Patents by Inventor Tomohiro Yorisue
Tomohiro Yorisue has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11809079Abstract: A semiconductor device having a copper wiring and an insulating layer provided on the copper wiring, where after storage in air with a humidity of 5% for 168 hours at 150° C., the area of void portion of the copper wiring is 10% or less at the copper wiring surface in contact with the insulating layer. The insulating layer contains at least one polyimide that has (i) a structure derived from 4,4?-oxydiphthalic acid dianhydride and a structure derived from 4,4?-diaminodiphenyl ether; or (ii) a structure derived from 3,3?4,4?-biphenyltetracarboxylic acid dianhydride and a structure derived from 4,4?-diaminodiphenyl ether; or (iii) a structure derived from 4,4?-oxydiphthalic acid dianhydride and a structure derived from 2,2?-dimethyl-4,4?-diaminobiphenyl.Type: GrantFiled: May 16, 2022Date of Patent: November 7, 2023Assignee: ASAHI KASEI KABUSHIKI KAISHAInventors: Tomohiro Yorisue, Yoshito Ido, Taihei Inoue, Harumi Matsuda
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Publication number: 20230221639Abstract: A negative-type photosensitive resin composition that has a satisfactory imidization rate and can yield a resin layer with high chemical resistance, even under low-temperature curing conditions of 200° C. or below, the negative-type photosensitive resin composition containing a photopolymerization initiator (B) in a proportion of 0.1 part by mass to 20 parts by mass with respect to 100 parts by mass of a polyimide precursor (A), the polyimide precursor (A) being a polyamic acid ester or polyamic acid salt with a specific structure, and the weight-average molecular weight (Mw) of the polyimide precursor (A) being 3,000 or greater and less than 16,000, in terms of polystyrene, according to gel permeation chromatography (GPC).Type: ApplicationFiled: March 21, 2023Publication date: July 13, 2023Applicant: ASAHI KASEI KABUSHIKI KAISHAInventors: Tomohiro YORISUE, Mitsutaka NAKAMURA, Taihei INOUE
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Patent number: 11640112Abstract: A negative-type photosensitive resin composition that has a satisfactory imidization rate and can yield a resin layer with high chemical resistance, even under low-temperature curing conditions of 200° C. or below, the negative-type photosensitive resin composition containing a photopolymerization initiator (B) in a proportion of 0.1 part by mass to 20 parts by mass with respect to 100 parts by mass of a polyimide precursor (A), the polyimide precursor (A) being a polyamic acid ester or polyamic acid salt with a specific structure, and the weight-average molecular weight (Mw) of the polyimide precursor (A) being 3,000 or greater and less than 16,000, in terms of polystyrene, according to gel permeation chromatography (GPC).Type: GrantFiled: September 21, 2021Date of Patent: May 2, 2023Assignee: ASAHI KASEI KABUSHIKI KAISHAInventors: Tomohiro Yorisue, Tatsuya Hirata, Takahiro Sasaki
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Publication number: 20220269170Abstract: A semiconductor device having a copper wiring and an insulating layer provided on the copper wiring, where after storage in air with a humidity of 5% for 168 hours at 150° C., the area of void portion of the copper wiring is 10% or less at the copper wiring surface in contact with the insulating layer. The insulating layer contains at least one polyimide that has (i) a structure derived from 4,4?-oxydiphthalic acid dianhydride and a structure derived from 4,4?-diaminodiphenyl ether; or (ii) a structure derived from 3,3?4,4?-biphenyltetracarboxylic acid dianhydride and a structure derived from 4,4?-diaminodiphenyl ether; or (iii) a structure derived from 4,4?-oxydiphthalic acid dianhydride and a structure derived from 2,2?-dimethyl-4,4?-diaminobiphenyl.Type: ApplicationFiled: May 16, 2022Publication date: August 25, 2022Applicant: ASAHI KASEI KABUSHIKI KAISHAInventors: Tomohiro YORISUE, Yoshito IDO, Taihei INOUE, Harumi MATSUDA
