Abstract: A liquid ejection device includes: a liquid ejection unit with an ejection port surface provided with an ejection port from which liquid is ejected and configured to eject the liquid onto a substrate at an ejection position; an image capturing mechanism configured to face the ejection port surface of the liquid ejection unit and to capture an image of the ejection port surface at a maintenance position different from the ejection position; and a lighting unit configured to irradiate the ejection port surface at multiple incidence angles with respect to the ejection port surface in an operation of capturing an image of the ejection port surface by the image capturing mechanism.

Abstract: A liquid ejection device includes: a liquid ejection unit with an ejection port surface provided with an ejection port from which liquid is ejected and configured to eject the liquid onto a substrate at an ejection position; an image capturing mechanism configured to face the ejection port surface of the liquid ejection unit and to capture an image of the ejection port surface at a maintenance position different from the ejection position; and a lighting unit configured to irradiate the ejection port surface at multiple incidence angles with respect to the ejection port surface in an operation of capturing an image of the ejection port surface by the image capturing mechanism.

Abstract: An imprint apparatus includes a nozzle including a discharge outlet which discharges imprint material onto the substrate, a supply unit configured to supply a gas which accelerates filling of a pattern of a mold with the imprint material, and a gas unit provided with the nozzle. The gas unit performs gas supply or exhaust with respect to a second space around a first space between the nozzle and a portion of the substrate which faces the nozzle and is conveyed under the nozzle in order to suppress the gas from flowing into the first space.

Abstract: A liquid discharge apparatus includes: a container divided by a dividing member into a first chamber configured to contain a first liquid to be discharged from a discharge port and a second chamber configured to contain a second liquid; a supply unit configured to supply the second liquid into the second chamber in accordance with decrease of the first liquid contained in the first chamber; and a measurement unit configured measure flow of the first liquid into the second chamber.

Abstract: The present invention provides an imprint apparatus which molds an imprint material using a mold to form a pattern on a substrate, the apparatus including a nozzle including a discharge outlet which discharges the imprint material onto the substrate, a holding unit configured to hold the mold, a supply unit configured to supply a gas which accelerates filling of a pattern of the mold with the imprint material to a portion between the holding unit and the imprint material on the substrate, and a gas unit provided with the nozzle, wherein the gas unit performs gas supply or exhaust with respect to a second space around a first space between the nozzle and a portion of the substrate which faces the nozzle and is conveyed under the nozzle in order to suppress the gas from flowing into the first space.

Abstract: A liquid discharge apparatus includes: a container divided by a dividing member into a first chamber configured to contain a first liquid to be discharged from a discharge port and a second chamber configured to contain a second liquid; a supply unit configured to supply the second liquid into the second chamber in accordance with decrease of the first liquid contained in the first chamber; and a measurement unit configured measure flow of the first liquid into the second chamber.