Patents by Inventor Tomohiro Yorisue

Tomohiro Yorisue has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11809079
    Abstract: A semiconductor device having a copper wiring and an insulating layer provided on the copper wiring, where after storage in air with a humidity of 5% for 168 hours at 150° C., the area of void portion of the copper wiring is 10% or less at the copper wiring surface in contact with the insulating layer. The insulating layer contains at least one polyimide that has (i) a structure derived from 4,4?-oxydiphthalic acid dianhydride and a structure derived from 4,4?-diaminodiphenyl ether; or (ii) a structure derived from 3,3?4,4?-biphenyltetracarboxylic acid dianhydride and a structure derived from 4,4?-diaminodiphenyl ether; or (iii) a structure derived from 4,4?-oxydiphthalic acid dianhydride and a structure derived from 2,2?-dimethyl-4,4?-diaminobiphenyl.
    Type: Grant
    Filed: May 16, 2022
    Date of Patent: November 7, 2023
    Assignee: ASAHI KASEI KABUSHIKI KAISHA
    Inventors: Tomohiro Yorisue, Yoshito Ido, Taihei Inoue, Harumi Matsuda
  • Publication number: 20230221639
    Abstract: A negative-type photosensitive resin composition that has a satisfactory imidization rate and can yield a resin layer with high chemical resistance, even under low-temperature curing conditions of 200° C. or below, the negative-type photosensitive resin composition containing a photopolymerization initiator (B) in a proportion of 0.1 part by mass to 20 parts by mass with respect to 100 parts by mass of a polyimide precursor (A), the polyimide precursor (A) being a polyamic acid ester or polyamic acid salt with a specific structure, and the weight-average molecular weight (Mw) of the polyimide precursor (A) being 3,000 or greater and less than 16,000, in terms of polystyrene, according to gel permeation chromatography (GPC).
    Type: Application
    Filed: March 21, 2023
    Publication date: July 13, 2023
    Applicant: ASAHI KASEI KABUSHIKI KAISHA
    Inventors: Tomohiro YORISUE, Mitsutaka NAKAMURA, Taihei INOUE
  • Patent number: 11640112
    Abstract: A negative-type photosensitive resin composition that has a satisfactory imidization rate and can yield a resin layer with high chemical resistance, even under low-temperature curing conditions of 200° C. or below, the negative-type photosensitive resin composition containing a photopolymerization initiator (B) in a proportion of 0.1 part by mass to 20 parts by mass with respect to 100 parts by mass of a polyimide precursor (A), the polyimide precursor (A) being a polyamic acid ester or polyamic acid salt with a specific structure, and the weight-average molecular weight (Mw) of the polyimide precursor (A) being 3,000 or greater and less than 16,000, in terms of polystyrene, according to gel permeation chromatography (GPC).
    Type: Grant
    Filed: September 21, 2021
    Date of Patent: May 2, 2023
    Assignee: ASAHI KASEI KABUSHIKI KAISHA
    Inventors: Tomohiro Yorisue, Tatsuya Hirata, Takahiro Sasaki
  • Publication number: 20220269170
    Abstract: A semiconductor device having a copper wiring and an insulating layer provided on the copper wiring, where after storage in air with a humidity of 5% for 168 hours at 150° C., the area of void portion of the copper wiring is 10% or less at the copper wiring surface in contact with the insulating layer. The insulating layer contains at least one polyimide that has (i) a structure derived from 4,4?-oxydiphthalic acid dianhydride and a structure derived from 4,4?-diaminodiphenyl ether; or (ii) a structure derived from 3,3?4,4?-biphenyltetracarboxylic acid dianhydride and a structure derived from 4,4?-diaminodiphenyl ether; or (iii) a structure derived from 4,4?-oxydiphthalic acid dianhydride and a structure derived from 2,2?-dimethyl-4,4?-diaminobiphenyl.
    Type: Application
    Filed: May 16, 2022
    Publication date: August 25, 2022
    Applicant: ASAHI KASEI KABUSHIKI KAISHA
    Inventors: Tomohiro YORISUE, Yoshito IDO, Taihei INOUE, Harumi MATSUDA
  • Publication number: 20220011669
    Abstract: A negative-type photosensitive resin composition that has a satisfactory imidization rate and can yield a resin layer with high chemical resistance, even under low-temperature curing conditions of 200° C. or below, the negative-type photosensitive resin composition containing a photopolymerization initiator (B) in a proportion of 0.1 part by mass to 2.
