Patents by Inventor Tomotaka SHIBAZAKI
Tomotaka SHIBAZAKI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230215684Abstract: The present invention provides: a stage device that can suppress bending deformation of a mirror, and that can reduce the positioning error of a stage by reducing the measurement error of the position of the stage; and a charged particle beam device comprising this stage device.Type: ApplicationFiled: February 22, 2021Publication date: July 6, 2023Applicant: Hitachi High-Tech CorporationInventors: Motohiro TAKAHASHI, Masaki MIZUOCHI, Shuichi NAKAGAWA, Tomotaka SHIBAZAKI, Hironori OGAWA, Takanori KATO
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Publication number: 20220352804Abstract: A vacuum processing apparatus includes a linear motor. The linear motor includes a mover having a permanent magnet, a stator having a coil covered by a resin member, and a wire for supplying a current to the coil provided in a vacuum sample chamber. The wire is led out to an outside of the vacuum sample chamber through a through hole portion provided in the wall surface of the vacuum sample chamber. The through hole portion is filled with the resin member integrally or with a filler that binds to the resin member, so that the through hole portion is sealed.Type: ApplicationFiled: July 5, 2022Publication date: November 3, 2022Inventors: Tomotaka SHIBAZAKI, Masaki MIZUOCHI
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Patent number: 11418101Abstract: Since wires connected to a linear motor are routed in a vacuum sample chamber, outgassing is generated from wire coating and efficiency of assembly operations is reduced. Further, there is a problem that thrust generation efficiency of the linear motor is reduced when a gap between a coil and a permanent magnet of the linear motor cannot be small. In order to solve the above problems, a linear motor for vacuum is provided, the linear motor for vacuum including: a mover having a permanent magnet; and a stator having a support member to which a coil is fixed, in which the support member includes a vacuum sealing portion that vacuum seals with a wall surface of a vacuum sample chamber, and a feed-through for supplying a current to the coil provided in the vacuum sample chamber.Type: GrantFiled: October 11, 2019Date of Patent: August 16, 2022Assignee: Hitachi High-Technologies CorporationInventors: Tomotaka Shibazaki, Masaki Mizuochi
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Patent number: 11380515Abstract: An object of the present disclosure is to provide a charged particle beam device that can suppress an influence to a device generated according to the preliminary exhaust. In order to achieve the object, suggested is a charged particle beam device including a vacuum sample chamber that maintains an atmosphere around a sample to be irradiated with a charged particle beam in a vacuum state; and a preliminary exhaust chamber to which a vacuum pump for vacuuming an atmosphere of the sample introduced into the vacuum sample chamber is connected, in which the vacuum sample chamber is a box-shaped body including a top plate, and a portion between the top plate and a side wall of the box-shaped body positioned below the top plate includes a portion in which the top plate and the side wall are not in contact with each other.Type: GrantFiled: July 7, 2020Date of Patent: July 5, 2022Assignee: Hitachi High-Tech CorporationInventors: Keiichiro Hosobuchi, Masaki Mizuochi, Shuichi Nakagawa, Tomotaka Shibazaki, Takaaki Kikuchi
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Patent number: 11049687Abstract: A stage includes a sample table on which a sample is placed, a first drive mechanism moving the sample table in a first direction; a position measurement element measuring a position in the first direction that is a driving direction of the sample table. The stage also has a scale element having a scale measurement axis that is parallel to a first measurement axis in the first direction based on the position measurement element and is different from the first measurement axis in height, and measuring the position of the sample table in the first direction. A controller calculates the orientation of the sample table by using a measurement value by the position measurement element and a measurement value by the scale element and correcting the Abbe error of the sample table.Type: GrantFiled: November 14, 2019Date of Patent: June 29, 2021Assignee: HITACHI HIGH-TECH CORPORATIONInventors: Motohiro Takahashi, Masaki Mizuochi, Shuichi Nakagawa, Tomotaka Shibazaki, Naruo Watanabe, Hironori Ogawa, Takanori Kato, Akira Nishioka
