Abstract: A vapor deposition apparatus includes an exhaust regulator provided in an exhaust pipe to regulate exhaust of the reaction chamber and including: a hollow frustum upstream baffle having a larger first opening near a reaction chamber than a second opening near an exhaust device; and a hollow frustum downstream baffle provided near the exhaust device with respect to the upstream baffle and having a larger third opening near the reaction chamber than a fourth opening near the exhaust device. The upstream baffle and downstream baffle are designed so that B/A and C/A are 0.33 or less, at least one of B/A and C/A is 0.26 or less, and (B+C)/A is 0.59 or less, where an inner diameter of the exhaust pipe and diameters of the first and third openings are A, a diameter of the second opening is B and a diameter of the fourth opening is C.

Abstract: A vapor deposition apparatus includes an exhaust regulator provided in an exhaust pipe to regulate exhaust of the reaction chamber and including: a hollow frustum upstream baffle having a larger first opening near a reaction chamber than a second opening near an exhaust device; and a hollow frustum downstream baffle provided near the exhaust device with respect to the upstream baffle and having a larger third opening near the reaction chamber than a fourth opening near the exhaust device. The upstream baffle and downstream baffle are designed so that B/A and C/A are 0.33 or less, at least one of B/A and C/A is 0.26 or less, and (B+C)/A is 0.59 or less, where an inner diameter of the exhaust pipe and diameters of the first and third openings are A, a diameter of the second opening is B and a diameter of the fourth opening is C.

Abstract: A clamp with which ends of two tubular members can be connected by simple work. The clamp has a support member, a first arm having one end pivotably supported by a support member, a second arm having one end pivotably supported by the support member and placed to face the first arm, a first long hole formed in the first arm on its support member side, a second long hole formed in the second arm on its support member side, and a connection member having a first pin-like member engaging with the first long hole and also having a second pin-like member engaging with the second long hole. The connection member is movable so as to separate from and approaches the support member with the distance from the connection member to the first pin-like member and the second pin-like member maintained constant. The first long hole and/or the second long hole is formed so as to extend in the direction crossing the direction X of movement of the connection member.