Abstract: A sensor element includes an element body having a measurement-object gas flow section formed therein, and a porous protective layer arranged to cover first to fifth surfaces of the element body. When an external wall that is the thinnest of parts of an external wall which constitute the element body and extend from the measurement-object gas flow section to the first to fifth surfaces is defined as a thinnest external wall and a surface corresponding to the thinnest external wall is defined as a closest surface, a part of the protective layer which covers the closest surface overlaps the entirety of the thinnest external wall when viewed in a direction perpendicular to the closest surface, and has one or more internal spaces formed therein which overlaps 80% or more of the thinnest external wall when viewed in the direction perpendicular to the closest surface.

Abstract: A sensor element includes an element body and a porous protective layer arranged to cover a part of a surface of the element body. The protective layer includes an inlet protective layer arranged to cover a gas inlet formed in the surface of the element body, and at least a part of a face included in the surface of the element body, the face on which the gas inlet is opens, and an arithmetic average roughness Rap of an inner peripheral surface of an internal space of the inlet protective layer satisfies at least one of conditions below: the arithmetic average roughness Rap is 8 ?m or more, and the arithmetic average roughness Rap is higher than an arithmetic average roughness Rac of a bonding surface of the protective layer, the bonding surface at which the protective layer is bonded to the element body.

Abstract: An atomic beam generator includes a cathode constituted as a housing having an emission surface provided with an irradiation port through which an atomic beam is emissive; an anode disposed inside the cathode to generate plasma between the cathode and the anode; and a magnetic field generating unit including a first magnetic field generating unit that generates a first magnetic field and a second magnetic field generating unit that generates a second magnetic field, and guiding positive ions produced in the cathode to the emission surface by generating, in the cathode, the first magnetic field and the second magnetic field both parallel to the emission surface such that a magnetic field direction is leftward in the first magnetic field and is rightward in the second magnetic field when viewed from an emission surface side on condition of the first magnetic field being positioned above the second magnetic field.

Abstract: A composite substrate according to the present invention includes a support substrate having a diameter of 2 inches or more, and a piezoelectric substrate having a thickness of 20 ?m or less and bonded to the support substrate to transmit light. The piezoelectric substrate has a thickness distribution shaped like a fringe. A waveform having an amplitude within a range of 5 to 100 nm in a thickness direction and a pitch within a range of 0.5 to 20 mm in a width direction appears in the thickness distribution of the piezoelectric substrate in a cross section of the composite substrate taken along a line orthogonal to the fringe, and the pitch of the waveform correlates with a width of the fringe. In the piezoelectric substrate, the fringe may include either parallel fringes or spiral or concentric fringes.

Abstract: An atomic beam source includes a tubular cathode that includes an emission portion that includes an emission port through which an atomic beam can be emitted, a rod-shaped first anode disposed inside the cathode, and a rod-shaped second anode disposed inside the cathode and spaced from the first anode. At least one selected from the group consisting of a shape of the cathode, a shape of the first anode, a shape of the second anode, and a positional relationship between the cathode, the first anode, and the second anode is predetermined so that emission of sputter particles resulting from collision of cations, which have been generated by plasma between the first anode and the second anode, with at least one selected from the cathode, the first anode, and the second anode is reduced.

Abstract: A production method for a composite substrate according to the present invention comprises (a) a step of mirror-polishing a piezoelectric-substrate side of a laminated substrate formed by bonding a piezoelectric substrate and a support substrate; (b) a step of performing machining using an ion beam or a neutral atom beam so that a thickness of an outer peripheral portion of the piezoelectric substrate is larger than a thickness of an inner peripheral portion and a difference between a largest thickness and a smallest thickness of the inner peripheral portion of the piezoelectric substrate is 100 nm or less over an entire surface; and (c) a step of flattening the entire surface of the piezoelectric substrate to remove at least a part of an altered layer formed by the machining using the ion beam or the neutral atom beam in the step (b).