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Publication number: 20210066025Abstract: An object of the present disclosure is to provide a charged particle beam device that can suppress an influence to a device generated according to the preliminary exhaust. In order to achieve the object, suggested is a charged particle beam device including a vacuum sample chamber that maintains an atmosphere around a sample to be irradiated with a charged particle beam in a vacuum state; and a preliminary exhaust chamber to which a vacuum pump for vacuuming an atmosphere of the sample introduced into the vacuum sample chamber is connected, in which the vacuum sample chamber is a box-shaped body including a top plate, and a portion between the top plate and a side wall of the box-shaped body positioned below the top plate includes a portion in which the top plate and the side wall are not in contact with each other.Type: ApplicationFiled: July 7, 2020Publication date: March 4, 2021Inventors: Keiichiro HOSOBUCHI, Masaki MIZUOCHI, Shuichi NAKAGAWA, Tomotaka SHIBAZAKI, Takaaki KIKUCHI
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Patent number: 10879033Abstract: Provided is a stage apparatus that reduces thermal deformation and temperature rise in an upper table on which a sample is mounted and a charged particle beam apparatus including the stage apparatus. The stage apparatus includes: an upper stage that moves an upper table on which a sample is mounted in a first direction; a middle stage that moves a middle table on which the upper stage is mounted in a second direction orthogonal to the first direction; and a lower stage that moves a lower table on which the middle stage is mounted in a third direction orthogonal to the first direction and the second direction. The upper table and the middle table use a material having a smaller thermal expansion coefficient than in a material of the lower table, and the lower table uses a material having higher thermal conductivity than in the material of the upper table and the middle table.Type: GrantFiled: June 6, 2019Date of Patent: December 29, 2020Assignee: HITACHI HIGH-TECH CORPORATIONInventors: Akira Nishioka, Masaki Mizuochi, Shuichi Nakagawa, Tomotaka Shibazaki, Hironori Ogawa, Naruo Watanabe, Motohiro Takahashi, Takanori Kato
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Publication number: 20200176217Abstract: A stage includes a sample table on which a sample is placed, a first drive mechanism moving the sample table in a first direction; a position measurement element measuring a position in the first direction that is a driving direction of the sample table. The stage also has a scale element having a scale measurement axis that is parallel to a first measurement axis in the first direction based on the position measurement element and is different from the first measurement axis in height, and measuring the position of the sample table in the first direction. A controller calculates the orientation of the sample table by using a measurement value by the position measurement element and a measurement value by the scale element and correcting the Abbe error of the sample table.Type: ApplicationFiled: November 14, 2019Publication date: June 4, 2020Inventors: Motohiro TAKAHASHI, Masaki MIZUOCHI, Shuichi NAKAGAWA, Tomotaka SHIBAZAKI, Naruo WATANABE, Hironori OGAWA, Takanori KATO, Akira NISHIOKA
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Patent number: 10658151Abstract: To provide a lightweight and highly rigid stage device that can move in X and Y directions and a Z direction, and a charged particle beam device including the stage device. A stage device includes a chuck that is loaded with a sample, an XY stage that moves in X and Y directions, and a Z stage that moves in a Z direction. The Z stage includes: an inclined part that is fixed to the XY stage and includes an inclined surface inclined with respect to an XY plane; a movement part that moves on the inclined surface; and a table that is fixed to the movement part and is provided with the a plane parallel to the XY plane.Type: GrantFiled: January 7, 2019Date of Patent: May 19, 2020Assignee: HITACHI HIGH-TECH CORPORATIONInventors: Motohiro Takahashi, Masaki Mizuochi, Shuichi Nakagawa, Tomotaka Shibazaki, Naruo Watanabe, Akira Nishioka, Takanori Kato, Hironori Ogawa