    Type: Application
    Filed: September 21, 2021
    Publication date: January 13, 2022
    Applicant: ASAHI KASEI KABUSHIKI KAISHA
    Inventors: Tomohiro YORISUE, Tatsuya HIRATA, Takahiro SASAKI
  • Patent number: 11163234
    Abstract: A negative-type photosensitive resin composition that has a satisfactory imidization rate and can yield a resin layer with high chemical resistance, even under low-temperature curing conditions of 200° C. or below, the negative-type photosensitive resin composition containing a photopolymerization initiator (B) in a proportion of 0.1 part by mass to 20 parts by mass with respect to 100 parts by mass of a polyimide precursor (A), the polyimide precursor (A) being a polyamic acid ester or polyamic acid salt with a specific structure, and the weight-average molecular weight (Mw) of the polyimide precursor (A) being 3,000 or greater and less than 16,000, in terms of polystyrene, according to gel permeation chromatography (GPC).
    Type: Grant
    Filed: August 17, 2017
    Date of Patent: November 2, 2021
    Assignee: ASAHI KASEI KABUSHIKI KAISHA
    Inventors: Tomohiro Yorisue, Mitsutaka Nakamura, Taihei Inoue, Tatsuya Hirata, Takahiro Sasaki
  • Publication number: 20200409263
    Abstract: A photosensitive resin composition containing a resin and a compound each having a structure specified by the present specification provides a cured film having excellent adhesiveness to copper wiring.
    Type: Application
    Filed: September 11, 2020
    Publication date: December 31, 2020
    Applicant: ASAHI KASEI KABUSHIKI KAISHA
    Inventors: Tomohiro YORISUE, Taihei INOUE, Yoshito IDO, Mitsutaka NAKAMURA, Tomoshige YUNOKUCHI, Daisuke SASANO, Takahiro SASAKI
  • Patent number: 10831101
    Abstract: A photosensitive resin composition containing a resin and a compound each having a structure specified by the present specification provides a cured film having excellent adhesiveness to copper wiring.
    Type: Grant
    Filed: March 28, 2017
    Date of Patent: November 10, 2020
    Assignee: ASAHI KASEI KABUSHIKI KAISHA
    Inventors: Tomohiro Yorisue, Taihei Inoue, Yoshito Ido, Mitsutaka Nakamura, Tomoshige Yunokuchi, Daisuke Sasano, Takahiro Sasaki
  • Publication number: 20200301273
    Abstract: A semiconductor device having a copper wiring and an insulating layer provided on the copper wiring, where after storage in air with a humidity of 5% for 168 hours at 150° C., the area of void portion of the copper wiring is 10% or less at the copper wiring surface in contact with the insulating layer. The insulating layer contains at least one polyimide that has (i) a structure derived from 4,4?-oxydiphthalic acid dianhydride and a structure derived from 4,4?-diaminodiphenyl ether; or (ii) a structure derived from 3,3?4,4?-biphenyltetracarboxylic acid dianhydride and a structure derived from 4,4?-diaminodiphenyl ether; or (iii) a structure derived from 4,4?-oxydiphthalic acid dianhydride and a structure derived from 2,2?-dimethyl-4,4?-diaminobiphenyl.
    Type: Application
    Filed: June 5, 2020
    Publication date: September 24, 2020
    Applicant: ASAHI KASEI KABUSHIKI KAISHA
    Inventors: Tomohiro YORISUE, Yoshito IDO, Taihei INOUE, Harumi MATSUDA
  • Patent number: 10719016
    Abstract: A photosensitive resin composition, ensuring that after a high-temperature storage test, a void is less likely to be generated at the interface of a Cu layer in contact with a polyimide layer and a high-adhesion polyimide layer is obtained, and a polyimide using the photosensitive resin composition, can be provided. Furthermore, a semiconductor device in which after a high-temperature storage test, a void is less likely to be generated at the interface of a Cu layer in contact with a polyimide layer and short circuiting or disconnection following a high-temperature storage test is unlikely to occur. A photosensitive resin composition is characterized by including a component (A) as a photosensitive polyimide precursor, and a component (B) containing a structure represented by formula (B1). (In formula (B1), Z is a sulfur or oxygen atom, and each of R1 to R4 independently represents a hydrogen atom or a monovalent organic group).
