Patents by Inventor Tomoyuki Furuhata
Tomoyuki Furuhata has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10319656Abstract: A semiconductor device includes a semiconductor substrate, an analog circuit block including an active element arranged in the semiconductor substrate, a metal layer having a slit or a plurality of metal interconnects arranged in parallel, positioned above the analog circuit block, and a resin layer containing a filler, positioned above at least the metal layer or the plurality of metal interconnects. In the case of forming a semiconductor device by sealing a semiconductor chip with resin having a filler mixed therein, according to this semiconductor device, it is possible to suppress lowering of the level of precision of the electric characteristics of the analog circuit, and a variation in the characteristics or a change in the characteristics, in a mold packaging process, without using special materials or production methods.Type: GrantFiled: September 7, 2016Date of Patent: June 11, 2019Assignee: SEIKO EPSON CORPORATIONInventor: Tomoyuki Furuhata
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Patent number: 9997625Abstract: A semiconductor device includes: a body region of a second conductivity type formed in a semiconductor layer of a first conductivity type in a semiconductor substrate; a gate electrode facing the body region via a gate insulating film; a source region of the first conductivity type formed in the body region, on a first side of the gate electrode; a drain region of the first conductivity type formed in the semiconductor substrate such that a field oxide film is disposed between the drain region and a second side of the gate electrode; and an impurity diffusion region of the first conductivity type having, at least in a partial region thereof between the drain region and the body region, an impurity concentration distribution in which a concentration of impurities becomes higher in accordance with a depth from a main face of the semiconductor substrate.Type: GrantFiled: August 4, 2015Date of Patent: June 12, 2018Assignee: SEIKO EPSON CORPORATIONInventor: Tomoyuki Furuhata
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Publication number: 20170069557Abstract: A semiconductor device includes a semiconductor substrate, an analog circuit block including an active element arranged in the semiconductor substrate, a metal layer having a slit or a plurality of metal interconnects arranged in parallel, positioned above the analog circuit block, and a resin layer containing a filler, positioned above at least the metal layer or the plurality of metal interconnects. In the case of forming a semiconductor device by sealing a semiconductor chip with resin having a filler mixed therein, according to this semiconductor device, it is possible to suppress lowering of the level of precision of the electric characteristics of the analog circuit, and a variation in the characteristics or a change in the characteristics, in a mold packaging process, without using special materials or production methods.Type: ApplicationFiled: September 7, 2016Publication date: March 9, 2017Applicant: SEIKO EPSON CORPORATIONInventor: Tomoyuki FURUHATA
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Patent number: 9412738Abstract: A semiconductor device includes a semiconductor substrate of a first conductivity type, an impurity layer of a second conductivity type provided within the semiconductor substrate, an impurity region of the second conductivity type that is connected, within the semiconductor substrate, to the impurity layer, and separates a first region of the semiconductor substrate from a second region by surrounding the first region of the semiconductor substrate together with the impurity layer, a first well and second well of the second conductivity type that are provided on the impurity layer via at least a semiconductor layer of the first conductivity type, and a plurality of transistors provided to the semiconductor substrate.Type: GrantFiled: April 2, 2015Date of Patent: August 9, 2016Assignee: SEIKO EPSON CORPORATIONInventor: Tomoyuki Furuhata
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Patent number: 9397171Abstract: A semiconductor device according to the invention includes an epitaxial layer of a first conductivity type, a first well of a second conductivity type to which a first potential is applied, a second well of the second conductivity type to which a second potential that differs from the first potential is applied, a third well of the first conductivity type provided in the epitaxial layer between the first well and the second well, a first impurity region of the first conductivity type provided in the epitaxial layer under the first well, a first MOS transistor provided in the first well, a second MOS transistor provided in the second well, and a third MOS transistor provided in the third well, the first impurity region having a higher impurity concentration than the epitaxial layer.Type: GrantFiled: February 23, 2015Date of Patent: July 19, 2016Assignee: SEIKO EPSON CORPORATIONInventor: Tomoyuki Furuhata
