Abstract: A semiconductor apparatus is provided in which input/output of an electric signal having a particularly high frequency is less disturbed by parasitic capacitance generated in a wiring in the semiconductor apparatus. A first through-hole wiring penetrating a first dielectric board, a second through-hole wiring penetrating a second dielectric board, and an internal wiring inserted between the first dielectric board and the second dielectric board are provided. The first through-hole wiring and the second through-hole wiring are arranged on the internal wiring while being away from each other.

Abstract: A semiconductor apparatus is provided in which input/output of an electric signal having a particularly high frequency is less disturbed by parasitic capacitance generated in a wiring in the semiconductor apparatus. A first through-hole wiring penetrating a first dielectric board, a second through-hole wiring penetrating a second dielectric board, and an internal wiring inserted between the first dielectric board and the second dielectric board are provided. The first through-hole wiring and the second through-hole wiring are arranged on the internal wiring while being away from each other.

Abstract: A semiconductor device for a microwave circuit includes a semiconductor substrate with an active element formed in the top surface, surface wirings on the top surface of the semiconductor substrate which are connected to terminals of the active element, and rear electrodes on the rear surface of the semiconductor substrate which are connected to the surface wirings by via holes. A structure includes the microwave semiconductor device, and a dielectric substrate which has surface wirings on a top surface. The semiconductor device is fixed with the dielectric substrate such that the rear electrodes of the semiconductor device are connected with the wirings on the top surface of the dielectric substrate.