Patents by Inventor Tomoyasu Furukawa
Tomoyasu Furukawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11942512Abstract: A termination structure in which a semiconductor active region is surrounded with a guard ring and capable of preventing corrosion of a metal layer connected to the guard ring includes: an active region and a guard ring region surrounding the active region. A guard ring is formed on the semiconductor substrate, and an interlayer insulating film is formed on the semiconductor substrate so as to cover the guard ring. A field plate is disposed on the interlayer insulating film and is electrically connected to the guard ring via a contact penetrating the interlayer insulating film. A protective film covers the field plate, which has a laminated structure including a first metal in contact with the guard ring and a second metal which is disposed in contact with the first metal and has a lower standard potential than the first metal.Type: GrantFiled: April 27, 2021Date of Patent: March 26, 2024Assignee: HITACHI POWER SEMICONDUCTOR DEVICE, LTD.Inventors: Tomoyasu Furukawa, Daisuke Kawase
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Publication number: 20230395382Abstract: Provided are a semiconductor device and a power converting device utilizing a field-stop layer in a vertical semiconductor device with improved manufacturability using large-diameter wafers. A semiconductor device manufacturing method according to the present invention is characterized by: a step for, after a pattern on a main surface side of a drift layer of a first conductivity type is formed, irradiating ions from a second main surface side to a predetermined depth; a step for, after the ion irradiation, converting the ions into donors by anneal processing of heating at 300-450° C. for 60 seconds or less, thereby forming a field-stop layer; and a step for reducing the thickness of a semiconductor substrate to a predetermined value from the second main surface side such that a crystal defect having occurred in the ion irradiating step is eliminated.Type: ApplicationFiled: November 25, 2021Publication date: December 7, 2023Applicant: Hitachi Power Semiconductor Device, Ltd.Inventors: Tomoyasu Furukawa, Tsubasa Moritsuka
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Publication number: 20220278194Abstract: A semiconductor device having a high cutoff resistance capable of suppressing local current/electric field concentration and current concentration at a chip termination portion due to an electric field variation between IGBT cells due to a shape variation and impurity variation during manufacturing. The semiconductor device is characterized by including an emitter electrode formed on a front surface of a semiconductor substrate via an interlayer insulating film, a collector electrode formed on a back surface of the semiconductor substrate, a first semiconductor layer of a first conductivity type in contact with the collector electrode, a second semiconductor layer of a second conductivity type, a central area cell, and an outer peripheral area cell located outside the central area cell.Type: ApplicationFiled: April 22, 2020Publication date: September 1, 2022Applicant: Hitachi Power Semiconductor Device, Ltd.Inventors: Tomoyasu Furukawa, Masaki Shiraishi, So Watanabe, Tomoyuki Miyoshi, Yujiro Takeuchi
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Patent number: 11296212Abstract: A current switching semiconductor device to be used in a power conversion device achieves both a low conduction loss and a low switching loss. The semiconductor device includes the IGBT in which only Gc gates are provided and an impurity concentration of the p type collector layer is high, and the IGBT in which the Gs gates and the Gc gates are provided and an impurity concentration of the p type collector layer is low. When the semiconductor device is turned off, the semiconductor device transitions from a state in which a voltage lower than a threshold voltage is applied to both the Gs gates and the Gc gates to a state in which a voltage equal to or higher than the threshold voltage is applied to the Gc gates prior to the Gs gates.Type: GrantFiled: February 1, 2019Date of Patent: April 5, 2022Assignee: Hitachi Power Semiconductor Device, Ltd.Inventors: Tomoyuki Miyoshi, Mutsuhiro Mori, Tomoyasu Furukawa, Yujiro Takeuchi, Masaki Shiraishi
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Patent number: 11282937Abstract: The invention provides an inexpensive flywheel diode having a low power loss. A semiconductor substrate side of a gate electrode provided on a surface of an anode electrode side of a semiconductor substrate including silicon is surrounded by a p layer, an n layer, and a p layer via a gate insulating film. The anode electrode is in contact with the p layer with a low resistance, and is also in contact with the n layer or the p layer, and a Schottky diode is formed between the anode electrode and the n layer or the p layer.Type: GrantFiled: February 1, 2019Date of Patent: March 22, 2022Assignee: Hitachi Power Semiconductor Device, Ltd.Inventors: Mutsuhiro Mori, Tomoyuki Miyoshi, Tomoyasu Furukawa, Masaki Shiraishi
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Publication number: 20210367028Abstract: A termination structure in which a semiconductor active region is surrounded with a guard ring and capable of preventing corrosion of a metal layer connected to the guard ring includes: an active region and a guard ring region surrounding the active region. A guard ring is formed on the semiconductor substrate, and an interlayer insulating film is formed on the semiconductor substrate so as to cover the guard ring. A field plate is disposed on the interlayer insulating film and is electrically connected to the guard ring via a contact penetrating the interlayer insulating film. A protective film covers the field plate, which has a laminated structure including a first metal in contact with the guard ring and a second metal which is disposed in contact with the first metal and has a lower standard potential than the first metal.Type: ApplicationFiled: April 27, 2021Publication date: November 25, 2021Inventors: Tomoyasu FURUKAWA, Daisuke KAWASE