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Publication number: 20160064553Abstract: A semiconductor device includes: a body region of a second conductivity type formed in a semiconductor layer of a first conductivity type in a semiconductor substrate; a gate electrode facing the body region via a gate insulating film; a source region of the first conductivity type formed in the body region, on a first side of the gate electrode; a drain region of the first conductivity type formed in the semiconductor substrate such that a field oxide film is disposed between the drain region and a second side of the gate electrode; and an impurity diffusion region of the first conductivity type having, at least in a partial region thereof between the drain region and the body region, an impurity concentration distribution in which a concentration of impurities becomes higher in accordance with a depth from a main face of the semiconductor substrate.Type: ApplicationFiled: August 4, 2015Publication date: March 3, 2016Inventor: Tomoyuki FURUHATA
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Patent number: 9190477Abstract: A semiconductor device includes: a semiconductor substrate including a first surface; a body region positioned in the semiconductor substrate and positioned to be in contact with the first surface; a gate insulating film positioned to be in contact with the body region on the first surface; a gate electrode positioned on the gate insulating film; a first insulator film covering at least a portion of a side surface of the gate electrode; a contact region positioned to be in contact with the first surface at a position different from that of the gate electrode, in a plan view relative to the first surface, in the body region; and a second insulator film including a material different from that of the first insulator film, positioned on the body region, the gate electrode, and the first insulator film, and including a contact hole on the contact region.Type: GrantFiled: April 11, 2014Date of Patent: November 17, 2015Assignee: SEIKO EPSON CORPORATIONInventor: Tomoyuki Furuhata
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Publication number: 20150287719Abstract: A semiconductor device includes a semiconductor substrate of a first conductivity type, an impurity layer of a second conductivity type provided within the semiconductor substrate, an impurity region of the second conductivity type that is connected, within the semiconductor substrate, to the impurity layer, and separates a first region of the semiconductor substrate from a second region by surrounding the first region of the semiconductor substrate together with the impurity layer, a first well and second well of the second conductivity type that are provided on the impurity layer via at least a semiconductor layer of the first conductivity type, and a plurality of transistors provided to the semiconductor substrate.Type: ApplicationFiled: April 2, 2015Publication date: October 8, 2015Inventor: Tomoyuki FURUHATA
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Publication number: 20150243741Abstract: A semiconductor device according to the invention includes an epitaxial layer of a first conductivity type, a first well of a second conductivity type to which a first potential is applied, a second well of the second conductivity type to which a second potential that differs from the first potential is applied, a third well of the first conductivity type provided in the epitaxial layer between the first well and the second well, a first impurity region of the first conductivity type provided in the epitaxial layer under the first well, a first MOS transistor provided in the first well, a second MOS transistor provided in the second well, and a third MOS transistor provided in the third well, the first impurity region having a higher impurity concentration than the epitaxial layer.Type: ApplicationFiled: February 23, 2015Publication date: August 27, 2015Inventor: Tomoyuki FURUHATA
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Patent number: 9012312Abstract: A semiconductor device manufacturing method includes (a) forming a buried diffusion layer of a first conductivity type in a semiconductor substrate of a second conductivity type, (b) forming a first impurity region by implanting an impurity of the first conductivity type, (c) diffusing the buried diffusion layer and the first impurity region to an extent that the buried diffusion layer and the first impurity region are not connected by performing a first thermal process on the semiconductor substrate, (d) forming a second impurity region by implanting an impurity of the first conductivity type at a concentration higher than that of in step (b), and (e) diffusing the buried diffusion layer, the first impurity region, and the second impurity region by performing a second thermal process on the semiconductor substrate.Type: GrantFiled: March 4, 2014Date of Patent: April 21, 2015Assignee: Seiko Epson CorporationInventor: Tomoyuki Furuhata
