Patents by Inventor Tomohisa Azuma
Tomohisa Azuma has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10790434Abstract: A piezoelectric thin film-stacked body is provided. A piezoelectric thin film-stacked body has a first electrode layer, a first oxide layer stacked on the first electrode layer, a second oxide layer stacked on the first oxide layer, and a piezoelectric thin film stacked on the second oxide layer, the electrical resistivity of the first oxide layer is higher than the electrical resistivity of the second oxide layer, the first oxide layer includes K, Na, and Nb, and the piezoelectric thin film includes (K,Na)NbO3.Type: GrantFiled: December 5, 2017Date of Patent: September 29, 2020Assignee: TDK CORPORATIONInventors: Hitoshi Sakuma, Tomohisa Azuma, Kenta Ishii
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Patent number: 10700260Abstract: A piezoelectric ceramic sputtering target containing a perovskite type oxide represented by chemical formula (I) of ABO3 as a main component, wherein the component A of the chemical formula (I) contains at least K (potassium) and/or Na (sodium), the component B of the chemical formula (I) contains at least Nb (niobium), the piezoelectric ceramic sputtering target is composed of a plurality of crystal grains; and the average particle diameter of the crystal grains is larger than 3 ?m and not larger than 30 ?m.Type: GrantFiled: March 27, 2017Date of Patent: June 30, 2020Assignee: TDK CORPORATIONInventors: Tomohisa Azuma, Masaru Nanao, Kenta Ishii
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Patent number: 10593863Abstract: A piezoelectric ceramic sputtering target containing a perovskite type oxide represented by chemical formula (I) of ABO3 as a main component, wherein the component A of the chemical formula (I) contains at least K (potassium) and/or Na (sodium), the component B of the chemical formula (I) contains at least one selected from the group consisting of Nb (niobium), Ta (tantalum) and Zr (zirconium) with Nb (niobium) as a necessity, the piezoelectric ceramic sputtering target is composed of a plurality of crystal grains and grain boundaries existing among the crystal grains, and in the grain boundary, the molar ratio of at least one of Nb (niobium), Ta (tantalum), and Zr (zirconium) in the B components is higher than the molar ratio in the interior of the crystal grains by 30% or more.Type: GrantFiled: March 22, 2017Date of Patent: March 17, 2020Assignee: TDK CORPORATIONInventors: Tomohisa Azuma, Masaru Nanao, Tatsuji Sano, Masahito Furukawa, Kenta Ishii
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Publication number: 20180159020Abstract: A piezoelectric thin film-stacked body is provided. A piezoelectric thin film-stacked body has a first electrode layer, a first oxide layer stacked on the first electrode layer, a second oxide layer stacked on the first oxide layer, and a piezoelectric thin film stacked on the second oxide layer, the electrical resistivity of the first oxide layer is higher than the electrical resistivity of the second oxide layer, the first oxide layer includes K, Na, and Nb, and the piezoelectric thin film includes (K,Na)NbO3.Type: ApplicationFiled: December 5, 2017Publication date: June 7, 2018Applicant: TDK CORPORATIONInventors: Hitoshi SAKUMA, Tomohisa AZUMA, Kenta ISHII
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Publication number: 20170288127Abstract: A piezoelectric ceramic sputtering target containing a perovskite type oxide represented by chemical formula (I) of ABO3 as a main component, wherein the component A of the chemical formula (I) contains at least K (potassium) and/or Na (sodium), the component B of the chemical formula (I) contains at least Nb (niobium), the piezoelectric ceramic sputtering target is composed of a plurality of crystal grains; and the average particle diameter of the crystal grains is larger than 3 ?m and not larger than 30 ?m.Type: ApplicationFiled: March 27, 2017Publication date: October 5, 2017Applicant: TDK CORPORATIONInventors: Tomohisa AZUMA, Masaru NANAO, Kenta ISHII
