Abstract: A light deflector 2 includes: a mirror section 9 that reflects light; a movable frame 8 provided in such a manner as to surround the mirror section 9; a pair of torsion bars 13a and 13b having one end of each torsion bar connected to the mirror section 9 and the other end thereof connected to the movable frame 8 on a Y-axis; and semi-annular piezoelectric actuators 10a and 10b that are provided on the movable frame 8 and rotate the torsion bars 13a and 13b around the Y-axis in a reciprocating manner. The torsion bars 13a and 13b each have a constricted shape in which the transverse width at both end parts is the largest and the transverse width gradually decreases toward the central part thereof in a length direction.

Abstract: A light deflector 1 includes a reflector (2), inner piezoelectric actuators (4), an inner frame (5), outer piezoelectric actuators (6), and an outer frame (7). The reflector (2) is oscillated about a first axis Ua and a second axis Ub by the inner piezoelectric actuators (4) and the outer piezoelectric actuators (6), respectively. Formed on the rear surface of the light deflector 1 is a projecting rib (52), which projects from an encircling rib (51) of the inner frame (5) and reaches a corner portion (36) of a distal end portion of a piezoelectric cantilever (13a). A vertical side (22b) has an outer recess (35). The outer recess (35) extends along the projecting rib (52) in a portion of the distal end side of the piezoelectric cantilever (13a).

Abstract: A light deflector 1 includes a reflector (2), inner piezoelectric actuators (4), an inner frame (5), outer piezoelectric actuators (6), and an outer frame (7). The reflector (2) is oscillated about a first axis Ua and a second axis Ub by the inner piezoelectric actuators (4) and the outer piezoelectric actuators (6), respectively. Formed on the rear surface of the light deflector 1 is a projecting rib (52), which projects from an encircling rib (51) of the inner frame (5) and reaches a corner portion (36) of a distal end portion of a piezoelectric cantilever (13a). A vertical side (22b) has an outer recess (35). The outer recess (35) extends along the projecting rib (52) in a portion of the distal end side of the piezoelectric cantilever (13a).

Abstract: A sensor element includes a base part, a detection vibrating arm extended from the base part, and detection parts that are provided on the detection vibrating arm and detect flexural vibration of the detection vibrating arm, the detection parts each have a first electrode layer, a second electrode layer provided at an opposite side to the detection vibrating arm with respect to the first electrode layer, and a piezoelectric layer provided between the first electrode layer and the second electrode layer, and the detection parts have parts provided over boundary parts between the detection vibrating arm and the base part and the parts bend or curve to extend in a direction including a direction component orthogonal to an extension direction of the detection vibrating arm along side surfaces of the detection vibrating arm and the base part.

Abstract: A sensor element includes a base part, a detection vibrating arm extended from the base part, and detection parts that are provided on the detection vibrating arm and detect flexural vibration of the detection vibrating arm, the detection parts each have a first electrode layer, a second electrode layer provided at an opposite side to the detection vibrating arm with respect to the first electrode layer, and a piezoelectric layer provided between the first electrode layer and the second electrode layer, and the detection parts have parts provided over boundary parts between the detection vibrating arm and the base part and the parts bend or curve to extend in a direction including a direction component orthogonal to an extension direction of the detection vibrating arm along side surfaces of the detection vibrating arm and the base part.