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Publication number: 20220011669Abstract: A negative-type photosensitive resin composition that has a satisfactory imidization rate and can yield a resin layer with high chemical resistance, even under low-temperature curing conditions of 200° C. or below, the negative-type photosensitive resin composition containing a photopolymerization initiator (B) in a proportion of 0.1 part by mass to 2.Type: ApplicationFiled: September 21, 2021Publication date: January 13, 2022Applicant: ASAHI KASEI KABUSHIKI KAISHAInventors: Tomohiro YORISUE, Tatsuya HIRATA, Takahiro SASAKI
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Patent number: 11163234Abstract: A negative-type photosensitive resin composition that has a satisfactory imidization rate and can yield a resin layer with high chemical resistance, even under low-temperature curing conditions of 200° C. or below, the negative-type photosensitive resin composition containing a photopolymerization initiator (B) in a proportion of 0.1 part by mass to 20 parts by mass with respect to 100 parts by mass of a polyimide precursor (A), the polyimide precursor (A) being a polyamic acid ester or polyamic acid salt with a specific structure, and the weight-average molecular weight (Mw) of the polyimide precursor (A) being 3,000 or greater and less than 16,000, in terms of polystyrene, according to gel permeation chromatography (GPC).Type: GrantFiled: August 17, 2017Date of Patent: November 2, 2021Assignee: ASAHI KASEI KABUSHIKI KAISHAInventors: Tomohiro Yorisue, Mitsutaka Nakamura, Taihei Inoue, Tatsuya Hirata, Takahiro Sasaki
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Publication number: 20200409263Abstract: A photosensitive resin composition containing a resin and a compound each having a structure specified by the present specification provides a cured film having excellent adhesiveness to copper wiring.Type: ApplicationFiled: September 11, 2020Publication date: December 31, 2020Applicant: ASAHI KASEI KABUSHIKI KAISHAInventors: Tomohiro YORISUE, Taihei INOUE, Yoshito IDO, Mitsutaka NAKAMURA, Tomoshige YUNOKUCHI, Daisuke SASANO, Takahiro SASAKI
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Patent number: 10831101Abstract: A photosensitive resin composition containing a resin and a compound each having a structure specified by the present specification provides a cured film having excellent adhesiveness to copper wiring.Type: GrantFiled: March 28, 2017Date of Patent: November 10, 2020Assignee: ASAHI KASEI KABUSHIKI KAISHAInventors: Tomohiro Yorisue, Taihei Inoue, Yoshito Ido, Mitsutaka Nakamura, Tomoshige Yunokuchi, Daisuke Sasano, Takahiro Sasaki
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Publication number: 20200301273Abstract: A semiconductor device having a copper wiring and an insulating layer provided on the copper wiring, where after storage in air with a humidity of 5% for 168 hours at 150° C., the area of void portion of the copper wiring is 10% or less at the copper wiring surface in contact with the insulating layer. The insulating layer contains at least one polyimide that has (i) a structure derived from 4,4?-oxydiphthalic acid dianhydride and a structure derived from 4,4?-diaminodiphenyl ether; or (ii) a structure derived from 3,3?4,4?-biphenyltetracarboxylic acid dianhydride and a structure derived from 4,4?-diaminodiphenyl ether; or (iii) a structure derived from 4,4?-oxydiphthalic acid dianhydride and a structure derived from 2,2?-dimethyl-4,4?-diaminobiphenyl.Type: ApplicationFiled: June 5, 2020Publication date: September 24, 2020Applicant: ASAHI KASEI KABUSHIKI KAISHAInventors: Tomohiro YORISUE, Yoshito IDO, Taihei INOUE, Harumi MATSUDA
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Patent number: 10719016Abstract: A photosensitive resin composition, ensuring that after a high-temperature storage test, a void is less likely to be generated at the interface of a Cu layer in contact with a polyimide layer and a high-adhesion polyimide layer is obtained, and a polyimide using the photosensitive resin composition, can be provided. Furthermore, a semiconductor device in which after a high-temperature storage test, a void is less likely to be generated at the interface of a Cu layer in contact with a polyimide layer and short circuiting or disconnection following a high-temperature storage test is unlikely to occur. A photosensitive resin composition is characterized by including a component (A) as a photosensitive polyimide precursor, and a component (B) containing a structure represented by formula (B1). (In formula (B1), Z is a sulfur or oxygen atom, and each of R1 to R4 independently represents a hydrogen atom or a monovalent organic group).Type: GrantFiled: August 18, 2016Date of Patent: July 21, 2020Assignee: ASAHI KASEI KABUSHIKI KAISHAInventors: Tomohiro Yorisue, Yoshito Ido, Taihei Inoue, Harumi Matsuda