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Publication number: 20140312415Abstract: A semiconductor device includes: a semiconductor substrate including a first surface; a body region positioned in the semiconductor substrate and positioned to be in contact with the first surface; a gate insulating film positioned to be in contact with the body region on the first surface; a gate electrode positioned on the gate insulating film; a first insulator film covering at least a portion of a side surface of the gate electrode; a contact region positioned to be in contact with the first surface at a position different from that of the gate electrode, in a plan view relative to the first surface, in the body region; and a second insulator film including a material different from that of the first insulator film, positioned on the body region, the gate electrode, and the first insulator film, and including a contact hole on the contact region.Type: ApplicationFiled: April 11, 2014Publication date: October 23, 2014Applicant: SEIKO EPSON CORPORATIONInventor: Tomoyuki FURUHATA
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Publication number: 20140287573Abstract: A semiconductor device manufacturing method includes (a) forming a buried diffusion layer of a first conductivity type in a semiconductor substrate of a second conductivity type, (b) forming a first impurity region by implanting an impurity of the first conductivity type, (c) diffusing the buried diffusion layer and the first impurity region to an extent that the buried diffusion layer and the first impurity region are not connected by performing a first thermal process on the semiconductor substrate, (d) forming a second impurity region by implanting an impurity of the first conductivity type at a concentration higher than that of in step (b), and (e) diffusing the buried diffusion layer, the first impurity region, and the second impurity region by performing a second thermal process on the semiconductor substrate.Type: ApplicationFiled: March 4, 2014Publication date: September 25, 2014Applicant: SEIKO EPSON CORPORATIONInventor: Tomoyuki FURUHATA
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Patent number: 8330219Abstract: A semiconductor device includes: a semiconductor substrate having a first conductivity type; a well having a second conductivity type and provided inside the semiconductor substrate; a first impurity region having the first conductivity type and provided within the well; a second impurity region having the second conductivity type, provided inside the well and away from the first impurity region; and a third impurity region having a first conductivity type, provided surrounding the well and away from the second impurity region. In this semiconductor device, the well is formed to be deeper than the first impurity region, the second impurity region, and the third impurity region, in a thickness direction of the semiconductor substrate; and a minimum distance between the first impurity region and the second impurity region is smaller than a minimum distance between the second impurity region and the third impurity region.Type: GrantFiled: June 25, 2009Date of Patent: December 11, 2012Assignee: Seiko Epson CorporationInventors: Tomoyuki Furuhata, Hideyuki Akanuma, Hiroaki Nitta
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Patent number: 7972917Abstract: A method for manufacturing a semiconductor device is disclosed. The method includes: forming a LDMOS region, an offset drain MOS region, and a CMOS region; simultaneously forming a first well in the LDMOS region and the offset drain MOS region; simultaneously forming a second well in the first well of the LDMOS region and the CMOS region; and forming a second well in the CMOS region, wherein a depth of the first well is larger than a depth of the second well and the second well is a retrograde well formed by a high energy ion implantation method.Type: GrantFiled: June 25, 2009Date of Patent: July 5, 2011Assignee: Seiko Epson CorporationInventors: Tomoyuki Furuhata, Hideyuki Akanuma, Hiroaki Nitta
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Publication number: 20100001345Abstract: A semiconductor device includes: a semiconductor substrate having a first conductivity type; a well having a second conductivity type and provided inside the semiconductor substrate; a first impurity region having the first conductivity type and provided within the well; a second impurity region having the second conductivity type, provided inside the well and away from the first impurity region; and a third impurity region having a first conductivity type, provided surrounding the well and away from the second impurity region. In this semiconductor device, the well is formed to be deeper than the first impurity region, the second impurity region, and the third impurity region, in a thickness direction of the semiconductor substrate; and a minimum distance between the first impurity region and the second impurity region is smaller than a minimum distance between the second impurity region and the third impurity region.Type: ApplicationFiled: June 25, 2009Publication date: January 7, 2010Applicant: SEIKO EPSON CORPORATIONInventors: Tomoyuki Furuhata, Hideyuki Akanuma, Hiroaki Nitta
