Patents by Inventor Tomoya Endo

Tomoya Endo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230004235
    Abstract: An operating device has: a lever configured to be operated by tilting; a resistor having a flat strip shape and provided on a surface of a substrate; and a slider configured to change an output voltage value by sliding on a surface of the resistor in accordance with tilting operation of the lever. In this operating device, the resistor has a low-resistance portion that has a lower resistance value than other portions of the resistor, and that is a portion in contact with the slider when the lever is in a neutral position.
    Type: Application
    Filed: September 7, 2022
    Publication date: January 5, 2023
    Inventors: Tomoya ENDO, Kazuhiko SASAKI
  • Patent number: 11454667
    Abstract: An inspection apparatus includes: a plurality of inspection devices configured to respectively inspect electronic devices of inspection objects on a plurality of chuck tops; a measurement device configured to measure height positions of a plurality of points on a surface of each of the plurality of chuck tops, which are respectively disposed to correspond to the plurality of inspection devices, or to measure distances in a height direction from a measurement reference point to the plurality of points; a calculation device configured to calculate adjustment amounts in the height direction at the plurality of points of each chuck top, based on the height positions of the plurality of points or the distances in the height direction from the measurement reference point to the plurality of points; and an adjustment mechanism configured to adjust, for each chuck top, an angle of the respective chuck top based on the adjustment amounts.
    Type: Grant
    Filed: March 18, 2021
    Date of Patent: September 27, 2022
    Assignee: TOKYO ELECTRON LIMITED
    Inventor: Tomoya Endo
  • Patent number: 11454664
    Abstract: A testing system includes: an inspection module including a plurality of levels of inspection chambers in each of which a tester part having a tester configured to perform an electrical inspection of an inspection object and a probe card is accommodated; an aligner module configured to align the inspection object with the tester part; an alignment area in which the aligner module is accommodated; and a loader part configured to load the inspection object into the alignment area and unload the inspection object out of the aligner module, wherein the inspection module is located adjacent to the alignment area.
    Type: Grant
    Filed: April 16, 2018
    Date of Patent: September 27, 2022
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Kentaro Konishi, Jun Fujihara, Hiroki Shikagawa, Hiroshi Yamada, Yukinori Murata, Katsuaki Sugiyama, Shin Uchida, Tetsuya Kagami, Hiroaki Hayashi, Rika Ozawa, Takanori Hyakudomi, Xingjun Jiang, Kenichi Narikawa, Tomoya Endo
  • Publication number: 20220238893
    Abstract: Devices and methods for generating electricity in a direct carbon fuel cell are provided herein. The method includes heating and melting an alloy to obtain a liquid alloy anode; circulating the liquid alloy anode through a porous ceramic cathode, the cathode being a tubular structure and in communication with oxygen; reducing the oxygen at the porous cathode to obtain oxygen ions for diffusing through an electrolyte to the liquid alloy anode; and oxidizing the oxygen ions at the liquid alloy anode thereby generating electricity. The direct carbon fuel cells have high electronic conductivity, high carbon solubility with fast carbon diffusion, lower viscosity and eutectic temperatures, and rapid fuel dissolution kinetics.
    Type: Application
    Filed: January 27, 2022
    Publication date: July 28, 2022
    Inventors: Adam C. Powell, Boyd Davis, Uday Bhanu Pal, Yu Zhong, Christian Faria, Naoki Ono, Takeshi Inozume, Chiaki Endo, Tomoya Miyauchi
  • Patent number: 11391758
    Abstract: A testing apparatus includes a first coordinates obtaining unit, a second coordinates obtaining unit, and a controller that performs determining card gravity center coordinates of a probe card held at a pogo frame opposite to an alignment stage, determining reference coordinates in a target coordinate system of a reference target at predetermined coordinates, determining alignment coordinates when the first coordinates obtaining unit is aligned with the second coordinates obtaining unit, determining wafer gravity center coordinates of a wafer, and calculating contact coordinates by using the determined card gravity center coordinates, the determined alignment coordinates, and the determined wafer gravity center coordinates.