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Publication number: 20190113845Abstract: A photosensitive resin composition containing a resin and a compound each having a structure specified by the present specification provides a cured film having excellent adhesiveness to copper wiring.Type: ApplicationFiled: March 28, 2017Publication date: April 18, 2019Applicants: ASAHI KASEI KABUSHIKI KAISHA, ASAHI KASEI KABUSHIKI KAISHAInventors: Tomohiro YORISUE, Taihei INOUE, Yoshito IDO, Mitsutaka NAKAMURA, Tomoshige YUNOKUCHI, Daisuke SASANO, Takahiro SASAKI
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Publication number: 20190072850Abstract: A photosensitive resin composition, ensuring that after a high-temperature storage test, a void is less likely to be generated at the interface of a Cu layer in contact with a polyimide layer and a high-adhesion polyimide layer is obtained, and a polyimide using the photosensitive resin composition, can be provided. Furthermore, a semiconductor device in which after a high-temperature storage test, a void is less likely to be generated at the interface of a Cu layer in contact with a polyimide layer and short circuiting or disconnection following a high-temperature storage test is unlikely to occur. A photosensitive resin composition is characterized by including a component (A) as a photosensitive polyimide precursor, and a component (B) containing a structure represented by formula (B1). (In formula (B1), Z is a sulfur or oxygen atom, and each of R1 to R4 independently represents a hydrogen atom or a monovalent organic group).Type: ApplicationFiled: August 18, 2016Publication date: March 7, 2019Applicant: ASAHI KASEI KABUSHIKI KAISHAInventors: Tomohiro YORISUE, Yoshito IDO, Taihei INOUE, Harumi MATSUDA
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Publication number: 20180373147Abstract: A negative-type photosensitive resin composition that has a satisfactory imidization rate and can yield a resin layer with high chemical resistance, even under low-temperature curing conditions of 200° C. or below, the negative-type photosensitive resin composition containing a photopolymerization initiator (B) in a proportion of 0.1 part by mass to 20 parts by mass with respect to 100 parts by mass of a polyimide precursor (A), the polyimide precursor (A) being a polyamic acid ester or polyamic acid salt with a specific structure, and the weight-average molecular weight (Mw) of the polyimide precursor (A) being 3,000 or greater and less than 16,000, in terms of polystyrene, according to gel permeation chromatography (GPC).Type: ApplicationFiled: August 17, 2017Publication date: December 27, 2018Applicant: ASAHI KASEI KABUSHIKI KAISHAInventors: Tomohiro YORISUE, Mitsutaka NAKAMURA, Taihei INOUE, Tatsuya HIRATA, Takahiro SASAKI
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Patent number: 8628673Abstract: Disclosed are: a resin composition for pattern formation, which enables the stable formation of a pattern at a level of the wavelength of light; a method for forming a pattern having a sea-island structure using the composition; and a process for producing a light-emitting element that can achieve high luminous efficiency properties.Type: GrantFiled: May 12, 2010Date of Patent: January 14, 2014Assignees: Kabushiki Kaisha Toshiba, Asahi Kasei E-Materials CorporationInventors: Koji Asakawa, Ryota Kitagawa, Akira Fujimoto, Yoshiaki Shirae, Tomohiro Yorisue, Akihiko Ikeda
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Patent number: 8557498Abstract: A photosensitive resin composition is used that comprises a photosensitive silicone having a styryl group as a photosensitive group, and a photopolymerization initiator having a specific structure. As a result, a photosensitive resin composition capable of being cured in air by photopolymerization that is preferable for use as a buffer coat material or rewiring layer of an LSI chip, a method for forming a cured relief pattern using this photosensitive resin composition, and a semiconductor device comprising the cured relief pattern are provided.Type: GrantFiled: March 25, 2008Date of Patent: October 15, 2013Assignee: Asahi Kasei E-Materials CorporationInventor: Tomohiro Yorisue
