Abstract: A photoelectric encoder includes a scale; a detector; alight application section; a pair of origin signal reception sections; and a signal processing section adapted to provide the maximum value of the signal level output from the origin signal reception sections by side lobe light occurring as reflected on the origin mark as a stipulated value, provide an effective area of origin detection between the first position at which output of one of the origin signal reception sections for outputting a larger signal level than the stipulated value earlier than the relative displacement becomes a larger signal level than the stipulated value and the first position at which output of the other origin signal reception section exceeds the stipulated value and then becomes a smaller signal level than the stipulated value, and configured to generate the origin detection signal in the effective area.

Abstract: An offset amount calibrating method that obtains the offset amount between a contact-type detector and an image probe is provided. The method includes: setting on a stage a calibration chart that includes not less than two non-parallel linewidth patterns being disposed relative to a reference position of the calibration chart and each having a known width and a level difference; capturing an image of the linewidth patterns of the calibration chart by an image probe to obtain the reference position of the calibration chart; measuring at least two of the linewidth patterns of the calibration chart by a contact-type detector to obtain the reference position of the calibration chart; and calculating a difference between the reference position obtained by using the image probe and the reference position obtained by using the contact-type detector to obtain the offset amount.

Abstract: An optical encoder includes a scale having diffraction gratings formed at predetermined pitches in a measurement axis direction, a detection head relatively movable with respect to the scale, the detection head including a light source portion configured to irradiate the scale with light, and a plurality of receiver portions configured to receive light reflected by or transmitted through the diffraction gratings of the scale, at different phases, and a signal processing device configured to perform signal processing to light reception signals output from the receiver portions of the detection head, to produce quadrature differential signals. The signal processing device is configured to calculate alignment adjustment monitor signals corresponding to a Lissajous radius of the quadrature differential signals in order to detect misalignment of the detection head with respect to the scale.

Abstract: In an optical encoder for measuring relative displacement, a scale 10 has a reference mark 14 composed of a reflection slit formed on at least one point of an incremental track 12, a detection portion (20) has a light irradiation portion (24), main light receiving portions 30a, 30b, 30ab and 30bb that are disposed at the surrounding centering around the corresponding light irradiation portion and output incremental signals four phases of which are different from each other, and a pair of reference signal light receiving portions 32z and 32zb that are disposed in the direction perpendicular to the length measurement direction using the light irradiation portion as the center of point symmetry, and a signal processing portion 40 has a three-phase signal generation portion 48, a quadrature sine wave signals generation portion 50, a direction judgment circuit 56, an internal period counter 58, and a reference signal processing portion 60, thereby bringing about a micro-sized optical encoder capable of detecting t

Abstract: A photoelectric encoder includes a scale; a detector; alight application section; a pair of origin signal reception sections; and a signal processing section adapted to provide the maximum value of the signal level output from the origin signal reception sections by side lobe light occurring as reflected on the origin mark as a stipulated value, provide an effective area of origin detection between the first position at which output of one of the origin signal reception sections for outputting a larger signal level than the stipulated value earlier than the relative displacement becomes a larger signal level than the stipulated value and the first position at which output of the other origin signal reception section exceeds the stipulated value and then becomes a smaller signal level than the stipulated value, and configured to generate the origin detection signal in the effective area.

Abstract: An interferometer includes a laser beam source, a light wave dividing and synthesizing portion for 2-demultiplexing and irradiating a laser beam irradiated from the laser beam source on a measuring target and synthesizing a light having each displacement information, a multiphase interference light generating portion for generating, from a synthesized laser beam, a first interference light having a first phase, a second interference light having a second phase which is different from the first phase by 180 degrees, a third interference light having a third phase which is different from the first phase by 90 degrees, and a fourth interference light having a fourth phase which is different from the first phase by 270 degrees, a 3-phase signal generating portion for generating a 3-phase signal having a phase difference of 90 degrees on the basis of first to fourth interference signals based on the first to fourth interference lights, and a 2-phase signal generating portion for carrying out a vector synthesis ove

Abstract: A vacuum optical fiber connector includes a port flange attached to a vacuum flange for housing a first waveguide connector to which an optical fiber bundle is attached, an optical transparent body placed on the outside of the port flange, and an attachment member formed with a fit shape relative to the port flange for housing a second waveguide connector to which an optical fiber bundle is attached. The first and second waveguide connectors are positioned at least in two directions orthogonal to an optical axis with optical coupling of the first and second waveguide connectors.

Abstract: An offset amount calibrating method that obtains the offset amount between a contact-type detector and an image probe is provided. The method includes: setting on a stage a calibration chart that includes not less than two non-parallel linewidth patterns being disposed relative to a reference position of the calibration chart and each having a known width and a level difference; capturing an image of the linewidth patterns of the calibration chart by an image probe to obtain the reference position of the calibration chart; measuring at least two of the linewidth patterns of the calibration chart by a contact-type detector to obtain the reference position of the calibration chart; and calculating a difference between the reference position obtained by using the image probe and the reference position obtained by using the contact-type detector to obtain the offset amount.