    Type: Grant
    Filed: August 18, 2016
    Date of Patent: July 21, 2020
    Assignee: ASAHI KASEI KABUSHIKI KAISHA
    Inventors: Tomohiro Yorisue, Yoshito Ido, Taihei Inoue, Harumi Matsuda
  • Publication number: 20190113845
    Abstract: A photosensitive resin composition containing a resin and a compound each having a structure specified by the present specification provides a cured film having excellent adhesiveness to copper wiring.
    Type: Application
    Filed: March 28, 2017
    Publication date: April 18, 2019
    Applicants: ASAHI KASEI KABUSHIKI KAISHA, ASAHI KASEI KABUSHIKI KAISHA
    Inventors: Tomohiro YORISUE, Taihei INOUE, Yoshito IDO, Mitsutaka NAKAMURA, Tomoshige YUNOKUCHI, Daisuke SASANO, Takahiro SASAKI
  • Publication number: 20190072850
    Abstract: A photosensitive resin composition, ensuring that after a high-temperature storage test, a void is less likely to be generated at the interface of a Cu layer in contact with a polyimide layer and a high-adhesion polyimide layer is obtained, and a polyimide using the photosensitive resin composition, can be provided. Furthermore, a semiconductor device in which after a high-temperature storage test, a void is less likely to be generated at the interface of a Cu layer in contact with a polyimide layer and short circuiting or disconnection following a high-temperature storage test is unlikely to occur. A photosensitive resin composition is characterized by including a component (A) as a photosensitive polyimide precursor, and a component (B) containing a structure represented by formula (B1). (In formula (B1), Z is a sulfur or oxygen atom, and each of R1 to R4 independently represents a hydrogen atom or a monovalent organic group).
    Type: Application
    Filed: August 18, 2016
    Publication date: March 7, 2019
    Applicant: ASAHI KASEI KABUSHIKI KAISHA
    Inventors: Tomohiro YORISUE, Yoshito IDO, Taihei INOUE, Harumi MATSUDA
  • Publication number: 20180373147
    Abstract: A negative-type photosensitive resin composition that has a satisfactory imidization rate and can yield a resin layer with high chemical resistance, even under low-temperature curing conditions of 200° C. or below, the negative-type photosensitive resin composition containing a photopolymerization initiator (B) in a proportion of 0.1 part by mass to 20 parts by mass with respect to 100 parts by mass of a polyimide precursor (A), the polyimide precursor (A) being a polyamic acid ester or polyamic acid salt with a specific structure, and the weight-average molecular weight (Mw) of the polyimide precursor (A) being 3,000 or greater and less than 16,000, in terms of polystyrene, according to gel permeation chromatography (GPC).
    Type: Application
    Filed: August 17, 2017
    Publication date: December 27, 2018
    Applicant: ASAHI KASEI KABUSHIKI KAISHA
    Inventors: Tomohiro YORISUE, Mitsutaka NAKAMURA, Taihei INOUE, Tatsuya HIRATA, Takahiro SASAKI
  • Patent number: 8628673
    Abstract: Disclosed are: a resin composition for pattern formation, which enables the stable formation of a pattern at a level of the wavelength of light; a method for forming a pattern having a sea-island structure using the composition; and a process for producing a light-emitting element that can achieve high luminous efficiency properties.
    Type: Grant
    Filed: May 12, 2010
    Date of Patent: January 14, 2014
    Assignees: Kabushiki Kaisha Toshiba, Asahi Kasei E-Materials Corporation
    Inventors: Koji Asakawa, Ryota Kitagawa, Akira Fujimoto, Yoshiaki Shirae, Tomohiro Yorisue, Akihiko Ikeda
  • Patent number: 8557498
    Abstract: A photosensitive resin composition is used that comprises a photosensitive silicone having a styryl group as a photosensitive group, and a photopolymerization initiator having a specific structure. As a result, a photosensitive resin composition capable of being cured in air by photopolymerization that is preferable for use as a buffer coat material or rewiring layer of an LSI chip, a method for forming a cured relief pattern using this photosensitive resin composition, and a semiconductor device comprising the cured relief pattern are provided.
