Abstract: A sterilizing method for sterilizing a sterilization object housed in a chamber 11 includes an ozone preparation step S504 for filling an inside of a buffer tank 34 with ozone gas, and an ozone injection step S505 for injecting the ozone gas filled in the inside of the buffer tank 34 into the chamber 11.

Abstract: A sterilizing method for sterilizing a sterilization object housed in a chamber 11 includes a first vapor injection step S502 for injecting vapor produced from a first aqueous solution of hydrogen peroxide to an inside of the chamber 11, an ozone injection step S505 for injecting ozone gas to the inside of the chamber 11 after the first vapor injection step S502, and a second vapor injection step S507 for injecting vapor produced from a second aqueous solution of hydrogen peroxide to the inside of the chamber 11 after the ozone injection step S505. A total amount of the hydrogen peroxide included in the second aqueous solution is smaller than or equal to a total amount of the hydrogen peroxide included in the first aqueous solution.

Abstract: A sterilizing method includes a preliminary decompression step (S200) of decompressing the inside of a chamber (11) with respect to an atmospheric pressure after a sterilization object wrapped with a wrapping member made from a material that absorbs ozone gas and hydrogen peroxide is housed in the chamber (11), an ozone adsorption step (S300) of injecting ozone gas to the inside of the chamber (11) under a decompressed state achieved in the preliminary decompression step (S200) to cause the ozone gas to be adsorbed to the wrapping member, and a sterilization step (S500) of sterilizing the sterilization object using the zone gas and hydrogen peroxide after the ozone adsorption step (S300).

Abstract: A sterilizing method for sterilizing a sterilization object housed in a chamber (11) includes a first vapor injection step (S502) of injecting vapor produced from an aqueous solution of hydrogen peroxide to an inside of the chamber (11), an ozone injection step (S505) of injecting ozone gas to the inside of the chamber (11) after the first vapor injection step (S502), and a second vapor injection step (S507) of injecting vapor produced from water or vapor produced from a solution containing a volatile component to the inside of the chamber (11) after the ozone injection step (S505).

Abstract: A sterilizing method for sterilizing a sterilization object housed in a chamber 11 includes an ozone preparation step S504 for filling an inside of a buffer tank 34 with ozone gas, and an ozone injection step S505 for injecting the ozone gas filled in the inside of the buffer tank 34 into the chamber 11.

Abstract: A sterilizing method for sterilizing a sterilization object housed in a chamber 11 includes a first vapor injection step S502 for injecting vapor produced from a first aqueous solution of hydrogen peroxide to an inside of the chamber 11, an ozone injection step S505 for injecting ozone gas to the inside of the chamber 11 after the first vapor injection step S502, and a second vapor injection step S507 for injecting vapor produced from a second aqueous solution of hydrogen peroxide to the inside of the chamber 11 after the ozone injection step S505. A total amount of the hydrogen peroxide included in the second aqueous solution is smaller than or equal to a total amount of the hydrogen peroxide included in the first aqueous solution.