Abstract: A particle counter is configured to count particles contained in a sample fluid flowing through a flow passage by using light with which the flow passage is irradiated. The particle counter includes: a multi-flow cell having a plurality of the flow passages; a path adjuster configured to adjust a position of an optical path of the light with respect to the multi-flow cell, based on which flow passage is selected from the flow passages; and a light adjuster configured to adjust a condition of the light with which the selected flow passage is irradiated.

Abstract: A flow cell includes a body and a flow channel. The body is formed out of blocks made of an uniaxial crystal material and joined to one another. The flow channel is formed inside the body, so that the flow cell is configured to be used to measure particles passing through the flow channel based on reception of scattered light generated from the particles. A crystallographic c-axis in a predetermined part of the body is configured to being substantially perpendicular to both a receiving direction and a polarization direction of the scattered light.

Abstract: A particle counter includes: a multi-flow cell with flow passages arrayed in a first direction and having a section including a detection region, for detecting a particle, formed when the flow passage is irradiated with irradiation light; a light receiving optical system configured to receive emitted light generated from a particle contained in sample fluid flowing in the at least one flow passage and passing through the detection region; an optical axis moving unit configured to move an optical axis of the irradiation light and an optical axis of the emitted light in the first direction; and a counter configured to count the particle for each particle size based on an intensity of the emitted light.

Abstract: A flow cell includes a body and a flow channel. The body is formed out of blocks made of an uniaxial crystal material and joined to one another. The flow channel is formed inside the body, so that the flow cell is configured to be used to measure particles passing through the flow channel based on reception of scattered light generated from the particles. A crystallographic c-axis in a predetermined part of the body is configured to being substantially perpendicular to both a receiving direction and a polarization direction of the scattered light.

Abstract: An in-fluid floating substance measurement flow cell includes: a main body having at least a predetermined portion made of a material having translucency; and a flow passage formed inside the main body, having both end openings at an outer surface of the main body in a substantially identical direction, and configured such that fluid flows in the flow passage. The flow passage has a predetermined section arranged between two opposing flat wall surfaces facing each other, and the predetermined portion includes the predetermined section.

Abstract: A particle counter includes: a multi-flow cell with flow passages arrayed in a first direction and having a section including a detection region, for detecting a particle, formed when the flow passage is irradiated with irradiation light; a light receiving optical system configured to receive emitted light generated from a particle contained in sample fluid flowing in the at least one flow passage and passing through the detection region; an optical axis moving unit configured to move an optical axis of the irradiation light and an optical axis of the emitted light in the first direction; and a counter configured to count the particle for each particle size based on an intensity of the emitted light.

Abstract: An in-fluid floating substance measurement flow cell includes: a main body having at least a predetermined portion made of a material having translucency; and a flow passage formed inside the main body, having both end openings at an outer surface of the main body in a substantially identical direction, and configured such that fluid flows in the flow passage. The flow passage has a predetermined section arranged between two opposing flat wall surfaces facing each other, and the predetermined portion includes the predetermined section.

Abstract: A particle counter includes a detector that receives, using a light receiving element, interference light between scattered light and reference light, generates a detection signal corresponding to the interference light, and amplifies the detection signal using an amplifier; a counting unit that performs counting of the particle, based on the detection signal in a measurement period for measuring particle; and an optical path length variable unit that causes the optical path length of at least one of a first optical path and a second optical path to be changed at a predetermined rate, wherein the predetermined rate is set based on a flow velocity of the fluid so as to slow a change in a phase difference between the scattered light and the reference light and to make the frequency of the detection signal lower by changing the optical path length.

Abstract: A particle counter provided with: a detector configured to receive interference light by scattered light and reference light with a light receiving element, and generate a detection signal corresponding to the interference light; a filter configured to perform, with respect to the detection signal generated by the detector, a filtering process for passing a frequency component corresponding to an intensity change of the interference light; a determination unit configured to determine, from a peak level of the detection signal before filtering and a peak level of the detection signal after filtering, whether the detection signal is due to a particle; and a counting unit configured to perform, if it is determined by the determination unit that the detection signal is due to the particle, particle counting based on the detection signal after filtering.

Abstract: A particle counter includes a detector that receives, using a light receiving element, interference light between scattered light and reference light, generates a detection signal corresponding to the interference light, and amplifies the detection signal using an amplifier; a counting unit that performs counting of the particle, based on the detection signal in a measurement period for measuring particle; and an optical path length variable unit that causes the optical path length of at least one of a first optical path and a second optical path to be changed at a predetermined rate, wherein the predetermined rate is set based on a flow velocity of the fluid so as to slow a change in a phase difference between the scattered light and the reference light and to make the frequency of the detection signal lower by changing the optical path length.

Abstract: A particle counter provided with: a detector configured to receive interference light by scattered light and reference light with a light receiving element, and generate a detection signal corresponding to the interference light; a filter configured to perform, with respect to the detection signal generated by the detector, a filtering process for passing a frequency component corresponding to an intensity change of the interference light; a determination unit configured to determine, from a peak level of the detection signal before filtering and a peak level of the detection signal after filtering, whether the detection signal is due to a particle; and a counting unit configured to perform, if it is determined by the determination unit that the detection signal is due to the particle, particle counting based on the detection signal after filtering.

Abstract: An irradiation optical system 12 irradiates a fluid flowing in a flow passage 2a with one light among a plurality of lights obtained by branching light from a light source 1 and forms the detection area. A detection optical system 13 makes scattered light with a different direction from an optical axis of the irradiation optical system enter a beam splitter 17 among the scattered lights from particles contained in the fluid in this detection area. Meanwhile, a beam expander 16 makes another light among the plurality of lights enter the beam splitter 17 as reference light. A detector 4 receives an interference light, by the scattered light and the reference light, obtained by the beam splitter 17 by light receiving elements and generates a detection signal corresponding to the interference light. A counting unit 6 counts the particles based on this detection signal.