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Publication number: 20210091217Abstract: A current switching semiconductor device to be used in a power conversion device achieves both a low conduction loss and a low switching loss. The semiconductor device includes the IGBT in which only Gc gates are provided and an impurity concentration of the p type collector layer is high, and the IGBT in which the Gs gates and the Gc gates are provided and an impurity concentration of the p type collector layer is low. When the semiconductor device is turned off, the semiconductor device transitions from a state in which a voltage lower than a threshold voltage is applied to both the Gs gates and the Gc gates to a state in which a voltage equal to or higher than the threshold voltage is applied to the Gc gates prior to the Gs gates.Type: ApplicationFiled: February 1, 2019Publication date: March 25, 2021Inventors: Tomoyuki MIYOSHI, Mutsuhiro MORI, Tomoyasu FURUKAWA, Yujiro TAKEUCHI, Masaki SHIRAISHI
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Publication number: 20210057537Abstract: The invention provides an inexpensive flywheel diode having a low power loss. A semiconductor substrate side of a gate electrode provided on a surface of an anode electrode side of a semiconductor substrate including silicon is surrounded by a p layer, an n layer, and a p layer via a gate insulating film. The anode electrode is in contact with the p layer with a low resistance, and is also in contact with the n layer or the p layer, and a Schottky diode is formed between the anode electrode and the n layer or the p layer.Type: ApplicationFiled: February 1, 2019Publication date: February 25, 2021Inventors: Mutsuhiro MORI, Tomoyuki MIYOSHI, Tomoyasu FURUKAWA, Masaki SHIRAISHI
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Patent number: 10847614Abstract: A semiconductor device including: a semiconductor element; and a first electrode formed on a first surface of the semiconductor element. The first electrode has a stacked structure including a first electroless Ni plating layer. The first electroless Ni plating layer contains nickel (Ni) and phosphorus (P) as a composition. A phosphorus (P) concentration of the first electroless Ni plating layer is 2.5 wt % to 6 wt % inclusive, and a crystallization rate of Ni3P in the first electroless Ni plating layer is 0% to 20% inclusive.Type: GrantFiled: June 24, 2019Date of Patent: November 24, 2020Assignee: Hitachi Power Semiconductor Device, Ltd.Inventors: Tomoyasu Furukawa, Toshiaki Morita, Daisuke Kawase, Toshihito Tabata
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Patent number: 10763346Abstract: Provided is a semiconductor device in which, in a case where a metallic plate (a conductive member) is bonded by being sintered to a semiconductor chip having an IGBT gate structure, an excess stress is less likely to be generated in a gate wiring section of the semiconductor chip even when pressure is applied in a sinter bonding process, so that a characteristic failure is reduced.Type: GrantFiled: December 25, 2017Date of Patent: September 1, 2020Assignee: Hitachi Power Semiconductor Device, Ltd.Inventors: Tomoyasu Furukawa, Masaki Shiraishi, Toshiaki Morita
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Publication number: 20200075722Abstract: A semiconductor device including: a semiconductor element; and a first electrode formed on a first surface of the semiconductor element. The first electrode has a stacked structure including a first electroless Ni plating layer. The first electroless Ni plating layer contains nickel (Ni) and phosphorus (P) as a composition. A phosphorus (P) concentration of the first electroless Ni plating layer is 2.5 wt % to 6 wt % inclusive, and a crystallization rate of Ni3P in the first electroless Ni plating layer is 0% to 20% inclusive.Type: ApplicationFiled: June 24, 2019Publication date: March 5, 2020Inventors: Tomoyasu FURUKAWA, Toshiaki MORITA, Daisuke KAWASE, Toshihito TABATA
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Publication number: 20200006301Abstract: Provided is a semiconductor device in which, in a case where a metallic plate (a conductive member) is bonded by being sintered to a semiconductor chip having an IGBT gate structure, an excess stress is less likely to be generated in a gate wiring section of the semiconductor chip even when pressure is applied in a sinter bonding process, so that a characteristic failure is reduced.Type: ApplicationFiled: December 25, 2017Publication date: January 2, 2020Inventors: Tomoyasu FURUKAWA, Masaki SHIRAISHI, Toshiaki MORITA
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Patent number: 9991336Abstract: An anode electrode and a cathode electrode formed on a silicon semiconductor substrate, p-type layer formed next to the anode electrode, an n-type layer formed next to the cathode electrode by a V-group element being diffused, an n? layer formed between the p-type layer and the n-type layer, and an n-buffer layer formed between the n? layer and the n-type layer and containing oxygen are provided and an oxygen concentration in an area of a width of at least 30 ?m from a surface on a side of the n-type layer of the cathode electrode toward the anode electrode is set to 1×1017 cm?3 or more and also the oxygen concentration of the n? layer in a position in contact with the p-type layer is set to less than 3×1017 cm?3.Type: GrantFiled: September 5, 2017Date of Patent: June 5, 2018Assignee: Hitachi Power Semiconductor Device Ltd.Inventors: Masatoshi Wakagi, Taiga Arai, Mutsuhiro Mori, Tomoyasu Furukawa