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Publication number: 20120097640Abstract: Disclosed are: a resin composition for pattern formation, which enables the stable formation of a pattern at a level of the wavelength of light; a method for forming a pattern having a sea-island structure using the composition; and a process for producing a light-emitting element that can achieve high luminous efficiency properties.Type: ApplicationFiled: May 12, 2010Publication date: April 26, 2012Applicants: ASAHI KASEI E-MATERIALS CORPORATION, KABUSHIKI KAISHA TOSHIBAInventors: Koji Asakawa, Ryota Kitagawa, Akira Fujimoto, Yoshiaki Shirae, Tomohiro Yorisue, Akihiko Ikeda
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Patent number: 8043899Abstract: A photosensitive resin composition comprising a photosensitive silicone compound of specified molecular weight having any of specified photosensitive substituents and a photopolymerization initiator in any of specified proportions is used. Thus, there can be obtained a resin composition containing a photosensitive silicone compound that provides a material suitable for a rewiring layer or a buffer coat material of LSI chip, less in a film loss between before and after curing and improved in the stickiness of pre-exposure stage. Further, there can be obtained a resin insulating film utilizing the resin composition.Type: GrantFiled: March 25, 2008Date of Patent: October 25, 2011Assignee: Asahi Kasei E-Materials CorporationInventor: Tomohiro Yorisue
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Publication number: 20100123259Abstract: A photosensitive resin composition comprising a photosensitive silicone compound of specified molecular weight having any of specified photosensitive substituents and a photopolymerization initiator in any of specified proportions is used. Thus, there can be obtained a resin composition containing a photosensitive silicone compound that provides a material suitable for a rewiring layer or a buffer coat material of LSI chip, less in a film loss between before and after curing and improved in the stickiness of pre-exposure stage. Further, there can be obtained a resin insulating film utilizing the resin composition.Type: ApplicationFiled: March 25, 2008Publication date: May 20, 2010Inventor: Tomohiro Yorisue
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Publication number: 20100104827Abstract: A photosensitive resin composition is used that comprises a photosensitive silicone having a styryl group as a photosensitive group, and a photopolymerization initiator having a specific structure. As a result, a photosensitive resin composition capable of being cured in air by photopolymerization that is preferable for use as a buffer coat material or rewiring layer of an LSI chip, a method for forming a cured relief pattern using this photosensitive resin composition, and a semiconductor device comprising the cured relief pattern are provided.Type: ApplicationFiled: March 25, 2008Publication date: April 29, 2010Inventor: Tomohiro Yorisue
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Publication number: 20100019399Abstract: Disclosed is a polyorganosiloxane composition containing the following components (a)-(c). (a) 100 parts by mass of a polyorganosiloxane obtained by mixing at least one silanol compound represented by the general formula (1) below, at least one alkoxysilane compound represented by the general formula (2) below, and at least one catalyst selected from the group consisting of compounds represented by the general formula (3) below, compounds represented by the general formula (4) below and Ba(OH)2, and polymerizing the mixture without actively adding water thereinto [chemical formula 1] R2Si(OH)2 (1) [chemical formula 2] R?Si(OR?)3 (2) (chemical formula 3] M(OR??)4 (3) [chemical formula 4] M?(OR??)3 (4) (b) 0.1-20 parts by mass of a photopolymerization initiator (c) 1-100 parts by mass of a compound other than the component (a) having two or more photopolymerizable unsaturated bonding groups.Type: ApplicationFiled: September 28, 2007Publication date: January 28, 2010Inventors: Masashi Kimura, Masato Mikawa, Hideyuki Fujiyama, Takaaki Kobayashi, Tomohiro Yorisue