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Publication number: 20170288128Abstract: A piezoelectric ceramic sputtering target containing a perovskite type oxide represented by chemical formula (I) of ABO3 as a main component, wherein the component A of the chemical formula (I) contains at least K (potassium) and/or Na (sodium), the component B of the chemical formula (I) contains at least one selected from the group consisting of Nb (niobium), Ta (tantalum) and Zr (zirconium) with Nb (niobium) as a necessity, the piezoelectric ceramic sputtering target is composed of a plurality of crystal grains and grain boundaries existing among the crystal grains, and in the grain boundary, the molar ratio of at least one of Nb (niobium), Ta (tantalum), and Zr (zirconium) in the B components is higher than the molar ratio in the interior of the crystal grains by 30% or more.Type: ApplicationFiled: March 22, 2017Publication date: October 5, 2017Applicant: TDK CORPORATIONInventors: Tomohisa AZUMA, Masaru NANAO, Tatsuji SANO, Masahito FURUKAWA, Kenta ISHII
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Patent number: 9324931Abstract: A piezoelectric device includes a first electrode film, a piezoelectric film disposed on the first electrode film, and a second electrode film disposed on the piezoelectric film. At least one of the first and second electrode films is composed of an alloy, and a main component of the alloy is a metal selected from the group consisting of Ti, Al, Mg, and Zn. The piezoelectric film has a main composition represented by (K1-x-y-w-vNaxLiyBawSrv)m(Nb1-z-uTazZru)O3 (1), where x, y, z, w, v, u, and m in formula (1) satisfy 0.4<x?0.7, 0.02?y?0.11, 0.5?x+y<0.75, 0<z?0.28, 0<w?0.02, 0.02?v?0.11, 0.02?u?0.11, and 0.95?m<1.2, and contains 1% by mass or less of MnO relative to the main composition.Type: GrantFiled: May 14, 2013Date of Patent: April 26, 2016Assignee: TDK CORPORATIONInventors: Masahito Furukawa, Tomohisa Azuma, Taku Masai
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Patent number: 9105845Abstract: A piezoelectric ceramic with environmental friendliness including a composition as the main component composed of a composite oxide free from lead (Pb) as a constituent element, and with excellent piezoelectric characteristics such as the relative dielectric constant, the electromechanical coupling factor, and the piezoelectric constant, and a piezoelectric device using the piezoelectric ceramic, are provided. A piezoelectric ceramic including a composition represented by the following general formula as the main component: (K1-x-y-w-vNaxLiyBawSrv)m(Nb1-z-uTaz-Zru)O3 (wherein, x, y, z, w, v, u and m in the formula satisfy the following conditions respectively: 0.4<x?0.7; 0.02?y?0.1; 0<z?0.3; 0<w?0.01; 0.04?v?0.07; 0.04?u?0.07; and 0.95?m<1).Type: GrantFiled: December 12, 2012Date of Patent: August 11, 2015Assignee: TDK CORPORATIONInventors: Hideaki Sone, Tomohisa Azuma, Masahito Furukawa, Satoko Ueda
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Publication number: 20140339458Abstract: A piezoelectric ceramic contains a major proportion of potassium sodium niobate and has a carbon content after firing of 55 to 1,240 ppm by mass.Type: ApplicationFiled: May 14, 2013Publication date: November 20, 2014Applicant: TDK CORPORATIONInventors: Masahito FURUKAWA, Tomohisa AZUMA, Taku MASAI, Yasuhiro AIDA
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Publication number: 20140339962Abstract: A piezoelectric device includes a first electrode film, a piezoelectric film disposed on the first electrode film, and a second electrode film disposed on the piezoelectric film. At least one of the first and second electrode films is composed of an alloy, and a main component of the alloy is a metal selected from the group consisting of Ti, Al, Mg, and Zn. The piezoelectric film has a main composition represented by (K1-x-y-w-vNaxLiyBawSrv)m(Nb1-z-uTazZru)O3 (1), where x, y, z, w, v, u, and m in formula (1) satisfy 0.4<x?0.7, 0.02?y?0.11, 0.5?x+y<0.75, 0<z?0.28, 0<w?0.02, 0.02?v?0.11, 0.02?u?0.11, and 0.95?m<1.2, and contains 1% by mass or less of MnO relative to the main composition.Type: ApplicationFiled: May 14, 2013Publication date: November 20, 2014Applicant: TDK CORPORATIONInventors: Masahito FURUKAWA, Tomohisa AZUMA, Taku MASAI
