Abstract: An electrostatic chuck 10 includes a dielectric substrate 100 including a surface 110 as a mounting surface, a heater 140 provided inside the dielectric substrate 100, and an attraction electrode 130 provided inside the dielectric substrate 100 at a position closer to the surface 110 side than the heater 140. Both the heater 140 and the attraction electrode 130 are configured such that a plurality of ceramic particles CP are disposed inside a conductor. The heater 140 is thicker than the attraction electrode 130. In the electrostatic chuck 10, an average particle diameter of the ceramic particles CP disposed inside the heater 140 is 50% or more and 150% or less of an average particle diameter of the ceramic particles CP disposed inside the attraction electrode 130.

Abstract: An electrostatic chuck includes a ceramic dielectric substrate and a base plate. The base plate includes a communicating path configured to allow a coolant to pass. The communicating path includes a first flow path part located in an outer circumferential region outside the radial center of the base plate and having a pair of side surfaces along a first direction. The first direction is along a flow of the coolant. When viewed along a stacking direction, one side surface of the pair of side surfaces includes a plurality of convex portions and a plurality of concave portions. The plurality of convex portions is convex in a second direction perpendicular to the first direction. The second direction is from the other side surface toward the one side surface of the pair of side surfaces. The plurality of concave portions is convex in an opposite direction of the second direction.

Abstract: An electrostatic chuck 10 includes a dielectric substrate 100 and a heater for heating the dielectric substrate 100. The heater includes a built-in heater 300 provided inside the dielectric substrate 100, and an external heater unit 400 provided outside the dielectric substrate 100.

Abstract: An electrostatic chuck 10 includes a dielectric substrate 100 including a placement surface and a base plate 200 which is joined to the dielectric substrate 100 and which has formed therein a coolant flow path 400 through which a coolant flows. The coolant flow path 400 includes a first flow path 410 and a second flow path 420 connected in series to each other. The second flow path 420 is formed in a position on the dielectric substrate 100 side relative to the first flow path 410 in a direction perpendicular to the placement surface.

Abstract: An electrostatic chuck 10 includes a dielectric substrate 100 which includes a first part 101 including a placement surface and a second part 102 which protrudes from an outer circumferential edge of the first part 101 further towards an outer circumferential side, an internal electrode 140 provided inside the second part 102, a feed terminal 160 provided in a position which is not overlapped with the internal electrode 140 in top view, and a bypass portion 150 which is provided inside the dielectric substrate 100 and electrically connects the feed terminal 160 and the internal electrode 140.

Abstract: An electrostatic chuck includes a base plate, a first heater element, and a plurality of first power feeding terminals. The base plate includes a communicating path having a spiral shape. The first heater element includes a plurality of first zones. The plurality of first power feeding terminals feeds power to the plurality of first zones. Each of the plurality of first zones includes a first heater line and a pair of first power feeding portions feeding power to the first heater line. The pair of first power feeding portions is electrically connected to the plurality of first power feeding terminals. The plurality of first power feeding terminals includes a first and a second annular portion. The communicating path includes a first circumferential portion surrounding the second annular portion between the first annular portion and the second annular portion when viewed along a stacking direction.

Abstract: An electrostatic chuck includes a base plate, a first heater element, and a plurality of first power feeding terminals. The base plate includes a communicating path having a spiral shape. The first heater element includes a plurality of first zones. The plurality of first power feeding terminals feeds power to the plurality of first zones. Each of the plurality of first zones includes a first heater line and a pair of first power feeding portions feeding power to the first heater line. The pair of first power feeding portions is electrically connected to the plurality of first power feeding terminals. The plurality of first power feeding terminals includes a first and a second annular portion. The communicating path includes a first circumferential portion surrounding the second annular portion between the first annular portion and the second annular portion when viewed along a stacking direction.

Abstract: An electrostatic chuck (10) includes a dielectric substrate (100) and a heater unit (300) configured to heat the dielectric substrate (100). The heater unit (300) includes a power supply portion (390) configured to receive a supply of power from an external source, a heat generation portion (331) that is a conductor drawn in a linear shape and configured to receive the supply of power from the power supply portion (390) and generate heat, and a bypass layer (370) connecting the power supply portion (390) and the heat generation portion (331). The heat generation portion (331) includes a widened portion (332) that is a section in which a line width of the heat generation portion (331) is locally widened. The bypass layer (370) is connected to the heat generation portion (331) at a plurality of locations in the widened portion (332).

Abstract: An electrostatic chuck includes a dielectric substrate, a base plate which is a metallic member joined to the dielectric substrate and in which a gas hole is formed, and a vent plug arranged inside the gas hole. The vent plug has a porous section which is a section made of a porous ceramic with air permeability, and a dense section which is a section made of a dense ceramic without air permeability, and which surrounds a whole circumference of the porous section from an outer circumference side. The porous section and the dense section are formed together into one piece by sintering without sandwiching a joining material made of a material other than a ceramic.

