Abstract: There is provided a predicting device including: a processing condition acquisition unit which acquires a development processing condition in developing; a developing solution data acquisition unit which acquires developing solution data indicating a composition of a developing solution; a prediction unit which generates prediction data in which a composition of a developing solution after development is predicted, based on the development processing condition and the developing solution data; and an output unit which outputs information corresponding to the prediction data. The prediction unit may use the prediction data as new developing solution data, repeatedly execute generation processing of the prediction data multiple times, and generate a prediction data group including pieces of the prediction data obtained multiple times.

Abstract: The purpose of the invention is to provide a separation and recovery device capable of separating and recovering a liquid having a high solvent concentration from a development waste liquid containing a development residue, with a high processing capacity without mixing the development residue in the recovered liquid. The device is a separation and recovery device for separating and recovering a solvent component from a development waste liquid containing a development residue and has a waste-liquid heating mechanism for heating the development waste liquid, an atomization chamber having an ultrasonic element for atomizing the development waste liquid heated by the waste-liquid heating mechanism into mists, and a mist recovery mechanism for recovering the mists formed in the atomization chamber.