Patents by Inventor Tomoko KITTAKA

Tomoko KITTAKA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Conductive thin film manufacturing method
    Patent number: 10982323
    Abstract: A first voltage is applied to a first positive electrode and a first negative electrode of an attraction plate in a lying posture to attract a dielectric object to be attracted on the attraction plate. The attraction plate is turned to a stand posture while attracting the dielectric object by a gradient force, and a conductive thin film is grown while applying a second voltage to a second positive electrode and a second negative electrode to generate an electrostatic force. Since the object is continuously attracted, the attraction plate will not detach. After having started attraction by electrostatic force, introduction of heat medium gas between the object and the attraction plate allows for temperature control of the object.
    Type: Grant
    Filed: April 20, 2020
    Date of Patent: April 20, 2021
    Assignee: ULV AC, INC.
    Inventors: Ken Maehira, Koh Fuwa, Tomoko Kittaka, Tetsuhiro Ohno, Hirotoshi Sakaue
  • CONDUCTIVE THIN FILM MANUFACTURING METHOD
    Publication number: 20200248301
    Abstract: A first voltage is applied to a first positive electrode and a first negative electrode of an attraction plate in a lying posture to attract a dielectric object to be attracted on the attraction plate. The attraction plate is turned to a stand posture while attracting the dielectric object by a gradient force, and a conductive thin film is grown while applying a second voltage to a second positive electrode and a second negative electrode to generate an electrostatic force. Since the object is continuously attracted, the attraction plate will not detach. After having started attraction by electrostatic force, introduction of heat medium gas between the object and the attraction plate allows for temperature control of the object.
    Type: Application
    Filed: April 20, 2020
    Publication date: August 6, 2020
    Applicant: ULVAC, INC.
    Inventors: Ken MAEHIRA, Koh FUWA, Tomoko KITTAKA, Tetsuhiro OHNO, Hirotoshi SAKAUE