Abstract: Provided are a contamination inspection method and a contamination inspection device for highly accurately detecting a defect in a wafer, a liquid crystal substrate and media or the like including patterns, for example, a semiconductor device or the like. The first aspect of the present invention is a contamination inspection device comprising: an irradiation optical system for irradiating lights on the inspection target substrate; and a spatial filter for shading diffracted lights form the inspection target substrate. Herein, the spatial filter comprises: a plurality of light shading materials; a control member for changing at least one of parameters selected from a shape, an angle and an interval with respect to the light shading material, and a control unit for controlling the control members.

Abstract: Provided are a contamination inspection method and a contamination inspection device for highly accurately detecting a defect in a wafer, a liquid crystal substrate and media or the like including patterns, for example, a semiconductor device or the like. The first aspect of the present invention is a contamination inspection device comprising: an irradiation optical system for irradiating lights on the inspection target substrate; and a spatial filter for shading diffracted lights form the inspection target substrate. Herein, the spatial filter comprises: a plurality of light shading materials; a control member for changing at least one of parameters selected from a shape, an angle and an interval with respect to the light shading material, and a control unit for controlling the control members.

Abstract: A capillary array includes a light detection portion, a sample supply portion, a buffer solution supply portion and a voltage application portion which are necessary functions for electrophoresis, thereby, when assembling the capillary array into an electrophoresis apparatus, the same can be immediately used. Accordingly, a capillary array is provided which can be easily incorporated into an electrophoresis apparatus.

Abstract: A capillary array includes a light detection portion, a sample supply portion, a buffer solution supply portion and a voltage application portion which are necessary functions for electrophoresis, thereby, when assembling the capillary array into an electrophoresis apparatus, the same can be immediately used. Accordingly, a capillary array is provided which can be easily incorporated into an electrophoresis apparatus.

Abstract: The flow rate of a solvent is reduced as a separation column and the separation performance is improved even under high-pressure conditions. There is provided a separation column including a monolith rod into which a sample and a mobile phase flow, the separation column comprising: a coating material coated on the outer circumference of a monolith rod; a support member into which the monolith rod coated with the coating material is inserted, and a rod fixing material fitted into or filled a gap between the coating material and the support member; wherein the upper end face of the rod fixing material is sealed, the upper end face being the inflow-side end when the separation column is assembled.

Abstract: A capillary array includes a light detection portion, a sample supply portion, a buffer solution supply portion and a voltage application portion which are necessary functions for electrophoresis, thereby, when assembling the capillary array into an electrophoresis apparatus, the same can be immediately used. Accordingly, a capillary array is provided which can be easily incorporated into an electrophoresis apparatus.

Abstract: The flow rate of a solvent is reduced as a separation column and the separation performance is improved even under high-pressure conditions. There is provided a separation column including a monolith rod into which a sample and a mobile phase flow, the separation column comprising: a coating material coated on the outer circumference of a monolith rod; a support member into which the monolith rod coated with the coating material is inserted, and a rod fixing material fitted into or filled a gap between the coating material and the support member; wherein the upper end face of the rod fixing material is sealed, the upper end face being the inflow-side end when the separation column is assembled.

Abstract: In a case where the temperature of capillaries cannot be controlled rapidly in accordance with the change of the amount of heat generated from the capillaries, the phoretic speed of the sample is not controlled constant to lower the analyzing performance for the sample. This invention intends to stabilize the electrophoretic speed. The surface of a substrate on which a plurality of capillaries are arranged is in contact with a member capable of temperature control thereby controlling the temperature of the capillaries. Since a member capable of controlling the temperature and the capillaries are in direct contact with each other according to the invention, the temperature of the capillary can be controlled rapidly at a high accuracy, so that electrophoretic speed is stabilized.

Abstract: A capillary array includes multiple capillaries and two holding substrates for arranging the aforementioned multiple capillaries in a substantially plane surface by sandwiching at least some of these capillaries mutually. One of the holding substrates has a detection window for transmitting the detected light emitted by a test sample by irradiation of light. Especially, this detection window includes multiple light transmission areas provided to correspond to each capillary to transmit the detected light, and light cut-off areas provided between these light transmission areas to cut off the detected light. These light cut-off areas cut off light reflected from the surface of capillaries and hence improve the SN ratio, thereby ensuring high-precision detection.

Abstract: A monolithic separation column and a liquid chromatography system using the same are provided by which the pressure tightness is improved, and the manufacturing is enabled at a low temperature, thus preventing the degradation of the separation performance. A monolithic rod 118 is made of a porous body and has a cylindrical shape. A coat material 116 coats an outer circumference of the monolithic rod 118 and includes an uneven portion 116R on an outer face thereof A holder 112, into which the monolithic rod 118 coated with the coat material 116 is inserted, includes a taper portion 112T on an inner face thereof. A potting media 114 is fitted or filled between the coat material 116 and the holder 112.