Abstract: An electrostatic chuck includes a dielectric substrate, a base plate which is a metallic member joined to the dielectric substrate and in which a gas hole is formed, and a vent plug arranged inside the gas hole. The vent plug has a porous section which is a section made of a porous ceramic with air permeability, and a dense section which is a section made of a dense ceramic without air permeability, and which surrounds a whole circumference of the porous section from an outer circumference side. The porous section and the dense section are formed together into one piece by sintering without sandwiching a joining material made of a material other than a ceramic.

Abstract: An electrostatic chuck includes a ceramic dielectric substrate and a base plate. The ceramic dielectric substrate includes a first major surface, a second major surface, a groove part, and a plurality of cooling gas holes. The groove part includes first and second circumferential grooves, and first and second radial-direction grooves. The plurality of cooling gas holes includes first and second holes. The first hole overlaps the first radial-direction groove. The second hole overlaps the second radial-direction groove. The base plate includes a gas inlet path that supplies the cooling gas to the first and second holes. The first circumferential groove includes first and second end portions. The second circumferential groove includes third and fourth end portions. The third end portion and the fourth end portion do not overlap the first end portion in the radial direction.

Abstract: An electrostatic chuck includes a base plate, a first heater element, and a plurality of first power feeding terminals. The base plate includes a communicating path having a spiral shape. The first heater element includes a plurality of first zones. The plurality of first power feeding terminals feeds power to the plurality of first zones. Each of the plurality of first zones includes a first heater line and a pair of first power feeding portions feeding power to the first heater line. The pair of first power feeding portions is electrically connected to the plurality of first power feeding terminals. The plurality of first power feeding terminals includes a first and a second annular portion. The communicating path includes a first circumferential portion surrounding the second annular portion between the first annular portion and the second annular portion when viewed along a stacking direction.

Abstract: An electrostatic chuck includes a ceramic dielectric substrate and a base plate. The base plate includes a communicating path configured to allow a coolant to pass. The communicating path includes a first flow path part having a pair of side surfaces along a first direction. The first direction is along a flow of the coolant. When viewed along a stacking direction, one side surface of the pair of side surfaces includes a plurality of convex portions and a plurality of concave portions. The plurality of convex portions is convex in a second direction. The second direction is perpendicular to the first direction. The second direction is from the other side surface toward the one side surface of the pair of side surfaces. The plurality of concave portions is convex in an opposite direction of the second direction.

Abstract: An electrostatic chuck includes a ceramic dielectric substrate and a base plate. The ceramic dielectric substrate includes a first major surface, a second major surface, a groove part, and a plurality of cooling gas holes. The groove part includes first and second circumferential grooves, and first and second radial-direction grooves. The plurality of cooling gas holes includes first and second holes. The first hole overlaps the first radial-direction groove. The second hole overlaps the second radial-direction groove. The base plate includes a gas inlet path that supplies the cooling gas to the first and second holes. The first circumferential groove includes first and second end portions. The second circumferential groove includes third and fourth end portions. The third end portion and the fourth end portion do not overlap the first end portion in the radial direction.

Abstract: An X-ray CT device according to an embodiment includes a gantry, a top board, and a movement mechanism. The gantry includes an X-ray tube that generates X-rays and a detector that detects the X-rays. The top board inserts the subject into the opening section of the gantry. The movement mechanism moves the top board in a longitudinal direction. Furthermore, the position of the top board in a vertical direction at the position that intersects with the path of the X-rays is changed at substantially the same slope relative to the movement distance of the top board when the top board is moved in the longitudinal direction.

Abstract: A conductive contact point pin includes a pin body, and a plurality of convex portions formed in a tip portion of the pin body, wherein the conductive contact point pin breaks, by pressing a substrate where a film to be broken is formed on a conductive film from above the film to be broken, the film to be broken in order to be electrically connected to the conductive film.

Abstract: A magnetic recording medium includes a substrate and a stacked film on the substrate and including a magnetic recording layer. An elastic modulus Esub of the substrate satisfies Equation (1) below, where h is a film thickness of the stacked film and Efilm is an Young's modulus of the stacked film: Esub?(200*Efilm)/(6*h)??(1).

Abstract: A conductive contact point pin includes a pin body, and a plurality of convex portions formed in a tip portion of the pin body, wherein the conductive contact point pin breaks, by pressing a substrate where a film to be broken is formed on a conductive film from above the film to be broken, the film to be broken in order to be electrically connected to the conductive film.

Abstract: An X-ray CT device according to an embodiment includes a gantry, a top board, and a movement mechanism. The gantry includes an X-ray tube that generates X-rays and a detector that detects the X-rays. The top board inserts the subject into the opening section of the gantry. The movement mechanism moves the top board in a longitudinal direction. Furthermore, the position of the top board in a vertical direction at the position that intersects with the path of the X-rays is changed at substantially the same slope relative to the movement distance of the top board when the top board is moved in the longitudinal direction.