Patents by Inventor Tomohito KIZU

Tomohito KIZU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • NOVEL ONIUM SALT AND PHOTOACID GENERATOR
    Publication number: 20220315530
    Abstract: Provided is an onium salt functioning as a photoacid generator. The photoacid generator can provide a chemically amplifiable photoresist composition when it is combined with a resin component whose solubility in alkali is increased by the action of an acid generated by active energy ray irradiation such as Light or electron beam irradiation. The present invention relates to an onium salt represented by the formula (1), containing an anion structure with a proportion of a facial isomer in a total of the facial isomer and a meridional isomer being 15.0% by weight or lower.
    Type: Application
    Filed: May 7, 2021
    Publication date: October 6, 2022
    Applicant: SAN-APRO LTD.
    Inventors: Yoshihiko AKAZAWA, Tomohito KIZU, Ryosuke TAKAHASHI, Yuji NAKAMURA, Hideki KIMURA