Abstract: An interference filter includes a transmissive first substrate including a first inner surface and a first outer surface facing each other, in which the first inner surface is provided with a first reflection film, a transmissive second substrate including a second inner surface and a second outer surface facing each other, in which the second inner surface is provided with a second reflection film, a first bonding portion configured to bond the first inner surface and the second inner surface to each other, and seal a first inner space between the first substrate and the second substrate, a transmissive third substrate facing the first outer surface, a second bonding portion configured to bond the first outer surface and the third substrate to each other, and seal a second inner space between the first substrate and the third substrate, a transmissive fourth substrate facing the second outer surface, and a third bonding portion configured to bond the second outer surface and the fourth substrate to each othe

Abstract: A wavelength variable interference filter includes a fixed substrate, a movable substrate that faces the fixed substrate, a pair of reflective films, a fixed extraction electrode provided on the fixed substrate, and a movable connection electrode that is provided on the movable substrate and is in contact with the fixed extraction electrode at a connection position, in which the movable substrate includes a first groove that is provided at the connection position in a plan view in which the fixed substrate and the movable substrate are viewed from a substrate thickness direction, and a second groove that has a larger area than an area of the first groove in the plan view and is connected to the first groove.

Abstract: A light filter includes a fixed substrate, a movable portion which is arranged to face the fixed substrate, a fixed reflective film which is disposed on the fixed substrate, and reflects a part of light and transmits a part of the light, a movable reflective film which is disposed on the movable portion to face the fixed reflective film, and reflects a part of the light and transmits a part of the light, and an electrostatic actuator which controls a distance between the fixed reflective film and the movable reflective film, the fixed reflective film is interposed between a conductive film and a protective film, and the conductive film and the protective film are formed of the same material, and have the same film thickness.

Abstract: A light filter includes a fixed substrate, a movable portion which is arranged to face the fixed substrate, a fixed reflective film which is disposed in the fixed substrate, and reflects a part of light and transmits a part of the light, a movable reflective film which is disposed in the movable portion, faces the fixed reflective film, and reflects a part of the light and transmits a part the light, and a control unit which controls a distance between the fixed reflective film and the movable reflective film, a conductive film is disposed between the fixed reflective film and the fixed substrate, and a reflective film terminal is disposed on the conductive film, and a conductive film is disposed between the movable reflective film and the movable portion, and a third terminal is disposed on the conductive film.

Abstract: A wavelength variable interference filter includes a fixed substrate, a movable substrate that faces the fixed substrate, a pair of reflective films, a fixed extraction electrode provided on the fixed substrate, and a movable connection electrode that is provided on the movable substrate and is in contact with the fixed extraction electrode at a connection position, in which the movable substrate includes a first groove that is provided at the connection position in a plan view in which the fixed substrate and the movable substrate are viewed from a substrate thickness direction, and a second groove that has a larger area than an area of the first groove in the plan view and is connected to the first groove.

Abstract: A light filter includes a first substrate, a second substrate, a first bonding film provided in an entire region at the second substrate side of the first substrate, a second bonding film provided in an entire region at the first substrate side of the second substrate, a first optical film provided on the first bonding film of the first substrate, a second optical film provided on the second bonding film of the second substrate, a first electrode provided on the first bonding film of the first substrate, and a second electrode provided on the second bonding film of the second substrate, and the first substrate and the second substrate are fixed by bonding of the first bonding film and the second bonding film, and the first optical film, the second optical film, the first electrode, and the second electrode are formed of the same material.

Abstract: An optical filter comprising a first substrate, a second substrate having a support portion which supports the first substrate, a first optical film provided on the first substrate, a second optical film provided on the second substrate and arranged to face the first optical film, a first protective film covering at least the first optical film, a second protective film covering at least the second optical film, a first bonding film, a portion of the first bonding film overlapping a surface of the first protective film in a plan view but does not overlapping the first optical film and a second bonding film, a portion of the second bonding film overlapping a surface of the second protective film in the plan view but does not overlapping the second optical film.

Abstract: The thickness of a first drive electrode is greater than the sum of the thickness of a first reflective film and the thickness of a first conductive film, the first drive electrode extends from the surface of a fixed substrate to the surface of the outer edge portion of the first conductive film and is in contact with the first conductive film, the thickness of a second drive electrode is greater than the sum of the thickness of a second reflective film and the thickness of a second conductive film, and the second drive electrode extends from the surface of a movable substrate to the surface of the outer edge portion of the second conductive film and is in contact with the second conductive film.