Abstract: In an optical encoder for measuring relative displacement, a scale 10 has a reference mark 14 composed of a reflection slit formed on at least one point of an incremental track 12, a detection portion (20) has a light irradiation portion (24), main light receiving portions 30a, 30b, 30ab and 30bb that are disposed at the surrounding centering around the corresponding light irradiation portion and output incremental signals four phases of which are different from each other, and a pair of reference signal light receiving portions 32z and 32zb that are disposed in the direction perpendicular to the length measurement direction using the light irradiation portion as the center of point symmetry, and a signal processing portion 40 has a three-phase signal generation portion 48, a quadrature sine wave signals generation portion 50, a direction judgment circuit 56, an internal period counter 58, and a reference signal processing portion 60, thereby bringing about a micro-sized optical encoder capable of detecting t

Abstract: A vacuum optical fiber connector includes a port flange attached to a vacuum flange for housing a first waveguide connector to which an optical fiber bundle is attached, an optical transparent body placed on the outside of the port flange, and an attachment member formed with a fit shape relative to the port flange for housing a second waveguide connector to which an optical fiber bundle is attached. The first and second waveguide connectors are positioned at least in two directions orthogonal to an optical axis with optical coupling of the first and second waveguide connectors.

Abstract: An interferometer includes a laser beam source, a light wave dividing and synthesizing portion for 2-demultiplexing and irradiating a laser beam irradiated from the laser beam source on a measuring target and synthesizing a light having each displacement information, a multiphase interference light generating portion for generating, from a synthesized laser beam, a first interference light having a first phase, a second interference light having a second phase which is different from the first phase by 180 degrees, a third interference light having a third phase which is different from the first phase by 90 degrees, and a fourth interference light having a fourth phase which is different from the first phase by 270 degrees, a 3-phase signal generating portion for generating a 3-phase signal having a phase difference of 90 degrees on the basis of first to fourth interference signals based on the first to fourth interference lights, and a 2-phase signal generating portion for carrying out a vector synthesis ove

Abstract: The displacement detector includes: a light source 140; a beam splitter 170 for dividing the light, which is sent from the light source 140, into two beams of light; reflection mirrors 181, 182 provided for the two beams of light sent from the beam splitter 170, for reflecting these two beams of light and making them incident upon a scale 110; and corner cubes 191, 192 provided for the beams of diffracted light, which are generated when two beams of light incident upon the scale 110 are diffracted by the diffraction grating 111, wherein the corner cubes 191, 192 retroreflect the diffracted light and make the light incident upon the scale as retroreflected light. The incident angle to grating groove formed between the incident light and the normal line vector of the scale is larger than the diffraction angle formed between the retroreflected light and the normal line vector of the scale.

Abstract: A displacement detection apparatus (100) includes a main scale (110) and a detection head (120). The detection head (120) includes a light emission/reception unit (130) and an optical device unit (140). The optical device unit (140) has a first diffraction scale (141) and a second diffraction scale (143). The first diffraction scale (141) has a transmission type first diffraction grating (142). The second diffraction scale (143) has a diffraction grating. The second diffraction scale (143) has a transmission type second diffraction grating (144) on both sides of a metal film (146). Furthermore, the metal film (146) configures a reflection type third diffraction grating (145) when the second diffraction scale (143) is viewed from the side of the main scale (110).

Abstract: A plurality of photodiodes are disposed along a measurement axis on an optical receipt chip of a photoelectric encoder. Formed on each light acceptance surface of these photodiodes is a second optical grating which has more than one light shield portion extending in a “y” direction. Each acceptance surface has a portion that is disposed obliquely relative to the extending direction of the light shield portion.

Abstract: The displacement detector includes: a light source 140; a beam splitter 170 for dividing the light, which is sent from the light source 140, into two beams of light; reflection mirrors 181, 182 provided for the two beams of light sent from the beam splitter 170, for reflecting these two beams of light and making them incident upon a scale 110; and corner cubes 191, 192 provided for the beams of diffracted light, which are generated when two beams of light incident upon the scale 110 are diffracted by the diffraction grating 111, wherein the corner cubes 191, 192 retroreflect the diffracted light and make the light incident upon the scale as retroreflected light. The incident angle to grating groove formed between the incident light and the normal line vector of the scale is larger than the diffraction angle formed between the retroreflected light and the normal line vector of the scale.

Abstract: A displacement detection apparatus (100) includes a main scale (110) and a detection head (120). The detection head (120) includes a light emission/reception unit (130) and an optical device unit (140). The optical device unit (140) has a first diffraction scale (141) and a second diffraction scale (143). The first diffraction scale (141) has a transmission type first diffraction grating (142). The second diffraction scale (143) has a diffraction grating. The second diffraction scale (143) has a transmission type second diffraction grating (144) on both sides of a metal film (146). Furthermore, the metal film (146) configures a reflection type third diffraction grating (145) when the second diffraction scale (143) is viewed from the side of the main scale (110).