Abstract: Described herein is a technique capable of detecting a substrate state without contacting the substrate. According to one aspect of the technique, there is provided (a) loading a substrate retainer, where a plurality of substrates is placed, into a reaction tube; (b) processing the plurality of the substrates by supplying a gas into the reaction tube; (c) unloading the substrate retainer out of the reaction tube after the plurality of the substrates is processed; and (d) detecting the plurality of the substrates placed on the substrate retainer after the substrate retainer is rotated by a first angle with respect to a transferable position, wherein the plurality of the substrates is transferable to/from the substrate retainer in the transferable position.

Abstract: According to the present disclosure, there is provided a technique capable of improving a throughput and suppressing an oxidation of a surface of a substrate and an adhesion of particles to the surface of the substrate. According to one aspect thereof, there is provided a substrate processing apparatus including: a plurality of process chambers; a transfer chamber provided adjacent to the plurality of process chambers and maintained in a decompressed state; a waiting chamber capable of communicating with the transfer chamber in the decompressed state, provided with a plurality of supports capable of supporting a plurality of substrates after a process set for a first process chamber among the plurality of process chambers is completed, and configured such that an inert gas is supplied for every predetermined number of substrates among the plurality of substrates respectively supported by the plurality of supports.

Abstract: There is provided a configuration that includes a substrate holder configured to hold substrates; a transfer mechanism configured to transfer the substrates to the substrate holder; and a controller configured to: acquire a number of substrates mountable on the substrate holder and a number of the product substrates to be mounted on the substrate holder; divide the product substrates into product substrate groups; divide the dummy substrates into dummy substrate groups based on the number of the product substrates, the number of the substrates mountable on the substrate holder, and a number of the product substrate groups; combine the product substrate groups and the dummy substrate groups; create substrate arrangement data for distributing and mounting the product substrates on the substrate holder; and cause the transfer mechanism to transfer the substrates according to the substrate arrangement data.

Abstract: Described herein is a technique capable of detecting a substrate state without contacting the substrate. According to one aspect of the technique, there is provided (a) loading a substrate retainer, where a plurality of substrates is placed, into a reaction tube; (b) processing the plurality of the substrates by supplying a gas into the reaction tube; (c) unloading the substrate retainer out of the reaction tube after the plurality of the substrates is processed; and (d) detecting the plurality of the substrates placed on the substrate retainer after the substrate retainer is rotated by a first angle with respect to a transferable position, wherein the plurality of the substrates is transferable to/from the substrate retainer in the transferable position.

Abstract: Described herein is a technique capable of detecting a substrate state without contacting the substrate. According to one aspect of the technique, there is provided (a) loading a substrate retainer, where a plurality of substrates is placed, into a reaction tube; (b) processing the plurality of the substrates by supplying a gas into the reaction tube; (c) unloading the substrate retainer out of the reaction tube after the plurality of the substrates is processed; and (d) detecting the plurality of the substrates placed on the substrate retainer after the substrate retainer is rotated by a first angle with respect to a transferable position, wherein the plurality of the substrates is transferable to/from the substrate retainer in the transferable position.

Abstract: Described herein is a technique capable of detecting a substrate state without contacting the substrate. According to one aspect of the technique, there is provided (a) loading a substrate retainer, where a plurality of substrates is placed, into a reaction tube; (b) processing the plurality of the substrates by supplying a gas into the reaction tube; (c) unloading the substrate retainer out of the reaction tube after the plurality of the substrates is processed; and (d) detecting the plurality of the substrates placed on the substrate retainer after the substrate retainer is rotated by a first angle with respect to a transferable position, wherein the plurality of the substrates is transferable to/from the substrate retainer in the transferable position.

Abstract: There is provided a configuration that includes a substrate holder configured to hold substrates; a transfer mechanism configured to transfer the substrates to the substrate holder; and a controller configured to: acquire a number of substrates mountable on the substrate holder and a number of the product substrates to be mounted on the substrate holder; divide the product substrates into product substrate groups; divide the dummy substrates into dummy substrate groups based on the number of the product substrates, the number of the substrates mountable on the substrate holder, and a number of the product substrate groups; combine the product substrate groups and the dummy substrate groups; create substrate arrangement data for distributing and mounting the product substrates on the substrate holder; and cause the transfer mechanism to transfer the substrates according to the substrate arrangement data.

Abstract: Described herein is a technique capable of detecting a substrate state without contacting the substrate. According to one aspect of the technique, there is provided (a) loading a substrate retainer, where a plurality of substrates is placed, into a reaction tube; (b) processing the plurality of the substrates by supplying a gas into the reaction tube; (c) unloading the substrate retainer out of the reaction tube after the plurality of the substrates is processed; and (d) detecting the plurality of the substrates placed on the substrate retainer after the substrate retainer is rotated by a first angle with respect to a transferable position, wherein the plurality of the substrates is transferable to/from the substrate retainer in the transferable position.

Abstract: Image data pertaining to substrate transfer is efficiently collected and stored for use in analyzing transfer errors. A substrate processing device includes a first control part for stopping a transfer part upon detecting a transfer error in the transfer part for transferring a substrate; a storage part for storing substrate transfer operations of the transfer part as image data; and a second control part for accumulating the image data in an accumulation part at a predetermined period. The first control part obtains information indicating a state of the substrate from the transfer part or a processing part, and notifies the second control part that the transfer part is stopped due to the transfer error. The second control part retrieves image data of a predetermined period of time including the time that the transfer error occurs from the accumulation part, and converts the image data into a file.

Abstract: Image data pertaining to substrate transfer is efficiently collected and stored for use in analyzing transfer errors. A substrate processing device includes a first control part for stopping a transfer part upon detecting a transfer error in the transfer part for transferring a substrate; a storage part for storing substrate transfer operations of the transfer part as image data; and a second control part for accumulating the image data in an accumulation part at a predetermined period. The first control part obtains information indicating a state of the substrate from the transfer part or a processing part, and notifies the second control part that the transfer part is stopped due to the transfer error. The second control part retrieves image data of a predetermined period of time including the time that the transfer error occurs from the accumulation part, and converts the image data into a file.