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Patent number: 8212457Abstract: Provided is a piezoelectric ceramic composition which can increase Qmax of a resonator and inhibit the resonator from changing its oscillation frequency F0 under a low temperature environment. The piezoelectric ceramic composition has a structure represented by the following general formula (1): (Pb?Ln?Me?)(Ti1?(x+y+z)ZrxMnyNbz)O3??(1) where Ln is a lanthanoid element, Me is an alkaline-earth metal element, ?>0, ?>0, ??0, 0.965??+?+??1.000, 0.158?x?0.210, y?0, z?0, and 1?(x+y+z)>0.Type: GrantFiled: March 21, 2011Date of Patent: July 3, 2012Assignee: TDK CorporationInventors: Goushi Tauchi, Tomohisa Azuma, Hideaki Sone
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Patent number: 8142677Abstract: A piezoelectric ceramic composition excellent in all of the electric property Qmax, heat resisting properties and temperature characteristics of oscillation frequencies is provided. The piezoelectric ceramic composition comprises a phase mainly comprising lead zirconate titanate having a perovskite structure and an Al-containing phase. In the piezoelectric ceramic composition, the main component preferably comprises Mn and Nb, and is preferably represented by a composition formula of Pb?[(Mn1/3Nb2/3)xTiyZrz]O3 (wherein 0.97???1.01, 0.04?x?0.16, 0.48?y?0.58, 0.32?z?0.41).Type: GrantFiled: February 28, 2005Date of Patent: March 27, 2012Assignee: TDK CorporationInventors: Masakazu Hirose, Tomohisa Azuma, Norimasa Sakamoto
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Publication number: 20110234046Abstract: Provided is a piezoelectric ceramic composition which can increase Qmax of a resonator and inhibit the resonator from changing its oscillation frequency F0 under a low temperature environment. The piezoelectric ceramic composition has a structure represented by the following general formula (1): (Pb?Ln?Me?)(Ti1?(x+y+z)ZrxMnyNbz)O3??(1) where Ln is a lanthanoid element, Me is an alkaline-earth metal element, ?>0, ?>0, ??0, 0.965??+?+??1.000, 0.158?x?0.210, y?0, z?0, and 1?(x+y+z)>0.Type: ApplicationFiled: March 21, 2011Publication date: September 29, 2011Applicant: TDK CorporationInventors: Goushi Tauchi, Tomohisa Azuma, Hideaki Sone
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Publication number: 20110074516Abstract: A piezoelectric ceramic composition is provided which contains Perovskite oxides expressed by General Formula 1 below and an aluminum compound, and in which the content ratio of the aluminum compound to the Perovskite oxides is from 1% by mass to 11% by mass, (Pb?-?-?-?M1?M2?Bi?)[Ti{1-(x+y+z)}ZrxMnyNbz]O3??(1) wherein in the General Formula (1), M1 represents at least one kind of element selected from the group consisting of La, Ce, Pr, and Nd, M2 represents at least one kind of element selected from the group consisting of Sr, Ca, and Ba, and ?, ?, ?, ?, x, y, and z satisfy the following numerical conditions: 0.96???1.01 0.03???0.07 0???0.10 0???0.02 0?x?0.24 0.02?y?0.04 0.03?z?0.Type: ApplicationFiled: September 22, 2010Publication date: March 31, 2011Applicant: TDK CorporationInventors: Hideaki SONE, Masakazu Hirose, Hideya Sakamoto, Tomohisa Azuma
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Patent number: 7839060Abstract: Provided is a piezoelectric ceramic composition which enables the attainment of sufficiently high Qmax and good temperature characteristics of oscillation frequency F0 when applied in an oscillator utilizing third harmonic mode of thickness longitudinal vibration. The piezoelectric ceramic composition contains a composite oxide having a perovskite structure. The composite oxide has a composition expressed by the chemical formula (1), while satisfying 0.91???1.00, 0<??0.08, 0.125?x?0.300, 0.020?y?0.050, and 0.040?z?0.070 (Pb?Ln?)(Ti1?(x+y+z)ZrxMnyNbz)O3 ??(1) where Ln signifies at least one element selected from the group consisting of La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, and Lu.Type: GrantFiled: October 14, 2008Date of Patent: November 23, 2010Assignee: TDK CorporationInventors: Hideaki Sone, Masakazu Hirose, Tomohisa Azuma, Hideya Sakamoto
