 3. Outer peripheral surfaces 2b and 3b of the fitting members 2 and 3 are non-circular in shape. The engaging member 4 includes a plurality of engaging holes (non-circular engaging portions) 8a and 8b which correspond to the non-circular outer peripheral surfaces 2b and 3b of the plurality of fitting members 2 and 3.

Abstract: Provided are a fixing device for a lower-stage member which facilitates a leveling operation for making upper surfaces of lower-stage members coplanar, and can further enhance a vibration absorbing effect generated by an elastic member, and a fluid control device which includes the fixing device. A fixing device for a lower-stage member is configured such that respective lower-stage members (2) are fixed once and, thereafter, a desired lower-stage member (2) is moved upwardly against an elastic force (21) so as to finely adjust positions of upper surfaces of a plurality of lower-stage members (2). The elastic member (21) is formed of an annular body made of rubber or a synthetic resin. A cutout (21a, 21b) which imparts the elastic deformation by bending when a force in the vertical direction is applied to the elastic member (21) is formed on an upper portion and a lower portion of an inner peripheral surface of the elastic member (21).

Abstract: A retainer includes an annular gasket retaining portion for retaining a gasket therein and an annular coupling member retaining portion which has an inner diameter greater than that of the gasket retaining portion and retains one coupling member. At an inner circumference of the gasket retaining portion and an inner circumference of the coupling member retaining portion are formed annular grooves, respectively, for holding therein elastic rings, respectively.

Abstract: As passages forming a main gas passage, each of the passage blocks 3 has a first inverted-V passage, a first outlet passage communicating between the apex of the first inverted-V passage and an outlet of a first on-off valve. As passages forming a vent gas passage, each of the passage blocks 3 has a second inverted-V passage and a second outlet passage communicating between the apex of the second inverted-V passage and an outlet of a second on-off valve. As passages forming a first sub-gas inflow passage, each of the passage blocks has a first inlet passage leading to an inlet of the first on-off valve and a common inlet passage. As passages forming a second sub-gas inflow passage, each of the passage blocks has a second inlet passage leading to an inlet of the second on-off valve and a communication path continued to the common inlet passage.

Abstract: A bolt-locking apparatus includes a plurality of fitting members 2 and 3 which are relatively non-rotatably fitted to heads of a plurality of bolts 5, and an engaging member 4 fitted to the plurality of fitting members 2 and 3 such that the engaging member 4 straddles the fitting members 2 and 3. Outer peripheral surfaces 2b and 3b of the fitting members 2 and 3 are non-circular in shape. The engaging member 4 includes a plurality of engaging holes (non-circular engaging portions) 8a and 8b which correspond to the non-circular outer peripheral surfaces 2b and 3b of the plurality of fitting members 2 and 3.

Abstract: Provided is a diaphragm valve in which seat leak occurrence is drastically decreased. A depression 14 is provided at a radially middle part of a top of the seat 11. A first seal portion 17 is provided between a diaphragm 6 and a radially inward part 15 of the top of the seat 11. A second seal portion 18 is provided between a diaphragm 6 and a radially outward part 16 of the top of the seat 11. An outer circumferential surface 14b of the depression 14 has a cylindrical surface.

Abstract: A pipe joint for preventing fine particles generated when a male threaded member and a female threaded member are threadedly engaged with each other from entering a fluid passage thus maintaining a high degree of cleanliness. Joint members are joined to each other by a male threaded member formed on one joint member and a female threaded member formed on the other joint member. A cover portion which covers outer peripheral surfaces of abutting portions of both joint members is formed on the male threaded member.