Abstract: A semiconductor device according to the present invention includes: an insulating layer; a semiconductor layer of a first conductive type laminated on the insulating layer; an annular deep trench having a thickness reaching the insulating layer from a top surface of the semiconductor layer; a body region of a second conductive type formed across an entire thickness of the semiconductor layer along a side surface of the deep trench in an element forming region surrounded by the deep trench; a drift region of the first conductive type constituted of a remainder region besides the body region in the element forming region; a source region of the first conductive type formed in a top layer portion of the body region; a drain region of the first conductive type formed in a top layer portion of the drift region; and a first conductive type region formed in the drift region, having a deepest portion reaching a position deeper than the drain region, and having a first conductive type impurity concentration higher tha

Abstract: A semiconductor device according to the present invention includes: an insulating layer; a semiconductor layer of a first conductive type laminated on the insulating layer; an annular deep trench having a thickness reaching the insulating layer from a top surface of the semiconductor layer; a body region of a second conductive type formed across an entire thickness of the semiconductor layer along a side surface of the deep trench in an element forming region surrounded by the deep trench; a drift region of the first conductive type constituted of a remainder region besides the body region in the element forming region; a source region of the first conductive type formed in a top layer portion of the body region; a drain region of the first conductive type formed in a top layer portion of the drift region; and a first conductive type region formed in the drift region, having a deepest portion reaching a position deeper than the drain region, and having a first conductive type impurity concentration higher tha

Abstract: A semiconductor device according to the present invention includes: an insulating layer; a semiconductor layer of a first conductive type laminated on the insulating layer; an annular deep trench having a thickness reaching the insulating layer from a top surface of the semiconductor layer; a body region of a second conductive type formed across an entire thickness of the semiconductor layer along a side surface of the deep trench in an element forming region surrounded by the deep trench; a drift region of the first conductive type constituted of a remainder region besides the body region in the element forming region; a source region of the first conductive type formed in a top layer portion of the body region; a drain region of the first conductive type formed in a top layer portion of the drift region; and a first conductive type region formed in the drift region, having a deepest portion reaching a position deeper than the drain region, and having a first conductive type impurity concentration higher tha

Abstract: A semiconductor device according to the present invention includes: a semiconductor layer of a first conductivity type; an annular deep trench penetrating the semiconductor layer in the depth direction to surround an element forming region; a drain region of a second conductivity type formed in a surface layer portion of the semiconductor layer in the element forming region; a drift region of the second conductivity type formed in the surface layer portion of the semiconductor layer to come into contact with the drain region in the element forming region; a body region of the first conductivity type formed in the surface layer portion of the semiconductor layer at an interval from the drift region in the element forming region; a source region of the second conductivity type formed in a surface layer portion of the body region; and a first high-concentration buried region, formed in the semiconductor layer between a portion opposed to the source region in the depth direction and the deep trench, having a high

Abstract: A semiconductor device according to the present invention includes: a semiconductor layer of a first conductivity type; an annular deep trench penetrating the semiconductor layer in the depth direction to surround an element forming region; a drain region of a second conductivity type formed in a surface layer portion of the semiconductor layer in the element forming region; a drift region of the second conductivity type formed in the surface layer portion of the semiconductor layer to come into contact with the drain region in the element forming region; a body region of the first conductivity type formed in the surface layer portion of the semiconductor layer at an interval from the drift region in the element forming region; a source region of the second conductivity type formed in a surface layer portion of the body region; and a first high-concentration buried region, formed in the semiconductor layer between a portion opposed to the source region in the depth direction and the deep trench, having a high

Abstract: A semiconductor device according to the present invention includes: an insulating layer; a semiconductor layer of a first conductive type laminated on the insulating layer; an annular deep trench having a thickness reaching the insulating layer from a top surface of the semiconductor layer; a body region of a second conductive type formed across an entire thickness of the semiconductor layer along a side surface of the deep trench in an element forming region surrounded by the deep trench; a drift region of the first conductive type constituted of a remainder region besides the body region in the element forming region; a source region of the first conductive type formed in a top layer portion of the body region; a drain region of the first conductive type formed in a top layer portion of the drift region; and a first conductive type region formed in the drift region, having a deepest portion reaching a position deeper than the drain region, and having a first conductive type impurity concentration higher tha