Patents by Inventor Tomoki ISHIMARU
Tomoki ISHIMARU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11974432Abstract: According to one embodiment, a semiconductor storage device includes a plurality of electrode films on a substrate, spaced from one another in a first direction. A charge storage film is provided on a side face the electrode films via a first insulating film. A semiconductor film is provided on a side face of the charge storage film via a second insulating film. The charge storage film includes a plurality of insulator regions contacting the first insulating film, a plurality of semiconductor or conductor regions provided between the insulator regions and another insulator region.Type: GrantFiled: August 26, 2021Date of Patent: April 30, 2024Assignee: Kioxia CorporationInventors: Hiroyuki Yamashita, Yuta Saito, Keiichi Sawa, Kazuhiro Matsuo, Yuta Kamiya, Shinji Mori, Kota Takahashi, Junichi Kaneyama, Tomoki Ishimaru, Kenichiro Toratani, Ha Hoang, Shouji Honda, Takafumi Ochiai
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Publication number: 20230340667Abstract: A film forming apparatus of embodiments includes: a chamber including a sidewall; a shower head provided in an upper part of the chamber; a holder provided in the chamber holding a substrate; a first gas supply pipe supplying a first gas to the shower head; a first valve provided in the first gas supply pipe; at least one gas supply portion provided in a region of the chamber other than the shower head; a second gas supply pipe supplying a second gas to the at least one gas supply portion; a second valve provided in the second gas supply pipe; a gas exhaust pipe exhausting a gas from the chamber; and an exhaust device connected to the gas exhaust pipe.Type: ApplicationFiled: December 29, 2022Publication date: October 26, 2023Applicant: Kioxia CorporationInventors: Tomoki ISHIMARU, Masaya TODA, Kota TAKAHASHI, Kenichiro TORATANI, Kazuhiro MATSUO
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Publication number: 20230328957Abstract: A semiconductor device of embodiments includes: a first electrode; a second electrode; an oxide semiconductor layer provided between the first electrode and the second electrode; a gate electrode surrounding the oxide semiconductor layer; and a gate insulating layer provided between the gate electrode and the oxide semiconductor layer, spaced from the first electrode, and containing nitrogen (N). In addition, a first distance between the first electrode and the gate insulating layer in a first direction from the first electrode to the second electrode is smaller than a second distance between the first electrode and the gate electrode in the first direction.Type: ApplicationFiled: September 2, 2022Publication date: October 12, 2023Applicant: Kioxia CorporationInventors: Masaya TODA, Tomoki ISHIMARU, Ha HOANG, Kota TAKAHASHI, Kazuhiro MATSUO, Takafumi OCHIAI, Shoji HONDA, Kenichiro TORATANI, Kiwamu SAKUMA, Taro SHIOKAWA, Mutsumi OKAJIMA
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Publication number: 20230290882Abstract: According to one embodiment, a semiconductor device includes a first electrode, a second electrode, and an oxide semiconductor layer provided between the first electrode and the second electrode and including a first region, a second region between the first region and the second electrode, and a third region between the first region and the second region. A gate electrode surrounds the third region, and a gate insulating layer is between the gate electrode and the third region. A first resistivity of the first region is higher than a second resistivity of the second region. A first distance between the first electrode and the gate electrode in a first direction from the first electrode toward the second electrode is shorter than a second distance between the gate electrode and the second electrode in the first direction.Type: ApplicationFiled: August 26, 2022Publication date: September 14, 2023Inventors: Ha HOANG, Kazuhiro MATSUO, Tomoki ISHIMARU, Kenichiro TORATANI
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SEMICONDUCTOR DEVICE, SEMICONDUCTOR MEMORY DEVICE, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Publication number: 20230090044Abstract: A semiconductor device of an embodiment includes a first electrode, a second electrode, a first oxide semiconductor layer between the first electrode and the second electrode, the first oxide semiconductor layer containing in, Zn, and a first metal element, and the first metal element being at least one metal of Ga, Mg, or Mn, a second oxide semiconductor layer between the first oxide semiconductor layer and the second electrode, the second oxide semiconductor layer containing In, Zn, and the first metal element, a third oxide semiconductor layer between the first oxide semiconductor layer and the second oxide semiconductor layer, the third oxide semiconductor layer containing in, Zn, and a second metal element, the second metal element being at least one metal of Al, Hf, La, Sn, Ta, Ti, W, Y, or Zr, a gate electrode facing the third oxide semiconductor layer, and a gate insulating.Type: ApplicationFiled: March 4, 2022Publication date: March 23, 2023Applicant: Kioxia CorporationInventors: Tomoki ISHIMARU, Shinji MORI, Kazuhiro MATSUO, Keiichi SAWA, Kenichiro TORATANI -
Publication number: 20230088864Abstract: A semiconductor memory device according to an embodiment includes: a first oxide semiconductor layer between a first conductive layer and a second conductive layer; a first gate electrode; a first electrode; a second electrode; a first capacitor insulating film between the first electrode and the second electrode including a first region and a second region between the first region and the second electrode, concentration of the Ti is higher in the second region than the first region; a third conductive layer; a second oxide semiconductor layer between the third conductive layer and a fourth conductive layer; a second gate electrode; a third electrode; a fourth electrode; and a second capacitor insulating film between the third electrode and the fourth electrode, and including a third region and a fourth region between the third region and the fourth electrode, concentration of Ti is higher in the fourth region than the third region.Type: ApplicationFiled: March 4, 2022Publication date: March 23, 2023Applicant: Kioxia CorporationInventors: Yuta KAMIYA, Kazuhiro MATSUO, Kota TAKAHASHI, Masaya TODA, Tomoki ISHIMARU