Abstract: The flow rate of a solvent is reduced as a separation column and the separation performance is improved even under high-pressure conditions. There is provided a separation column including a monolith rod into which a sample and a mobile phase flow, the separation column comprising: a coating material coated on the outer circumference of a monolith rod; a support member into which the monolith rod coated with the coating material is inserted, and a rod fixing material fitted into or filled a gap between the coating material and the support member; wherein the upper end face of the rod fixing material is sealed, the upper end face being the inflow-side end when the separation column is assembled.

Abstract: Provided is a liquid feed apparatus for feeding liquid by operating a diaphragm at a high frequency, in which an inlet valve and an outlet valve are integrally incorporated with a liquid feed chamber, the positions of the valve are shifted into peripheral parts of the liquid feed chamber so as to allow fluid to smoothly flow from the inlet to the outlet in order to prevent air bubbles from causing pressure fluctuation during liquid feed, from remaining in the liquid feed chamber. Further, the valve has a center beam structure in which a protrusion having a height greater than several micron meters, is formed in the seat part of the valve so as to deform a center beam for pressurizing the valve in order to enhance the shut-off ability of the valve, and the center beam has a small surface area in the direction of displacement of the valve.

Abstract: In a case where the temperature of capillaries cannot be controlled rapidly in accordance with the change of the amount of heat generated from the capillaries, the phoretic speed of the sample is not controlled constant to lower the analyzing performance for the sample. This invention intends to stabilize the electrophoretic speed. The surface of a substrate on which a plurality of capillaries are arranged is in contact with a member capable of temperature control thereby controlling the temperature of the capillaries. Since a member capable of controlling the temperature and the capillaries are in direct contact with each other according to the invention, the temperature of the capillary can be controlled rapidly at a high accuracy, so that electrophoretic speed is stabilized.

Abstract: A multi-focus capillary array that can reduce crosstalk and a capillary array photodetector are provided. On a substrate 20 on which a plurality of capillaries are aligned, a perforation 72 is formed in at least a part of an area in the rear of the capillaries when the capillary array is viewed from the photodetector.

Abstract: A capillary array includes a light detection portion, a sample supply portion, a buffer solution supply portion and a voltage application portion which are necessary functions for electrophoresis, thereby, when assembling the capillary array into an electrophoresis apparatus, the same can be immediately used. Accordingly, a capillary array is provided which can be easily incorporated into an electrophoresis apparatus.

Abstract: In an electrophoresis apparatus comprising capillaries for containing therein fluorescence-labeled substances, and a sensor for irradiating the capillaries with exciting light and detecting fluorescences, the sensor has a substrate including a datum surface for holding thereon the capillaries, and a groove sinking from the datum surface, and the groove has a plurality of reflecting surfaces for reflecting thereon the fluorescences emitted from the capillaries by a plurality of times.

Abstract: A capillary array includes multiple capillaries and two holding substrates for arranging the aforementioned multiple capillaries in a substantially plane surface by sandwiching at least some of these capillaries mutually. One of the holding substrates has a detection window for transmitting the detected light emitted by a test sample by irradiation of light. Especially, this detection window includes multiple light transmission areas provided to correspond to each capillary to transmit the detected light, and light cut-off areas provided between these light transmission areas to cut off the detected light. These light cut-off areas cut off light reflected from the surface of capillaries and hence improve the SN ratio, thereby ensuring high-precision detection.

Abstract: A capillary array includes a light detection portion, a sample supply portion, a buffer solution supply portion and a voltage application portion which are necessary functions for electrophoresis, thereby, when assembling the capillary array into an electrophoresis apparatus, the same can be immediately used. Accordingly, a capillary array is provided which can be easily incorporated into an electrophoresis apparatus.

Abstract: A capillary array comprising multiple capillaries and two holding substrates for arranging the aforementioned multiple capillaries in a substantially plane surface by sandwiching at least some of these capillaries mutually. One of the holding substrates has a detection window for transmitting the detected light emitted by a test sample by irradiation of light. Especially, this detection window comprises multiple light transmission areas provided to correspond to each capillary to transmit the detected light, and light cut-off areas provided between these light transmission areas to cut off the detected light. These light cut-off areas cut off light reflected from the surface of capillaries and hence improve the SN ratio, thereby ensuring high-precision detection.

Abstract: The present invention easies a connection between electrodes of a capillary array device and a connection plate for supplying a high voltage to the electrodes. According to the present invention, a connection plate 23 and hollow electrodes 20 are connected without solder but via a spring force. Alternatively, the hollow electrodes 20 can be connected to the connection plate 23 by utilizing volume elasticity of the connection plate.