Abstract: In a substrate processing apparatus according to the present invention, a heating mechanism for heating a substrate includes a gas discharge nozzle arranged in an internal space, a heater attached to an outer wall of a chamber, and a pipe feeding to the discharge nozzle. An observing mechanism includes a light source part and an image pickup part which are arranged at a separation position away from an attachment portion in the outer wall of the chamber. Thus, the light source part and the image pickup part become less susceptible to an effect of heat generated by the heater. In other words, it is possible to prevent the reduction in the observation accuracy due to an effect of temperature change.

Abstract: A movement of the upstream workpiece to the first transfer position by the first mover and a movement of the downstream workpiece to the second transfer position by the second mover are performed in synchronization. A feed of the upstream workpiece from the first transfer position to the second transfer position by the first feeder and a feed of the downstream workpiece from the second transfer position to the third transfer position by the second feeder are performed in synchronization. A movement of the upstream workpiece from the second transfer position to the inversion position by the second mover and a movement of the downstream workpiece from the third transfer position to the second imaging position by the third mover are performed in synchronization.

Abstract: A movement of the upstream workpiece to the first transfer position by the first mover and a movement of the downstream workpiece to the second transfer position by the second mover are performed in synchronization. A feed of the upstream workpiece from the first transfer position to the second transfer position by the first feeder and a feed of the downstream workpiece from the second transfer position to the third transfer position by the second feeder are performed in synchronization. A movement of the upstream workpiece from the second transfer position to the inversion position by the second mover and a movement of the downstream workpiece from the third transfer position to the second imaging position by the third mover are performed in synchronization.

Abstract: A workpiece holder comprises: a holding table including: a chuck mechanism holding the workpiece; a positioning mechanism moving the chuck mechanism in a direction orthogonal to the rotary axis while supporting the chuck mechanism to locate the workpiece; and a rotary mechanism rotating the positioning mechanism about the rotary axis to rotate the workpiece held by the chuck mechanism about the rotary axis; an alignment imaging part capturing an image of the outer peripheral portion of the workpiece held by the chuck mechanism; a misalignment detector detecting misalignment of the symmetry axis with respect to the rotary axis based on the captured image while the workpiece is rotated by the rotary mechanism; and a workpiece position correction part correcting the position of the workpiece to match the symmetry axis with the rotary axis by moving the chuck mechanism using the positioning mechanism to eliminate the misalignment.

Abstract: A workpiece holder comprises: a holding table including: a chuck mechanism holding the workpiece; a positioning mechanism moving the chuck mechanism in a direction orthogonal to the rotary axis while supporting the chuck mechanism to locate the workpiece; and a rotary mechanism rotating the positioning mechanism about the rotary axis to rotate the workpiece held by the chuck mechanism about the rotary axis; an alignment imaging part capturing an image of the outer peripheral portion of the workpiece held by the chuck mechanism; a misalignment detector detecting misalignment of the symmetry axis with respect to the rotary axis based on the captured image while the workpiece is rotated by the rotary mechanism; and a workpiece position correction part correcting the position of the workpiece to match the symmetry axis with the rotary axis by moving the chuck mechanism using the positioning mechanism to eliminate the misalignment.