Abstract: A wavelength variable interference filter includes a first drive electrode electrically connected to a first reflective film and a second drive electrode electrically connected to a second reflective film. The thickness of the first drive electrode is greater than the thickness of the first reflective film, and the thickness of the second drive electrode is greater than the thickness of the second reflective film. The first drive electrode has a first step portion having a thickness smaller than the thickness of the first reflective film in an end portion connected to the first reflective film, and the second drive electrode has a second step portion having a thickness smaller than the thickness of the second reflective film in an end portion connected to the second reflective film.

Abstract: A method for manufacturing a nozzle substrate includes forming a first hollow recess in a first surface of a silicon substrate, forming a liquid-resistant protective film on the first surface of the silicon substrate including an inner wall of the first hollow recess, forming a second hollow recess in a first surface of a glass substrate, bonding the first surfaces of the silicon substrate and the glass substrate by anodic bonding, reducing a thickness of the glass substrate from a second surface until an aperture is formed in a bottom surface of the second hollow recess to form a second nozzle hole disposed on a droplet feed side, and reducing a thickness of the silicon substrate from a second surface until an aperture is formed in a bottom surface of the first hollow recess to form a first nozzle hole disposed on a droplet discharge side.

Abstract: An optical filter comprising a first substrate, a second substrate having a support portion which supports the first substrate, a first optical film provided on the first substrate, a second optical film provided on the second substrate and arranged to face the first optical film, a first protective film covering at least the first optical film, a second protective film covering at least the second optical film, a first bonding film, a portion of the first bonding film overlapping a surface of the first protective film in a plan view but does not overlapping the first optical film and a second bonding film, a portion of the second bonding film overlapping a surface of the second protective film in the plan view but does not overlapping the second optical film.

Abstract: A light filter includes a first substrate, a second substrate, a first bonding film provided in an entire region at the second substrate side of the first substrate, a second bonding film provided in an entire region at the first substrate side of the second substrate, a first optical film provided on the first bonding film of the first substrate, a second optical film provided on the second bonding film of the second substrate, a first electrode provided on the first bonding film of the first substrate, and a second electrode provided on the second bonding film of the second substrate, and the first substrate and the second substrate are fixed by bonding of the first bonding film and the second bonding film, and the first optical film, the second optical film, the first electrode, and the second electrode are formed of the same material.

Abstract: A droplet discharging head comprises: a cavity substrate including a discharge chamber having a bottom wall serving as a vibration plate; and an electrode substrate including an individual electrode that faces the vibration plate with a gap and drives the vibration plate, and a driver integrated circuit (IC) that couples with the individual electrode and applies a voltage to the individual electrode. The cavity substrate includes a first opening that penetrates the cavity substrate and serves to house the driver IC, and an insulation film formed on a wall face of the first opening.

Abstract: A method for manufacturing a nozzle substrate includes forming a first hollow recess in a first surface of a silicon substrate, forming a liquid-resistant protective film on the first surface of the silicon substrate including an inner wall of the first hollow recess, forming a second hollow recess in a first surface of a glass substrate, bonding the first surfaces of the silicon substrate and the glass substrate by anodic bonding, reducing a thickness of the glass substrate from a second surface until an aperture is formed in a bottom surface of the second hollow recess to form a second nozzle hole disposed on a droplet feed side, and reducing a thickness of the silicon substrate from a second surface until an aperture is formed in a bottom surface of the first hollow recess to form a first nozzle hole disposed on a droplet discharge side.

Abstract: A droplet discharging head comprises: a cavity substrate including a discharge chamber having a bottom wall serving as a vibration plate; and an electrode substrate including an individual electrode that faces the vibration plate with a gap and drives the vibration plate, and a driver integrated circuit (IC) that couples with the individual electrode and applies a voltage to the individual electrode. The cavity substrate includes a first opening that penetrates the cavity substrate and serves to house the driver IC, and an insulation film formed on a wall face of the first opening.

Abstract: A method of forming a film pattern by disposing a functional liquid on a substrate includes: forming banks corresponding to the film pattern on the substrate; forming irregularities on bottoms between the banks by using the banks as a mask; and disposing the functional liquid between the banks and on the bottoms formed with the irregularities.