    Type: Grant
    Filed: March 25, 2008
    Date of Patent: October 15, 2013
    Assignee: Asahi Kasei E-Materials Corporation
    Inventor: Tomohiro Yorisue
  • Publication number: 20120097640
    Abstract: Disclosed are: a resin composition for pattern formation, which enables the stable formation of a pattern at a level of the wavelength of light; a method for forming a pattern having a sea-island structure using the composition; and a process for producing a light-emitting element that can achieve high luminous efficiency properties.
    Type: Application
    Filed: May 12, 2010
    Publication date: April 26, 2012
    Applicants: ASAHI KASEI E-MATERIALS CORPORATION, KABUSHIKI KAISHA TOSHIBA
    Inventors: Koji Asakawa, Ryota Kitagawa, Akira Fujimoto, Yoshiaki Shirae, Tomohiro Yorisue, Akihiko Ikeda
  • Patent number: 8043899
    Abstract: A photosensitive resin composition comprising a photosensitive silicone compound of specified molecular weight having any of specified photosensitive substituents and a photopolymerization initiator in any of specified proportions is used. Thus, there can be obtained a resin composition containing a photosensitive silicone compound that provides a material suitable for a rewiring layer or a buffer coat material of LSI chip, less in a film loss between before and after curing and improved in the stickiness of pre-exposure stage. Further, there can be obtained a resin insulating film utilizing the resin composition.
    Type: Grant
    Filed: March 25, 2008
    Date of Patent: October 25, 2011
    Assignee: Asahi Kasei E-Materials Corporation
    Inventor: Tomohiro Yorisue
  • Publication number: 20100123259
    Abstract: A photosensitive resin composition comprising a photosensitive silicone compound of specified molecular weight having any of specified photosensitive substituents and a photopolymerization initiator in any of specified proportions is used. Thus, there can be obtained a resin composition containing a photosensitive silicone compound that provides a material suitable for a rewiring layer or a buffer coat material of LSI chip, less in a film loss between before and after curing and improved in the stickiness of pre-exposure stage. Further, there can be obtained a resin insulating film utilizing the resin composition.
    Type: Application
    Filed: March 25, 2008
    Publication date: May 20, 2010
    Inventor: Tomohiro Yorisue
  • Publication number: 20100104827
    Abstract: A photosensitive resin composition is used that comprises a photosensitive silicone having a styryl group as a photosensitive group, and a photopolymerization initiator having a specific structure. As a result, a photosensitive resin composition capable of being cured in air by photopolymerization that is preferable for use as a buffer coat material or rewiring layer of an LSI chip, a method for forming a cured relief pattern using this photosensitive resin composition, and a semiconductor device comprising the cured relief pattern are provided.
    Type: Application
    Filed: March 25, 2008
    Publication date: April 29, 2010
    Inventor: Tomohiro Yorisue
  • Publication number: 20100019399
    Abstract: Disclosed is a polyorganosiloxane composition containing the following components (a)-(c). (a) 100 parts by mass of a polyorganosiloxane obtained by mixing at least one silanol compound represented by the general formula (1) below, at least one alkoxysilane compound represented by the general formula (2) below, and at least one catalyst selected from the group consisting of compounds represented by the general formula (3) below, compounds represented by the general formula (4) below and Ba(OH)2, and polymerizing the mixture without actively adding water thereinto [chemical formula 1] R2Si(OH)2 (1) [chemical formula 2] R?Si(OR?)3 (2) (chemical formula 3] M(OR??)4 (3) [chemical formula 4] M?(OR??)3 (4) (b) 0.1-20 parts by mass of a photopolymerization initiator (c) 1-100 parts by mass of a compound other than the component (a) having two or more photopolymerizable unsaturated bonding groups.
    Type: Application
    Filed: September 28, 2007
    Publication date: January 28, 2010
    Inventors: Masashi Kimura, Masato Mikawa, Hideyuki Fujiyama, Takaaki Kobayashi, Tomohiro Yorisue