Abstract: A die for forming a honeycomb structure, including: a second plate-shaped portion that is formed of iron and the like and has back holes; and a first plate-shaped portion that is formed of tungsten carbide based cemented carbide and has cavities communicating with the back holes and slits communicating with the cavities, with the first plate-shaped portion having a first layer arranged in the second plate-shaped portion side and a second layer arranged on the first layer, the cavities are opened on both sides of the first layer, and the slits are opened on both sides of the second layer.

Abstract: By providing a manufacturing method of an electrode for a honeycomb structure forming die including: arranging a plurality of processing electrodes 161 having a shape which is complementary to that of the flow-through cells, at positions corresponding to the plurality of flow-through cells in the one surface 107B of the electrode base body 102B; discharging electricity from the plurality of processing electrodes 161 toward the one surface 107B of the electrode base body 102B to carve the electrode base body 102B, so that a plurality of electrode cells having a shape which is analogous to that of the flow-through cells are formed in the electrode base body 102B; whereby obtaining a honeycomb electrode where a plurality of electrode cells partitioned by electrode partition walls appear on the one surface.

Abstract: By providing a honeycomb electrode, i.e., an electrode for a honeycomb structure forming die including a thick plate-like electrode base body made of an electricity discharging material and having two main surfaces, only one surface of two main surfaces of the electrode base body is provided with a plurality of electrode cells partitioned by electrode partition walls, and a shape of the electrode cells in the one surface is analogous to that of flow-through cells of the honeycomb structure.

Abstract: By providing a manufacturing method of an electrode for a honeycomb structure forming die including: preparing a thick plate-like electrode base body made of an electricity discharging material and having two surfaces; making a plurality of holes in the electrode base body at positions corresponding to flow-through cells; inserting processing electrodes into the holes, and discharging electricity from the insides of the holes toward side surfaces of the holes of the electrode base body to process the side surfaces of the holes of the electrode base body into shapes corresponding to the porous partition walls; whereby obtaining an electrode where a plurality of electrode cells partitioned by electrode partition walls appear on at least one of the surfaces thereof.

Abstract: The present invention provides: a method of polishing an object to be polished for processing a surface of the object to be polished into a concave or convex state with a high degree of accuracy; and a polishing pad. An object to be polished is placed on a polishing pad over the boundary between the first polishing region and the second polishing region, the first polishing region has grooves and the second polishing region has grooves different from those of the first polishing region, and either one of the two regions being formed on a region on the center side, and the other on the outer side in a radial direction on the surface of the polishing pad; and the object to be polished is polished by rotating the polishing pad and the object to be polished.

Abstract: A method for manufacturing a honeycomb structure forming die including a liquid groove forming step for forming linear processing liquid grooves whose width is smaller than that of the slit, in positions for forming the slits that form the partition walls of the honeycomb structure by subjecting the kneaded clay to extrusion in one side end face as a kneaded clay forming face of a plate-shaped die substrate. An introduction hole forming step for forming introduction holes for introducing the kneaded clay is performed before or after the liquid groove forming step. Slits communicating with the introduction holes are formed by performing comb-like electro-discharge machining by a comb-like electrode where plate-shaped protrusion electrodes, each corresponding to the width of the slit, are disposed in positions including the processing liquid grooves.

Abstract: There is provided a method for manufacturing a honeycomb structure forming die, the method includes: an introduction hole forming step for forming, in plate-shaped die substrate having one side end face and the other side end face, a plurality of introduction holes for introducing kneaded clay on the other side end face to function as a kneaded clay introduction face, and a slit forming step for forming slits communicating with the introduction holes in order to form the partition walls of the honeycomb structure by extruding the kneaded clay by performing a comb-like electro-discharge machining by a comb-like electrode 21 where a plurality of plate-shaped protrusion electrodes 23 corresponding with width of the slits are disposed on the one side end face to function as a kneaded clay formation face of the die substrate.

Abstract: A die for forming a honeycomb structure, comprising a platy die base member having a clay supply face on back surface thereof and including a plurality of introduction holes for introducing a mixed raw material for forming; and a clay forming face on upper surface including a plurality of slits for extrusion of the material being connected to the introduction holes and formed lattice-like partition regions; at least a part of lattice-like partition regions being provided in such a position that the extended line of at least part of a plurality of lattice-like regions overlap with the slits at edges thereof as top view, slits including inner peripheral slits formed in the inner peripheral region, and outer peripheral slits formed in the outer peripheral region surrounding the inner peripheral region and having a width-enlarged portion having a width larger than that of the inner peripheral slit, and production method thereof.