    Type: Grant
    Filed: March 23, 2021
    Date of Patent: July 19, 2022
    Assignee: Tokyo Electron Limited
    Inventor: Tomoya Endo
  • Patent number: 11385286
    Abstract: A method for controlling a test apparatus, the test apparatus including a test unit in which testers are arranged in columns and rows, each tester configured to test a substrate; aligners each configured to cause the substrate to be contacted with respect to a given tester from among the testers, at least one aligner provided in each row; and a controller configured to control the aligners. The method includes constraining, by the controller, operation of at least a second aligner, while alignment is performed through a first aligner from among the aligners.
    Type: Grant
    Filed: September 11, 2020
    Date of Patent: July 12, 2022
    Assignee: Tokyo Electron Limited
    Inventor: Tomoya Endo
  • Patent number: 11364435
    Abstract: An operation device includes a housing, a tiltable cylindrical operation member having a step portion on an inner circumferential surface, a first holding member which is held by the housing and rotatable in a first direction in accordance with a tilting operation of the operation member, a first detecting portion for detecting a rotation of the first holding member, and a returning mechanism disposed inside the operation member to return the tilted operation member to an initial position, wherein the returning mechanism includes an actuator, a slide member having a first cam surface at one end, a cam member having a second cam surface at one end which faces the first cam surface, a first elastic member, and a second elastic member.
    Type: Grant
    Filed: April 23, 2021
    Date of Patent: June 21, 2022
    Assignee: ALPS ALPINE CO., LTD.
    Inventors: Tomoya Endo, Makoto Hayashi, Tatsuaki Kawase, Nobuyuki Ninomiya, Tomoyasu Nagano, Hidekazu Kato, Shuji Fujiwara
  • Patent number: 11360115
    Abstract: An inspection system configured to inspect a device within a substrate is provided. The inspection system includes an inspection module, an alignment module, a supporting device and a fixing device. The inspection module has multiple testers and multiple inspection chambers. The multiple testers are allowed to be accommodated in the multiple inspection chambers, respectively. The alignment module has an aligner. The aligner is placed in an alignment space. The aligner is configured to adjust a position of the substrate to be inspected with respect to one tester of the multiple testers, which is accommodated in the alignment space. The supporting device is configured to support the tester accommodated in the alignment space from below. The fixing device is configured to fix the tester accommodated in the alignment space in cooperation with the supporting device.
    Type: Grant
    Filed: February 26, 2019
    Date of Patent: June 14, 2022
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Takanori Hyakudomi, Jun Fujihara, Hiroaki Sakamoto, Tomoya Endo, Xingjun Jiang
  • Patent number: 11226368
    Abstract: A method of controlling a placement apparatus including a stage, a support table, a rotary drive mechanism rotating the stage including a first motion conversion mechanism configured to convert a rotary motion of a drive motor into a linear motion of a moving body and a second motion conversion mechanism configured to convert a linear motion of the moving body into a rotary motion of the stage, and a controller. The method includes a first correction step of calculating a first correction value of a drive angle of the stage for a linear movement amount of the moving body, a second correction step of obtaining a second correction value based on an error for each predetermined pitch, and a drive step of rotationally driving the stage based on the first and second correction values obtained in the first correction step and the second correction step.
    Type: Grant
    Filed: August 19, 2020
    Date of Patent: January 18, 2022
    Assignee: TOKYO ELECTRON LIMITED
    Inventor: Tomoya Endo
  • Patent number: 11181573
    Abstract: An inspection apparatus configured to inspect a target object includes an inspector configured to perform an inspection of an electrical characteristic upon the target object; a gas flow source provided within the inspector and configured to generate a gas flow which cools an inside of the inspector; a position adjuster configured to place the target object thereon and perform a position adjustment between the placed target object and the inspector; a housing which accommodates the inspector and the position adjuster in a same space; and a circulation device configured to circulate a gas by the gas flow source between the inside of the inspector and a region where the position adjuster is located within the space, the circulation device including a cooler configured to cool the gas being circulated and a foreign substance remover configured to remove a foreign substance from the gas being circulated.