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Publication number: 20220310640Abstract: A semiconductor storage device includes a first conductive layer that extends in a first direction; a second conductive layer that extends in the first direction and is arranged with the first conductive layer in a second direction; a first insulating layer that is provided between the first conductive layer and the second conductive layer; a semiconductor layer that extends in the second direction and faces the first conductive layer, the second conductive layer, and the first insulating layer in a third direction; a first charge storage layer that is provided between the first conductive layer and the semiconductor layer; a second charge storage layer that is provided between the second conductive layer and the semiconductor layer; a first high dielectric constant layer that is provided between the first conductive layer and the first charge storage layer; and a second high dielectric constant layer provided between the second conductive layer and the second charge storage layer.Type: ApplicationFiled: August 30, 2021Publication date: September 29, 2022Applicant: Kioxia CorporationInventors: Natsuki FUKUDA, Ryota NARASAKI, Takashi KURUSU, Yuta KAMIYA, Kazuhiro MATSUO, Shinji MORI, Shoji HONDA, Takafumi OCHIAI, Hiroyuki YAMASHITA, Junichi KANEYAMA, Ha HOANG, Yuta SAITO, Kota TAKAHASHI, Tomoki ISHIMARU, Kenichiro TORATANI
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Publication number: 20220302162Abstract: According to one embodiment, a semiconductor storage device includes a plurality of electrode films on a substrate, spaced from one another in a first direction. A charge storage film is provided on a side face the electrode films via a first insulating film. A semiconductor film is provided on a side face of the charge storage film via a second insulating film. The charge storage film includes a plurality of insulator regions contacting the first insulating film, a plurality of semiconductor or conductor regions provided between the insulator regions and another insulator region.Type: ApplicationFiled: August 26, 2021Publication date: September 22, 2022Inventors: Hiroyuki Yamashita, Yuta Saito, Keiichi Sawa, Kazuhiro Matsuo, Yuta Kamiya, Shinji Mori, Kota Takahashi, Junichi Kaneyama, Tomoki Ishimaru, Kenichiro Toratani, Ha Hoang, Shouji Honda, Takafumi Ochiai
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Publication number: 20220262954Abstract: A semiconductor device of an embodiment includes a first electrode, a second electrode, a first metallic region provided between the first electrode and the second electrode and includes at least one metallic element selected from the group consisting of indium (In), gallium (Ga), zinc (Zn), aluminum (Al), magnesium (Mg), manganese (Mn), titanium (Ti), tungsten (W), molybdenum (Mo), and tin (Sn), a second metallic region provided between the first metallic region and the second electrode and includes the at least one metallic element, a semiconductor region provided between the first metallic region and the second metallic region and includes the at least one metallic element and oxygen (O), an insulating region provided between the first metallic region and the second metallic region and is surrounded by the semiconductor region, a gate electrode surrounding the semiconductor region, and a gate insulating layer provided between the semiconductor region and the gate electrode.Type: ApplicationFiled: May 2, 2022Publication date: August 18, 2022Applicant: Kioxia CorporationInventors: Tomoki ISHIMARU, Shinji MORI, Kazuhiro MATSUO, Keiichi SAWA, Akifumi GAWASE
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Patent number: 11349033Abstract: A semiconductor device of an embodiment includes a first electrode, a second electrode, a first metallic region provided between the first electrode and the second electrode and includes at least one metallic element selected from the group consisting of indium (In), gallium (Ga), zinc (Zn), aluminum (Al), magnesium (Mg), manganese (Mn), titanium (Ti), tungsten (W), molybdenum (Mo), and tin (Sn), a second metallic region provided between the first metallic region and the second electrode and includes the at least one metallic element, a semiconductor region provided between the first metallic region and the second metallic region and includes the at least one metallic element and oxygen (O), an insulating region provided between the first metallic region and the second metallic region and is surrounded by the semiconductor region, a gate electrode surrounding the semiconductor region, and a gate insulating layer provided between the semiconductor region and the gate electrode.Type: GrantFiled: September 16, 2020Date of Patent: May 31, 2022Assignee: Kioxia CorporationInventors: Tomoki Ishimaru, Shinji Mori, Kazuhiro Matsuo, Keiichi Sawa, Akifumi Gawase
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Publication number: 20210305431Abstract: A semiconductor device of an embodiment includes a first electrode, a second electrode, a first metallic region provided between the first electrode and the second electrode and includes at least one metallic element selected from the group consisting of indium (In), gallium (Ga), zinc (Zn), aluminum (Al), magnesium (Mg), manganese (Mn), titanium (Ti), tungsten (W), molybdenum (Mo), and tin (Sn), a second metallic region provided between the first metallic region and the second electrode and includes the at least one metallic element, a semiconductor region provided between the first metallic region and the second metallic region and includes the at least one metallic element and oxygen (O), an insulating region provided between the first metallic region and the second metallic region and is surrounded by the semiconductor region, a gate electrode surrounding the semiconductor region, and a gate insulating layer provided between the semiconductor region and the gate electrode.Type: ApplicationFiled: September 16, 2020Publication date: September 30, 2021Applicant: Kioxia CorporationInventors: Tomoki ISHIMARU, Shinji MORI, Kazuhiro MATSUO, Keiichi SAWA, Akifumi GAWASE