Patents by Inventor Tomonori KUWAMOTO

Tomonori KUWAMOTO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Film deposition apparatus
    Patent number: 9435026
    Abstract: In discharging a source gas from a first process gas nozzle, rectifying members including a coolant flow passage provided in a concertinaing manner therein are arranged both sides of the first process gas nozzle. Then, a coolant at a temperature higher than a liquefaction temperature of the source gas and lower than a thermal decomposition temperature of the source gas is flown through the coolant flow passage, by which the first process gas nozzle is cooled through the rectifying member.
    Type: Grant
    Filed: March 25, 2014
    Date of Patent: September 6, 2016
    Assignee: Tokyo Electron Limited
    Inventors: Yu Wamura, Tomonori Kuwamoto
  • FILM DEPOSITION APPARATUS
    Publication number: 20140290578
    Abstract: In discharging a source gas from a first process gas nozzle, rectifying members including a coolant flow passage provided in a concertinaing manner therein are arranged both sides of the first process gas nozzle. Then, a coolant at a temperature higher than a liquefaction temperature of the source gas and lower than a thermal decomposition temperature of the source gas is flown through the coolant flow passage, by which the first process gas nozzle is cooled through the rectifying member.
    Type: Application
    Filed: March 25, 2014
    Publication date: October 2, 2014
    Applicant: Tokyo Electron Limited
    Inventors: Yu WAMURA, Tomonori KUWAMOTO