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Publication number: 20200126749Abstract: Since wires connected to a linear motor are routed in a vacuum sample chamber, outgassing is generated from wire coating and efficiency of assembly operations is reduced. Further, there is a problem that thrust generation efficiency of the linear motor is reduced when a gap between a coil and a permanent magnet of the linear motor cannot be small. In order to solve the above problems, a linear motor for vacuum is provided, the linear motor for vacuum including: a mover having a permanent magnet; and a stator having a support member to which a coil is fixed, in which the support member includes a vacuum sealing portion that vacuum seals with a wall surface of a vacuum sample chamber, and a feed-through for supplying a current to the coil provided in the vacuum sample chamber.Type: ApplicationFiled: October 11, 2019Publication date: April 23, 2020Inventors: Tomotaka SHIBAZAKI, Masaki MIZUOCHI
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Patent number: 10600614Abstract: The present invention is to provide a stage device capable of improving field-of-view positioning accuracy of a stage having a Z-axis mechanism. The invention is directed to a sample stage device having a first table that moves a sample in a first direction, a second driving mechanism that moves the first table in a second direction different from the first direction, and a part having a function of moving a laser interferometer optical axis that measures the position of the first table, in the second direction.Type: GrantFiled: September 5, 2018Date of Patent: March 24, 2020Assignee: Hitachi High-Technologies CorporationInventors: Motohiro Takahashi, Masaki Mizuochi, Shuichi Nakagawa, Tomotaka Shibazaki, Hironori Ogawa, Naruo Watanabe, Takanori Kato
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Publication number: 20190378678Abstract: Provided is a stage apparatus that reduces thermal deformation and temperature rise in an upper table on which a sample is mounted and a charged particle beam apparatus including the stage apparatus. The stage apparatus includes: an upper stage that moves an upper table on which a sample is mounted in a first direction; a middle stage that moves a middle table on which the upper stage is mounted in a second direction orthogonal to the first direction; and a lower stage that moves a lower table on which the middle stage is mounted in a third direction orthogonal to the first direction and the second direction. The upper table and the middle table use a material having a smaller thermal expansion coefficient than in a material of the lower table, and the lower table uses a material having higher thermal conductivity than in the material of the upper table and the middle table.Type: ApplicationFiled: June 6, 2019Publication date: December 12, 2019Applicant: Hitachi High-Technologies CorporationInventors: Akira NISHIOKA, Masaki MIZUOCHI, Shuichi NAKAGAWA, Tomotaka SHIBAZAKI, Hironori OGAWA, Naruo WATANABE, Motohiro TAKAHASHI, Takanori KATO
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Publication number: 20190259567Abstract: To provide a lightweight and highly rigid stage device that can move in X and Y directions and a Z direction, and a charged particle beam device including the stage device. A stage device includes a chuck that is loaded with a sample, an XY stage that moves in X and Y directions, and a Z stage that moves in a Z direction. The Z stage includes: an inclined part that is fixed to the XY stage and includes an inclined surface inclined with respect to an XY plane; a movement part that moves on the inclined surface; and a table that is fixed to the movement part and is provided with the a plane parallel to the XY plane.Type: ApplicationFiled: January 7, 2019Publication date: August 22, 2019Inventors: Motohiro TAKAHASHI, Masaki MIZUOCHI, Shuichi NAKAGAWA, Tomotaka SHIBAZAKI, Naruo WATANABE, Akira NISHIOKA, Takanori KATO, Hironori OGAWA
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Publication number: 20190103246Abstract: The present invention is to provide a stage device capable of improving field-of-view positioning accuracy of a stage having a Z-axis mechanism. The invention is directed to a sample stage device having a first table (105) that moves a sample in a first direction, a second driving mechanism (601) that moves the first table in a second direction different from the first direction, and a part having a function of moving a laser interferometer optical axis (115) that measures the position of the first table, in the second direction.Type: ApplicationFiled: September 5, 2018Publication date: April 4, 2019Inventors: Motohiro TAKAHASHI, Masaki MIZUOCHI, Shuichi NAKAGAWA, Tomotaka SHIBAZAKI, Hironori OGAWA, Naruo WATANABE, Takanori KATO