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Publication number: 20100001342Abstract: A method for manufacturing a semiconductor device is disclosed. The method includes: forming a LDMOS region, an offset drain MOS region, and a CMOS region; simultaneously forming a first well in the LDMOS region and the offset drain MOS region; simultaneously forming a second well in the first well of the LDMOS region and the CMOS region; and forming a second well in the CMOS region, wherein a depth of the first well is larger than a depth of the second well and the second well is a retrograde well formed by a high energy ion implantation method.Type: ApplicationFiled: June 25, 2009Publication date: January 7, 2010Applicant: SEIKO EPSON CORPORATIONInventors: Tomoyuki Furuhata, Hideyuki Akanuma, Hiroaki Nitta
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Patent number: 7163861Abstract: Certain embodiments include a semiconductor device capable of preventing a retardation of signal transmission between the smallest units, a method for the manufacture thereof, a circuit substrate and an electronic device. Embodiments also include a manufacturing method comprising a laminating step of forming tunnel insulating films 12 and 22, floating gates 14 and 24, dielectric films 16 and 26, control gates 18 and 28 on first and second memory cell areas 10 and 20 formed mutually adjacent to each other on a semiconductor substrate 30, a plurality of impurity area formation steps of forming sources and drains 32, 34, 36 and 38 on the first and second memory cell areas 10 and 20, and forming a connecting area 40 capable of forming an electric connection between one 32 of the source and drain of the first memory cell area 10 and one 36 of the source and drain of the second memory cell area 20.Type: GrantFiled: August 2, 2004Date of Patent: January 16, 2007Assignee: Seiko Epson CorporationInventor: Tomoyuki Furuhata
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Semiconductor devices having a non-volatile memory transistor and methods for manufacturing the same
Patent number: 7026685Abstract: Semiconductor devices including a non-volatile memory transistor and methods for manufacturing such semiconductor devices are described. One semiconductor device may include a silicon substrate 10, a floating gate 22 disposed above the silicon substrate 10 through a first dielectric layer 20, a second dielectric layer 26 that contacts at least a part of the floating gate 22, a control gate 28 formed over the second dielectric layer 26, and a source region 14 and a drain region 16 formed in the silicon substrate 10. A wiring layer 40 is provided above the floating gate 22, and the entirety of the floating gate 22 is overlapped by the wiring layer 40 as viewed in a plan view.Type: GrantFiled: June 21, 2004Date of Patent: April 11, 2006Assignee: Seiko Epson CorporationInventor: Tomoyuki Furuhata -
Patent number: 6921964Abstract: A semiconductor device includes a non-volatile memory transistor 100. An interlayer dielectric layer 40 is provided on a semiconductor layer 10 where the non-volatile memory transistor 100 is formed. The interlayer dielectric layer 40 is an insulation layer for electrically isolating a conductive layer 30 formed over the semiconductor layer 10 from the non-volatile memory transistor, and includes a layer 42 containing nitride.Type: GrantFiled: February 7, 2002Date of Patent: July 26, 2005Assignee: Seiko Epson CorporationInventors: Tomoyuki Furuhata, Kotaro Misawa
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Semiconductor devices having a non-volatile memory transistor and methods for manufacturing the same
Publication number: 20050023598Abstract: Semiconductor devices including a non-volatile memory transistor and methods for manufacturing such semiconductor devices are described. One semiconductor device may include a silicon substrate 10, a floating gate 22 disposed above the silicon substrate 10 through a first dielectric layer 20, a second dielectric layer 26 that contacts at least a part of the floating gate 22, a control gate 28 formed over the second dielectric layer 26, and a source region 14 and a drain region 16 formed in the silicon substrate 10. A wiring layer 40 is provided above the floating gate 22, and the entirety of the floating gate 22 is overlapped by the wiring layer 40 as viewed in a plan view.Type: ApplicationFiled: June 21, 2004Publication date: February 3, 2005Inventor: Tomoyuki Furuhata