Abstract: Provided is a hot isostatic pressing (HIP) device that improves the heat uniformity of a hot zone during a pressurization process of an object being processed. This HIP device (100) is provided with: an outer casing (4) having an open outer opening part (4H); an inner casing (5) having an open inn opening part (5H); a heat-insulating body (R) disposed between the outer casing (4) and the inner casing (5); a gas flow generation part (30); and a plurality of first gas conduits (12), A hot zone (P) in which a pressurization process is performed is formed inside the inner casing (5).

Abstract: Provided is a hot isostatic pressing (HIP) device that improves the heat uniformity of a hot zone during a pressurization process of an object being processed. This HIP device (100) is provided with: an outer casing (4) having an open outer opening part (4H); an inner casing (5) having an open inn opening part (5H); a heat-insulating body (R) disposed between the outer casing (4) and the inner casing (5); a gas flow generation part (30); and a plurality of first gas conduits (12), A hot zone (P) in which a pressurization process is performed is formed inside the inner casing (5).

Abstract: Provided is a hot isostatic pressing (HIP) device (1) that can efficiently cool a hot zone during HIP processing while restraining temperatures in the lower part of a high-pressure container. This HIP device (1) is provided with the following: gas-impermeable casings (3, 4) that surround an object to be processed (W); a heating unit (7) that is disposed inside these casings and forms a hot zone around the object to be processed (W); a high-pressure container (2); and a cooling unit that guides a pressure-medium gas cooled on the outside of the casings into the hot zone to cool the hot zone. The cooling unit comprises the following: a gas introduction unit that introduces the pressure-medium gas that has been cooled on the outside of the casings (3, 4) into the hot zone; and a cooling promotion unit (37) that cools the pressure medium gas by causing the pressure-medium gas that has been cooled on the outside of the casings to exchange heat with a base (11) of the high-pressure container (2).

Abstract: Provided is a hot isostatic pressing device (HIP) (1) that enables prompt cooling in a processing chamber. The HIP device (1) is provided with the following: gas impermeable casings (3, 4); a heating unit (7); a high-pressure container (2); a heat accumulator (43) provided below a processing chamber; and a cooling promotion flow path (44). The casings (3, 4) are disposed so as to form the following: a first circulation flow (41) in which a pressure medium gas passes through an inner flow path (22) and an outer flow path (12) and then returns to the inner flow path (22); and a second circulation flow (42) in which the pressure medium gas which has branched off from the first circulation flow (41) performs heat exchange with an object-of-processing (W) in the processing chamber and then is fed back to the first circulation flow (41).

Abstract: Provided is a hot isostatic pressing device (HIP) (1) that enables prompt cooling in a processing chamber. The HIP device (1) is provided with the following: gas impermeable casings (3, 4); a heating unit (7); a high-pressure container (2); a heat accumulator (43) provided below a processing chamber; and a cooling promotion flow path (44). The casings (3, 4) are disposed so as to form the following: a first circulation flow (41) in which a pressure medium gas passes through an inner flow path (22) and an outer flow path (12) and then returns to the inner flow path (22); and a second circulation flow (42) in which the pressure medium gas which has branched off from the first circulation flow (41) performs heat exchange with an object-of-processing (W) in the processing chamber and then is fed back to the first circulation flow (41).

Abstract: Provided is a hot isostatic pressing (HIP) device (1) that can efficiently cool a hot zone during HIP processing while restraining temperatures in the lower part of a high-pressure container. This HIP device (1) is provided with the following: gas-impermeable casings (3, 4) that surround an object to be processed (W); a heating unit (7) that is disposed inside these casings and forms a hot zone around the object to be processed (W); a high-pressure container (2); and a cooling unit that guides a pressure-medium gas cooled on the outside of the casings into the hot zone to cool the hot zone. The cooling unit comprises the following: a gas introduction unit that introduces the pressure-medium gas that has been cooled on the outside of the casings (3, 4) into the hot zone; and a cooling promotion unit (37) that cools the pressure medium gas by causing the pressure-medium gas that has been cooled on the outside of the casings to exchange heat with a base (11) of the high-pressure container (2).