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Patent number: 7608215Abstract: There are provided steps of polarizing a ceramic composition including a perovskite compound containing Pb, Zr, Ti and Mn as main components and a heat treatment step for keeping the polarized ceramic composition within a temperature range lower than Tc (Tc denoting the Curie temperature of the ceramic composition) for 1 to 100 minutes.Type: GrantFiled: September 24, 2004Date of Patent: October 27, 2009Assignee: TDK CorporationInventors: Tomohisa Azuma, Masakazu Hirose
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Patent number: 7541716Abstract: There is provided a resonator having a piezoelectric ceramic resonator which has excellent free-fall resistance. The resonator comprises a piezoelectric ceramic resonator 2 with a vibrating electrode formed, and a substrate 3 which supports the piezoelectric ceramic resonator 2, wherein the piezoelectric ceramic resonator 2 satisfies the condition of U?0.88×H+20.28, wherein U=maximum elastic energy (kJ/m3) per unit volume, and H=drop height (m) (H>1). The present invention can be applied to a resonator 1, wherein the substrate 3 has terminal electrodes 31, 32, and the piezoelectric ceramic resonator 2 is in electrical continuity with the vibrating electrode and is supported on the substrate 3 at both ends via a conductive stator 4.Type: GrantFiled: April 4, 2006Date of Patent: June 2, 2009Assignee: TDK CorporationInventors: Tomohisa Azuma, Masakazu Hirose, Akira Suzuki, Kouji Taniwaki
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Publication number: 20090102324Abstract: Provided is a piezoelectric ceramic composition which enables the attainment of sufficiently high Qmax and good temperature characteristics of oscillation frequency F0 when applied in an oscillator utilizing third harmonic mode of thickness longitudinal vibration. The piezoelectric ceramic composition contains a composite oxide having a perovskite structure. The composite oxide has a composition expressed by the chemical formula (1), while satisfying 0.91???1.00, 0<??0.08, 0.125?x?0.300, 0.020?y?0.050, and 0.040?z?0.070. (Pb?Ln?)(Ti1?(x+y+z)ZrxMnyNbz)O3 ??(1) where Ln signifies at least one element selected from the group consisting of La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Th, Dy, Ho, Er, Tm, Yb, and Lu.Type: ApplicationFiled: October 14, 2008Publication date: April 23, 2009Applicant: TDK CORPORATIONInventors: Hideaki SONE, Masakazu HIROSE, Tomohisa AZUMA, Hideya SAKAMOTO
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Publication number: 20090065731Abstract: To provide a method for producing a piezoelectric ceramic which can improve toughness thereof. Provided is a method for producing a piezoelectric ceramic which includes a step of polarizing a piezoelectric ceramic having a main component represented by a composition formula Pba[(MnbNbc)dTieZrf]O3, wherein a to f satisfy 0.98?a?1.01, 0.340?b?0.384, 0.616?c?0.660, 0.08?d?0.12, 0.500?e?0.540, 0.37?f?0.41, and bd+cd+e+f=1, and 1 to 10% by weight of Al in terms of Al2O3 as an additive, and heat-treating the polarized piezoelectric ceramic for 10 to 60 minutes in a range of 200 to 300° C. As a result of this heat treatment, toughness of the piezoelectric ceramic can be improved.Type: ApplicationFiled: September 3, 2008Publication date: March 12, 2009Applicant: TDK CORPORATIONInventors: Keisuke Teranishi, Tomohisa Azuma, Masakazu Hirose
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Publication number: 20080258100Abstract: To obtain a piezoelectric ceramic composition having extremely high heat resisting property. Provided is a piezoelectric ceramic composition comprising a main component represented by Pba[(MnbNbc)dTieZrf]O3 (wherein 0.98?a?1.01, 0.340?b?0.384, 0.616?c?0.660, 0.08?d?0.12, 0.500?e?0.540, 0.37?f?0.41, bd+cd+e+f=1), and 1 to 10% by weight of Al in terms of Al2O3 as an additive. Preferably, b is such that 0.345?b?0.375 and c is such that 0.625?c?0.655, and the Al as the additive is preferably 2 to 6% by weight in terms of Al2O3.Type: ApplicationFiled: September 7, 2007Publication date: October 23, 2008Applicant: TDK CORPORATIONInventors: Keisuke Teranishi, Masakazu Hirose, Tomohisa Azuma