    Type: Grant
    Filed: July 10, 2019
    Date of Patent: November 23, 2021
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Tomoya Endo, Kentaro Konishi
  • Publication number: 20210333319
    Abstract: A testing system includes: an inspection module including a plurality of levels of inspection chambers in each of which a tester part having a tester configured to perform an electrical inspection of an inspection object and a probe card is accommodated; an aligner module configured to align the inspection object with the tester part; an alignment area in which the aligner module is accommodated; and a loader part configured to load the inspection object into the alignment area and unload the inspection object out of the aligner module, wherein the inspection module is located adjacent to the alignment area.
    Type: Application
    Filed: April 16, 2018
    Publication date: October 28, 2021
    Inventors: Kentaro KONISHI, Jun FUJIHARA, Hiroki SHIKAGAWA, Hiroshi YAMADA, Yukinori MURATA, Katsuaki SUGIYAMA, Shin UCHIDA, Tetsuya KAGAMI, Hiroaki HAYASHI, Rika OZAWA, Takanori HYAKUDOMI, Xingjun JIANG, Kenichi NARIKAWA, Tomoya ENDO
  • Publication number: 20210311094
    Abstract: A testing apparatus includes a first coordinates obtaining unit, a second coordinates obtaining unit, and a controller that performs determining card gravity center coordinates of a probe card held at a pogo frame opposite to an alignment stage, determining reference coordinates in a target coordinate system of a reference target at predetermined coordinates, determining alignment coordinates when the first coordinates obtaining unit is aligned with the second coordinates obtaining unit, determining wafer gravity center coordinates of a wafer, and calculating contact coordinates by using the determined card gravity center coordinates, the determined alignment coordinates, and the determined wafer gravity center coordinates.
    Type: Application
    Filed: March 23, 2021
    Publication date: October 7, 2021
    Inventor: Tomoya ENDO
  • Publication number: 20210302492
    Abstract: An inspection apparatus includes: a plurality of inspection devices configured to respectively inspect electronic devices of inspection objects on a plurality of chuck tops; a measurement device configured to measure height positions of a plurality of points on a surface of each of the plurality of chuck tops, which are respectively disposed to correspond to the plurality of inspection devices, or to measure distances in a height direction from a measurement reference point to the plurality of points; a calculation device configured to calculate adjustment amounts in the height direction at the plurality of points of each chuck top, based on the height positions of the plurality of points or the distances in the height direction from the measurement reference point to the plurality of points; and an adjustment mechanism configured to adjust, for each chuck top, an angle of the respective chuck top based on the adjustment amounts.
    Type: Application
    Filed: March 18, 2021
    Publication date: September 30, 2021
    Inventor: Tomoya ENDO
  • Patent number: 11131708
    Abstract: An aligning mechanism according to one aspect of the present disclosure includes a mounting table on which a substrate is placed; a holding section configured to hold the mounting table from below; lifting pins configured to raise or lower the mounting table with respect to the holding section; and an aligner configured to support the holding section from below, and to change a position of the holding section relative to the lifting pins. In the holding section and the aligner, through-holes are formed such that the lifting pins can penetrate the through-holes.
    Type: Grant
    Filed: May 13, 2020
    Date of Patent: September 28, 2021
    Assignee: Tokyo Electron Limited
    Inventor: Tomoya Endo
  • Patent number: 11133214
    Abstract: In a substrate transportation method, a first movement process is provided for moving a camera to a position above a predetermined region where a peripheral edge of a substrate is supposed to be located in a state where the substrate is lifted by pins protruding beyond a mounting table while a transfer mechanism that has received an instruction for starting an unloading of the substrate mounted on the mounting table is moving to the mounting table. Further, a first image capturing process is provided for controlling the camera moved in the first movement process to capture an image of the predetermined region, and a first detection process is provided for detecting a positional displacement and/or a tilting of the substrate lifted by the pins based on the image captured by the camera in the first image capturing process.