Abstract: A hot isostatic pressing method is disclosed wherein workpieces are accommodated within a high pressure vessel and the interior of the high pressure vessel is filled with an inert gas of a high temperature and a high pressure to treat the workpieces. The method includes a cooling step which is performed after maintaining the interior of the high pressure vessel at a high temperature and a high pressure for a predetermined time and in which a liquid inert gas is fed into the high pressure vessel. According to this method it is possible to shorten the cycle time of an HIP apparatus.

Abstract: A hot isotropic pressure device including: a casing disposed inside a high-pressure container; a heating unit provided inside the casing and forms a hot zone around the treatment material, in which an isotropic pressure treatment is performed on the treatment material using a pressure medium gas. A cooling unit is provided to cool the hot zone by guiding the pressure medium gas, cooled while guided from the upper side toward the lower side at the outside of the casing, into the hot zone. The cooling unit includes a gas introducing unit which guides the pressure medium gas cooled at the outside of the casing from the lower portion of the high-pressure container to the upper portion of the hot zone without any intersection with the pressure medium gas inside the hot zone and introduces the pressure medium gas into the hot zone.

Abstract: A hot isostatic pressing device according to the present invention includes an inner casing, an outer casing, and a heating means which are provided inside a high-pressure container.

Abstract: A hot isotropic pressure device including: a casing disposed inside a high-pressure container; a heating unit provided inside the casing and forms a hot zone around the treatment material, in which an isotropic pressure treatment is performed on the treatment material using a pressure medium gas. A cooling unit is provided to cool the hot zone by guiding the pressure medium gas, cooled while guided from the upper side toward the lower side at the outside of the casing, into the hot zone. The cooling unit includes a gas introducing unit which guides the pressure medium gas cooled at the outside of the casing from the lower portion of the high-pressure container to the upper portion of the hot zone without any intersection with the pressure medium gas inside the hot zone and introduces the pressure medium gas into the hot zone.

Abstract: A hot isostatic pressing device according to the present invention includes an inner casing, an outer casing, and a heating means which are provided inside a high-pressure container.

Abstract: A hot isostatic pressing method is disclosed wherein workpieces are accommodated within a high pressure vessel and the interior of the high pressure vessel is filled with an inert gas of a high temperature and a high pressure to treat the workpieces. The method includes a cooling step which is performed after maintaining the interior of the high pressure vessel at a high temperature and a high pressure for a predetermined time and in which a liquid inert gas is fed into the high pressure vessel. According to this method it is possible to shorten the cycle time of an HIP apparatus.

Abstract: A hot isostatic pressing apparatus (HIP apparatus) comprises a vertically cylindrical high-pressure vessel comprising a high-pressure cylinder 1 and upper and lower lids 2 and 3; a bottomed cylindrical casing 6 capable of housing workpieces 9 and a resistance-wire heater 11, a heat insulating structure 16 equipped with a gas flow regulating valve 15 and formed in a bottomed cylindrical shape on the outside of the casing 6 so as to cover the casing 6, and a heat sink 17 having a water cooling mechanism provided in the space defined by the heat insulating structure 16 and the inner surface of the high-pressure cylinder 1, which are provided within the high-pressure vessel; and a pressure medium gas stirring fan 12 for promoting the temperature uniformity of the space of the treatment chamber 7 for housing the workpieces 9, the stirring fan being arranged on the lower lid 3 side within the casing 6, whereby the cooling to a temperature range of 100° C.

