Abstract: A substrate processing apparatus includes processing units, an exhaust path, a gas processing apparatus and a controller. Each processing unit is configured to process a substrate by using a chemical. A gas exhausted from the processing units flows through the exhaust path. The gas processing apparatus is provided in the exhaust path to remove a target component contained in the gas. The gas processing apparatus includes a duct, a partition plate and a liquid supply. The duct has therein a flow path. The partition plate divides the flow path into spaces, and is formed of a porous material, through which the gas passes, configured to retain a liquid. The liquid supply is configured to supply a dissolving liquid configured to dissolve the target component to the partition plate. The controller adjusts a flow rate of the dissolving liquid according to operation information indicating an operational status of the processing units.

Abstract: Disclosed is a substrate processing apparatus including a chamber, a first measuring unit, an exhaust pipe, a regulation valve, an opening degree detection unit, a valve controller, and a clogging detection unit. The chamber accommodates therein a substrate to be processed by using a processing fluid. The first measuring unit measures an internal pressure of the chamber. An exhaust from the chamber flows through the exhaust pipe. The regulation valve regulates an exhaust volume of the exhaust pipe. The opening degree detection unit detects a valve opening degree of the regulation valve. The valve controller controls the valve opening degree of the regulation valve based on a measurement result of the first measuring unit to keep the internal pressure within a specified range. The clogging detection unit detects clogging of the exhaust pipe based on the valve opening degree detected by the opening degree detection unit.

Abstract: Disclosed is a substrate processing apparatus including a chamber, a first measuring unit, an exhaust pipe, a regulation valve, an opening degree detection unit, a valve controller, and a clogging detection unit. The chamber accommodates therein a substrate to be processed by using a processing fluid. The first measuring unit measures an internal pressure of the chamber. An exhaust from the chamber flows through the exhaust pipe. The regulation valve regulates an exhaust volume of the exhaust pipe. The opening degree detection unit detects a valve opening degree of the regulation valve. The valve controller controls the valve opening degree of the regulation valve based on a measurement result of the first measuring unit to keep the internal pressure within a specified range. The clogging detection unit detects clogging of the exhaust pipe based on the valve opening degree detected by the opening degree detection unit.

Abstract: To provide a jig for forming a sealant layer which enables to quickly and accurately form a sealant layer having a required film thickness. The jig includes: a sealant cup 13 that overlays a sealant 28 around a collar 26; a cup holder 12 that determines a position of the sealant cup 13 with respect to a fastener member 24; and a dummy cup 11 that determines a position of the cup holder 12 with respect to the fastener member 24. The cup holder 12 is determined in position with respect to the fastener member 24 by being guided along the dummy cup 11 determined in position with respect to the fastener member 24. The sealant cup 13 is guided along a guide of the cup holder 12 so as to overlay the sealant 28 around the collar 26 after removing the dummy cup 11 from the cup holder 12 determined in position with respect to the fastener member 24.

Abstract: To provide a jig for forming a sealant layer for a lightning protection fastener which enables to quickly and accurately obtain a sealant layer having a required thickness. A guide jig 30 is used to form a sealant layer 29 around a fastener member 24 that passes through and fastens a plurality of members constituting an airframe of an aircraft, the jig including: a cup 31 including a cavity 33 to be filled with an uncured sealant 28; and a guide that is provided within the cavity 33 and engaged with the fastener member 24 so as to match a center axis of the cavity 33 with a center axis of the fastener member 24.

Abstract: The invention provides an orally disintegrating tablet containing (a) one or more saccharides or sugar alcohols selected from the group consisting of mannitol, lactose, xylitol, sucrose, erythritol and glucose and (b) low substituted hydroxypropylcellulose and substantially free of a starch disintegrant, which tablet is produced by steps of granulating a composition containing the above-mentioned components (a) and (b) by an agitation granulation method, and compression-molding the obtained granulation product. The invention also provides a method of producing an orally disintegrating tablet substantially free of a starch disintegrant, including steps of granulating a composition containing the above-mentioned components by an agitation granulation method, and compression-molding the obtained granulation product.

Abstract: To provide a jig for forming a sealant layer for a lightning protection fastener which enables to quickly and accurately obtain a sealant layer having a required thickness. A guide jig 30 is used to form a sealant layer 29 around a fastener member 24 that passes through and fastens a plurality of members constituting an airframe of an aircraft, the jig including: a cup 31 including a cavity 33 to be filled with an uncured sealant 28; and a guide that is provided within the cavity 33 and engaged with the fastener member 24 so as to match a center axis of the cavity 33 with a center axis of the fastener member 24.

Abstract: A method for determining an object of a test for verifying the lightning protection adequacy of a fastening part includes: a structural pattern population generating step of generating a population of structural patterns identified by a combination of a plurality of properties of the fastening part; a section extracting step of extracting those sections which are disposed in a wet area of the aircraft where fuel or fuel vapor is present, from the sections of a fastening member, for each of the structural patterns of the population; a group setting step of setting a group of structural patterns of the same predetermined properties for each of the sections; and a representative pattern selecting step of selecting a representative pattern representative of the group from the structural patterns belonging to the same group. The structural pattern narrowed down through the steps is determined as the test object.

Abstract: To provide a jig for forming a sealant layer which enables to quickly and accurately form a sealant layer having a required film thickness. The jig includes: a sealant cup 13 that overlays a sealant 28 around a collar 26; a cup holder 12 that determines a position of the sealant cup 13 with respect to a fastener member 24; and a dummy cup 11 that determines a position of the cup holder 12 with respect to the fastener member 24. The cup holder 12 is determined in position with respect to the fastener member 24 by being guided along the dummy cup 11 determined in position with respect to the fastener member 24. The sealant cup 13 is guided along a guide of the cup holder 12 so as to overlay the sealant 28 around the collar 26 after removing the dummy cup 11 from the cup holder 12 determined in position with respect to the fastener member 24.

Abstract: A long-life lightning protection fastener or the like to prevent explosion for aircrafts at low cost is provided, the fastener having a light weight, ensuring sufficient lightning protection, and having extremely less failures and high reliability. A ring-shaped ring member 40A made of resin is mounted on a collar 26. This ring member 40A is interposed between a member 22 and the collar 26 and is in intimate contact with both of the member 22 and the collar 26, thereby sealing an interface with the member 22 for sealing and preventing the occurrence of an arc at an outer perimeter edge of the collar 26.

Abstract: A long-life lightning protection fastener or the like to prevent explosion for aircrafts at low cost is provided, the fastener having a light weight, ensuring sufficient lightning protection, and having extremely less failures and high reliability. A ring-shaped ring member 40A made of resin is mounted on a collar 26. This ring member 40A is interposed between a member 22 and the collar 26 and is in intimate contact with both of the member 22 and the collar 26, thereby sealing an interface with the member 22 for sealing and preventing the occurrence of an arc at an outer perimeter edge of the collar 26.

Abstract: The invention provides an orally disintegrating tablet containing (a) one or more saccharides or sugar alcohols selected from the group consisting of mannitol, lactose, xylitol, sucrose, erythritol and glucose and (b) low substituted hydroxypropylcellulose and substantially free of a starch disintegrant, which tablet is produced by steps of granulating a composition containing the above-mentioned components (a) and (b) by an agitation granulation method, and compression-molding the obtained granulation product. The invention also provides a method of producing an orally disintegrating tablet substantially free of a starch disintegrant, including steps of granulating a composition containing the above-mentioned components by an agitation granulation method, and compression-molding the obtained granulation product.