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Publication number: 20180090564Abstract: An anode electrode and a cathode electrode formed on a silicon semiconductor substrate, p-type layer formed next to the anode electrode, an n-type layer formed next to the cathode electrode by a V-group element being diffused, an n? layer formed between the p-type layer and the n-type layer, and an n-buffer layer formed between the n? layer and the n-type layer and containing oxygen are provided and an oxygen concentration in an area of a width of at least 30 ?m from a surface on a side of the n-type layer of the cathode electrode toward the anode electrode is set to 1×1017 cm?3 or more and also the oxygen concentration of the n? layer in a position in contact with the p-type layer is set to less than 3×1017 cm?3.Type: ApplicationFiled: September 5, 2017Publication date: March 29, 2018Applicant: HITACHI POWER SEMICONDUCTOR DEVICE, LTD.Inventors: Masatoshi WAKAGI, Taiga ARAI, Mutsuhiro MORI, Tomoyasu FURUKAWA
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Publication number: 20160254761Abstract: A semiconductor device includes a semiconductor substrate in which a semiconductor element is formed, an electrode structure of a first semiconductor chip which is provided on a first surface of an n+-type semiconductor layer of the semiconductor substrate to be electrically connected to the semiconductor element and in which a first Al metal layer composed of Al or Al alloy, a Cu diffusion-prevention layer, a second Al metal layer composed of Al or Al alloy, and a Ni layer are formed in this order, and a conductive member which is bonded to the electrode structure of the first semiconductor chip via a sintered copper layer disposed on a surface of the Ni layer. In this semiconductor device, a crystal plane orientation of Al crystal grains on a surface of the second Al metal layer is principally on (110) plane.Type: ApplicationFiled: February 24, 2016Publication date: September 1, 2016Inventors: Tomoyasu FURUKAWA, Masaki SHIRAISHI, Hiroshi NAKANO, Toshiaki MORITA
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Patent number: 9117724Abstract: A solid-state image sensing device is configured such that a first voltage is applied to a first conductivity type semiconductor region and a second voltage is applied to source-drain regions having a second conductivity type of the MOS capacitance to apply inverse bias between the semiconductor region and the source-drain regions of the MOS capacitance.Type: GrantFiled: March 19, 2015Date of Patent: August 25, 2015Assignee: Hitachi, Ltd.Inventors: Tomoyasu Furukawa, Tomohiro Saito, Yusuke Nonaka
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Patent number: 9093349Abstract: In a region of a weak internal electric field, photocharges generated in a region deeper than the photodiode are diffused laterally to lower the sensitivity by photoelectrons flowing into adjacent pixels, etc (crosstalk). An anti-crosstalk layer is disposed in the photodiode forming portion, and between a pixel region and a peripheral circuit region. Crosstalk between a pixel and a pixel or between a pixel region and a peripheral circuit region is decreased to improve the photosensitivity.Type: GrantFiled: July 12, 2012Date of Patent: July 28, 2015Assignee: Hitachi, Ltd.Inventors: Tomoyasu Furukawa, Satoshi Sakai, Yusuke Nonaka, Shinya Sugino
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Publication number: 20150194458Abstract: A solid-state image sensing device is configured such that a first voltage is applied to a first conductivity type semiconductor region and a second voltage is applied to source-drain regions having a second conductivity type of the MOS capacitance to apply inverse bias between the semiconductor region and the source-drain regions of the MOS capacitance.Type: ApplicationFiled: March 19, 2015Publication date: July 9, 2015Inventors: Tomoyasu Furukawa, Tomohiro Saito, Yusuke Nonaka
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Patent number: 8405178Abstract: In a solid-state image sensor device, the efficiency of light collection to a light-receiving region of a photodiode PD through a microlens is enhanced by arranging a wiring line configuration. Each of the first metal layer and the second metal layer is arranged to have a ring-like portion formed along a profile of the light-receiving region of the photodiode PD in a fashion that an upper position over the photodiode PD is surrounded by the first and second metal layers and a third metal layer.Type: GrantFiled: July 23, 2010Date of Patent: March 26, 2013Assignee: Hitachi, Ltd.Inventors: Shinya Sugino, Satoshi Sakai, Yusuke Nonaka, Tomohiro Saito, Tomoyasu Furukawa, Hiroyuki Hayashi
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Publication number: 20130049156Abstract: In a region of a weak internal electric field, photocharges generated in a region deeper than the photodiode are diffused laterally to lower the sensitivity by photoelectrons flowing into adjacent pixels, etc (crosstalk). An anti-crosstalk layer is disposed in the photodiode forming portion, and between a pixel region and a peripheral circuit region. Crosstalk between a pixel and a pixel or between a pixel region and a peripheral circuit region is decreased to improve the photosensitivity.Type: ApplicationFiled: July 12, 2012Publication date: February 28, 2013Inventors: Tomoyasu FURUKAWA, Satoshi Sakai, Yusuke Nonaka, Shinya Sugino