Abstract: By providing a manufacturing method of an electrode for a honeycomb structure forming die including: preparing a thick plate-like electrode base body made of an electricity discharging material and having two surfaces; making a plurality of holes in the electrode base body at positions corresponding to flow-through cells; inserting processing electrodes into the holes, and discharging electricity from the insides of the holes toward side surfaces of the holes of the electrode base body to process the side surfaces of the holes of the electrode base body into shapes corresponding to the porous partition walls; whereby obtaining an electrode where a plurality of electrode cells partitioned by electrode partition walls appear on at least one of the surfaces thereof.

Abstract: By providing a manufacturing method of an electrode for a honeycomb structure forming die including: arranging a plurality of processing electrodes 161 having a shape which is complementary to that of the flow-through cells, at positions corresponding to the plurality of flow-through cells in the one surface 107B of the electrode base body 102B; discharging electricity from the plurality of processing electrodes 161 toward the one surface 107B of the electrode base body 102B to carve the electrode base body 102B, so that a plurality of electrode cells having a shape which is analogous to that of the flow-through cells are formed in the electrode base body 102B; whereby obtaining a honeycomb electrode where a plurality of electrode cells partitioned by electrode partition walls appear on the one surface.

Abstract: [Problems] To provide an electrode which enables obtaining a die including thin or narrow slits by electric discharge machining and which does not easily cause breakage or deformation in the die during the electric discharge machining. [Solution] By providing a honeycomb electrode 120, i.e., an electrode for a honeycomb structure forming die including a thick plate-like electrode base body 122 made of an electricity discharging material and having two main surfaces, only one surface 127 of two main surfaces of the electrode base body 122 is provided with a plurality of electrode cells 142 partitioned by electrode partition walls 141, and a shape of the electrode cells 142 in the one surface 127 is analogous to that of flow-through cells of the honeycomb structure.

Abstract: In a molding die machining electrode, slit grooves of a molding die are machined with a slit groove forming part having a substantially circular outer circumference by arranging hexagonal erected wall parts in a row; while the inner circumference of a slit groove forming part overlaps with the erected wall parts in the outer circumference of the slit groove forming part, the outside slit grooves are machined with the slit groove forming part having a substantially circular outer circumference. The further outside slit grooves are machined with the slit groove forming part of the third electrode. A plurality of the slit groove forming parts are radially divided and overlapping portions between the plurality of the slit groove forming parts are formed substantially coaxially with a molded body. The areas of the slit groove forming parts are designed to nearly similar values, suppressing the difference in wear of the electrodes.

Abstract: A honeycomb segment-forming die includes: an introducing portion provided on an introduction face side and having a plurality of back holes, and a forming portion provided on an formation face side and having slits communicating with the back holes. The forming portion has a polygonal outer peripheral shape and forms a prismatic honeycomb segment by passing kneaded clay for forming which is introduced from the back holes of the introducing portion through the slits of the forming portion, and a gap between slits formed in each of corner portions including a vertex of the polygonal forming portion is larger than a gap of slits formed in the central portion of the forming portion. This enables to form a honeycomb segment having high compressive strength.

Abstract: There is provided a method for manufacturing a honeycomb structure forming die, the method includes: an introduction hole forming step for forming, in plate-shaped die substrate having one side end face and the other side end face, a plurality of introduction holes for introducing kneaded clay on the other side end face to function as a kneaded clay introduction face, and a slit forming step for forming slits communicating with the introduction holes in order to form the partition walls of the honeycomb structure by extruding the kneaded clay by performing a comb-like electro-discharge machining by a comb-like electrode 21 where a plurality of plate-shaped protrusion electrodes 23 corresponding with width of the slits are disposed on the one side end face to function as a kneaded clay formation face of the die substrate.