Abstract: Provided is a particle counter including: a light source; a light superimposition unit configured to superimpose light beams; an irradiation optical system configured to irradiate a fluid in a flow passage with one of a plurality of light beams from the light source; a detection optical system configured to make a part of scattered light beams by a particle in the fluid enter the light superimposition unit; a reference optical system configured to split another one of the plurality of light beams into a plurality of reference light beams and makes the reference light beams enter the light superimposition unit; and a counting unit configured to count the particles on the basis of detection signals corresponding to an interference light beam received by a light receiver. The interference light beam is generated by interference between the scattered light beam and one of the reference light beams at the light superimposition unit, and is received by the light receiver corresponding to the reference light beam.

Abstract: An irradiation optical system 12 irradiates a fluid flowing in a flow passage 2a with one light among a plurality of lights obtained by branching light from a light source 1 and forms the detection area. A detection optical system 13 makes scattered light with a different direction from an optical axis of the irradiation optical system enter a beam splitter 17 among the scattered lights from particles contained in the fluid in this detection area. Meanwhile, a beam expander 16 makes another light among the plurality of lights enter the beam splitter 17 as reference light. A detector 4 receives an interference light, by the scattered light and the reference light, obtained by the beam splitter 17 by light receiving elements and generates a detection signal corresponding to the interference light. A counting unit 6 counts the particles based on this detection signal.

Abstract: A particle counter for chemical solution in this disclosure uses a flow cell through which a chemical solution including particles flows, a laser light, and a light-receiving element array. Scattered light from the particles passing through a detection region on an optical path of the laser light in the flow cell is condensed to the light-receiving element array. The laser light in the center of the detection region has an energy density of 3×108 mW/cm2 or more. Each of plural light-receiving elements (a) is larger in length and width than a spot diameter of the scattered light, and (b) receives the scattered light from a region with a size of 760 ?m2 or less included in the detection region. The signal processing unit counts the particles passing through the detection region by use of a threshold corresponding to the smallest measurable particle size of 0.03 ?m.

Abstract: Provided is a particle counter including: a light source; a light superimposition unit configured to superimpose light beams; an irradiation optical system configured to irradiate a fluid in a flow passage with one of a plurality of light beams from the light source; a detection optical system configured to make a part of scattered light beams by a particle in the fluid enter the light superimposition unit; a reference optical system configured to split another one of the plurality of light beams into a plurality of reference light beams and makes the reference light beams enter the light superimposition unit; and a counting unit configured to count the particles on the basis of detection signals corresponding to an interference light beam received by a light receiver. The interference light beam is generated by interference between the scattered light beam and one of the reference light beams at the light superimposition unit, and is received by the light receiver corresponding to the reference light beam.

Abstract: A particle counter for chemical solution in this disclosure uses a flow cell through which a chemical solution including particles flows, a laser light, and a light-receiving element array. Scattered light from the particles passing through a detection region on an optical path of the laser light in the flow cell is condensed to the light-receiving element array. The laser light in the center of the detection region has an energy density of 3×108 mW/cm2 or more. Each of plural light-receiving elements (a) is larger in length and width than a spot diameter of the scattered light, and (b) receives the scattered light from a region with a size of 760 ?m2 or less included in the detection region. The signal processing unit counts the particles passing through the detection region by use of a threshold corresponding to the smallest measurable particle size of 0.03 ?m.

Abstract: A particle counting method that can count the number of the particles precisely. The method discriminates a wave pattern of the scattered light from a normal particle (subject of the counting) and a wave pattern of the light scattered by the agitation such as a floating particle, a radiation or changes in the intensity of the light. In one embodiment, a method for counting particles is disclosed which irradiates a light to a sample gas, detects a scattered light from a particle included in the sample gas by a photoelectric conversion device, counts the number of the particles of every particle size division by the output voltage wave pattern of the photoelectric conversion device, calculate a time difference (Ta?T1) from a point (T1) being a peak of output voltage wave pattern and a point (Ta) being a falling detection threshold (A), when the time difference (Ta?T1) is beyond counting cancellation time (B), the output voltage wave pattern is not counted as a particle.

Abstract: A particle counting method that can count the number of the particles precisely. The method discriminates a wave pattern of the scattered light from a normal particle (subject of the counting) and a wave pattern of the light scattered by the agitation such as a floating particle, a radiation or changes in the intensity of the light. In one embodiment, a method for counting particles is disclosed which irradiates a light to a sample gas, detects a scattered light from a particle included in the sample gas by a photoelectric conversion device, counts the number of the particles of every particle size division by the output voltage wave pattern of the photoelectric conversion device, calculate a time difference (Ta?T1) from a point (T1) being a peak of output voltage wave pattern and a point (Ta) being a falling detection threshold (A), when the time difference (Ta?T1) is beyond counting cancellation time (B), the output voltage wave pattern is not counted as a particle.

Abstract: A particle counter for measuring the number of floating particles contained in a sample to determine the particle concentration therein includes: a memory section for storing a relational expression between the direct current level output from a photoelectric converter when no particles exist and the frequency of occurrence of false counts; and a subtraction section for determining the frequency of occurrence of the false counts corresponding to the direct current level output from the photoelectric converter at the time of commencement of measurement with reference to the relational expression stored in the memory section and subtracting a value based on the frequency of occurrence of the false counts from a discrete value after commencement of measurement.