Abstract: In a high temperature/high pressure vessel for treating a workpiece placed in the interior of the vessel at a high temperature and a high pressure wherein piano wire is wound under tension round an outer periphery of a cylindrical body to apply a compressive residual stress to the cylindrical body and axial openings of the cylindrical body are tightly closed with upper and lower lids so that the lids can be disengaged from the openings, the cylindrical body is constituted as a two-layer cylindrical body comprising an inner cylinder and an outer cylinder which is fitted on the inner cylinder through plural spacers arranged along an outer periphery surface of the inner cylinder, allowing cooling water flow paths to be formed each between adjacent such spacers so as to extend from one end side to an opposite end side of the tow-layer cylindrical body.

Abstract: In a high temperature/high pressure vessel for treating a workpiece placed in the interior of the vessel at a high temperature and a high pressure wherein piano wire is wound under tension round an outer periphery of a cylindrical body to apply a compressive residual stress to the cylindrical body and axial openings of the cylindrical body are tightly closed with upper and lower lids so that the lids can be disengaged from the openings, the cylindrical body is constituted as a two-layer cylindrical body comprising an inner cylinder and an outer cylinder which is fitted on the inner cylinder through plural spacers arranged along an outer periphery surface of the inner cylinder, allowing cooling water flow paths to be formed each between adjacent such spacers so as to extend from one end side to an opposite end side of the tow-layer cylindrical body.

Abstract: A hot isostatic pressing apparatus (HIP apparatus) comprises a vertically cylindrical high-pressure vessel comprising a high-pressure cylinder 1 and upper and lower lids 2 and 3; a bottomed cylindrical casing 6 capable of housing workpieces 9 and a resistance-wire heater 11, a heat insulating structure 16 equipped with a gas flow regulating valve 15 and formed in a bottomed cylindrical shape on the outside of the casing 6 so as to cover the casing 6, and a heat sink 17 having a water cooling mechanism provided in the space defined by the heat insulating structure 16 and the inner surface of the high-pressure cylinder 1, which are provided within the high-pressure vessel; and a pressure medium gas stirring fan 12 for promoting the temperature uniformity of the space of the treatment chamber 7 for housing the workpieces 9, the stirring fan being arranged on the lower lid 3 side within the casing 6, whereby the cooling to a temperature range of 100° C.

Abstract: The present invention provides a processing apparatus for eliminating pores in via holes of a silicon semiconductor. The apparatus includes a high-pressure vessel divided into at least two vessel component members in the axial direction thereof, at least one of which has a cooling unit, a frame for holding a load acting in the axial direction of the high-pressure vessel in processing a workpiece to be processed in the high-pressure vessel, an actuator for moving the vessel component members of the high-pressure vessel in the axial direction thereof so as to load and unload the workpiece, a sealing unit fitted to a portion for loading and unloading the workpiece, which is formed when the vessel component members are moved in the axial direction of the vessel, and a retractable cotter unit for transmitting a load acting in the axial direction of the high-pressure vessel to the frame.

Abstract: The present invention provides a system for supplying a high-pressure medium gas suitable for processing a semiconductor to be processed by heating under isostatic pressure in a short cycle.The system includes a gas holder containing a high-pressure medium gas, a compressor for pressurizing the high-pressure medium gas supplied from the gas holder, a high-pressure vessel having a heater, an accumulator for storing the high-pressure medium gas pressurized by the compressor, a first evacuation unit for evacuating the inside of a pipeline for the high-pressure medium gas, a vacuum casing for holding the opening of the high-pressure vessel in a vacuum, a second evacuation unit for evacuating the inside of the vacuum casing, and a valve unit for connecting the high-pressure vessel and the accumulator so that series connection and parallel connection can be switched on the outlet side of the compressor.

Abstract: A cooling system for the hot isostatic pressurizing equipment which is provided with valves and actuators at the lower part of the equipment so that they are not subject to thermal deformation. The valves and actuators are installed independently from each other so as to eliminate a need for increasing the diameter of the vessel.The valve is attached to a lower vent hole formed in the radial direction in the supporting cylinder installed on the inner bottom closure. The valve is energized in its closing direction by a spring and is operated by the actuator installed on the outer bottom closure detachable from the inner bottom closure.