    Type: Grant
    Filed: May 1, 2018
    Date of Patent: September 28, 2021
    Assignee: TOKYO ELECTRON LIMITED
    Inventor: Tomoya Endo
  • Publication number: 20210236919
    Abstract: An operation device includes a housing, a tiltable cylindrical operation member having a step portion on an inner circumferential surface, a first holding member which is held by the housing and rotatable in a first direction in accordance with a tilting operation of the operation member, a first detecting portion for detecting a rotation of the first holding member, and a returning mechanism disposed inside the operation member to return the tilted operation member to an initial position, wherein the returning mechanism includes an actuator, a slide member having a first cam surface at one end, a cam member having a second cam surface at one end which faces the first cam surface, a first elastic member, and a second elastic member.
    Type: Application
    Filed: April 23, 2021
    Publication date: August 5, 2021
    Inventors: Tomoya ENDO, Makoto HAYASHI, Tatsuaki KAWASE, Nobuyuki NINOMIYA, Tomoyasu NAGANO, Hidekazu KATO, Shuji FUJIWARA
  • Publication number: 20210088588
    Abstract: A method for controlling a test apparatus, the test apparatus including a test unit in which testers are arranged in columns and rows, each tester configured to test a substrate; aligners each configured to cause the substrate to be contacted with respect to a given tester from among the testers, at least one aligner provided in each row; and a controller configured to control the aligners. The method includes constraining, by the controller, operation of at least a second aligner, while alignment is performed through a first aligner from among the aligners.
    Type: Application
    Filed: September 11, 2020
    Publication date: March 25, 2021
    Inventor: Tomoya ENDO
  • Publication number: 20210063477
    Abstract: A method of controlling a placement apparatus including a stage, a support table, a rotary drive mechanism rotating the stage including a first motion conversion mechanism configured to convert a rotary motion of a drive motor into a linear motion of a moving body and a second motion conversion mechanism configured to convert a linear motion of the moving body into a rotary motion of the stage, and a controller. The method includes a first correction step of calculating a first correction value of a drive angle of the stage for a linear movement amount of the moving body, a second correction step of obtaining a second correction value based on an error for each predetermined pitch, and a drive step of rotationally driving the stage based on the first and second correction values obtained in the first correction step and the second correction step.
    Type: Application
    Filed: August 19, 2020
    Publication date: March 4, 2021
    Inventor: Tomoya ENDO
  • Publication number: 20200379037
    Abstract: An aligning mechanism according to one aspect of the present disclosure includes a mounting table on which a substrate is placed; a holding section configured to hold the mounting table from below; lifting pins configured to raise or lower the mounting table with respect to the holding section; and an aligner configured to support the holding section from below, and to change a position of the holding section relative to the lifting pins. In the holding section and the aligner, through-holes are formed such that the lifting pins can penetrate the through-holes.
    Type: Application
    Filed: May 13, 2020
    Publication date: December 3, 2020
    Inventor: Tomoya ENDO
  • Patent number: 10809294
    Abstract: A drive unit of a stage device includes a boxy body having a rectangular shape in a plan view, a base, a pair of X-axis linear motors, and a pair of Y-axis linear motors. An X-axis stator is disposed on each of two mutually opposing X-axis-direction side walls of the boxy body, wherein magnetic attractions that draw respective X-axis rotors toward the X-axis stator side (Y-axis direction) cancel out each other between the pair of X-axis linear motors. A Y-axis stator is disposed on the inside of each of two mutually opposing Y-axis wall members, wherein magnetic attractions that draw respective Y-axis rotors toward the Y-axis stator side (X-axis direction) cancel out each other between the pair of Y-axis linear motors.
    Type: Grant
    Filed: March 22, 2018
    Date of Patent: October 20, 2020
    Assignee: TOKYO ELECTRON LIMITED
    Inventor: Tomoya Endo