Patents by Inventor Tomoyuki Shinohara
Tomoyuki Shinohara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230017418Abstract: An upper holding device holds a substrate in a horizontal attitude without rotating the substrate. A lower holding device rotates a substrate while holding the substrate by suction. A substrate held by the upper holding device is cleaned with use of a cleaning liquid, and a substrate held by the lower holding device is cleaned with use of a cleaning liquid. Gas in a processing space is exhausted by exhaust equipment of a factory through an exhaust system. When a substrate is held by the upper holding device, gas in the processing space is not exhausted or gas in the processing space is exhausted at a first flow rate. Gas in the processing space is exhausted at a second or third flow rate that is higher than the first flow rate when the substrate is held by the lower holding device.Type: ApplicationFiled: July 14, 2022Publication date: January 19, 2023Inventors: Nobuaki OKITA, Junichi ISHII, Kazuki NAKAMURA, Takashi SHINOHARA, Yoshifumi OKADA, Tomoyuki SHINOHARA, Takuma TAKAHASHI
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Publication number: 20230010624Abstract: A substrate alignment device includes first and second support members that are arranged to be opposite to each other and be spaced apart from each other in a plan view, and respectively support an outer peripheral end of a substrate from a position below the substrate. Further, the substrate alignment device includes a first pressing member that is arranged to be opposite to the first support member in a plan view, and moves the substrate by pressing one portion of the outer peripheral end of the substrate in a first direction directed from the second support member toward the first support member with the substrate supported by the first and second support members. The first support member includes a movement limiter that limits movement of the substrate in the first direction past a predetermined prescribed position.Type: ApplicationFiled: July 6, 2022Publication date: January 12, 2023Inventors: Nobuaki OKITA, Tomoyuki SHINOHARA, Junichi ISHII, Kazuki NAKAMURA, Takashi SHINOHARA, Takuma TAKAHASHI, Yoshifumi OKADA, Hiroshi KATO
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Publication number: 20230001456Abstract: A cleaner comes into contact with a lower-surface center region of a substrate held by a first holder, so that the lower-surface center region is cleaned. The cleaner comes into contact with a lower-surface outer region of the substrate rotated by a second holder, so that the lower-surface outer region of the substrate is cleaned. During cleaning of the lower-surface center region, the second holder is rotated about a vertical axis while not holding the substrate. Alternatively, during cleaning of the lower-surface center region, the gas injector arranged between the cleaner and the second holder injects gas toward the substrate from a first height spaced apart from the substrate by a predetermined distance. Further, during drying of the lower-surface center region, the gas injector injects gas toward the substrate from a second height closer to the substrate than the first height.Type: ApplicationFiled: June 30, 2022Publication date: January 5, 2023Inventors: Tomoyuki SHINOHARA, Junichi ISHII, Kazuki NAKAMURA, Yoshifumi OKADA, Takuma TAKAHASHI, Takashi SHINOHARA, Nobuaki OKITA
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Publication number: 20220410219Abstract: A lower-surface center region of a substrate held by a first holder is cleaned by a cleaner. A lower-surface outer region of the substrate rotated by a second holder is cleaned by the cleaner. A mobile base provided with the second holder and the cleaner is moved in a horizontal plane such that a reference position of the first holder coincides with a center axis of the second holder in a plan view when the substrate is received and transferred between the first holder and the second holder, and is moved in the horizontal plane such that the cleaner overlaps with the lower-surface center region of the substrate held by the first holder and a center axis of the cleaner coincides with a first portion different from a center of the substrate in the plan view when the lower-surface center region is cleaned.Type: ApplicationFiled: June 17, 2022Publication date: December 29, 2022Inventors: Tomoyuki SHINOHARA, Kazuki NAKAMURA, Yoshifumi OKADA, Takuma TAKAHASHI, Takashi SHINOHARA, Nobuaki OKITA, Junichi ISHII
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Publication number: 20220395866Abstract: A substrate is held in a horizontal attitude by a substrate holder. At a processing position, a lower surface of the substrate held by the substrate holder is cleaned by a lower-surface brush. The lower-surface brush is cleaned by a brush cleaner at a waiting position that overlaps with the substrate held by the substrate holder in an up-and-down direction and is below a processing position. The lower-surface brush is lifted and lowered by a lower-surface brush lifting-lowering driver between the processing position and the waiting position.Type: ApplicationFiled: June 9, 2022Publication date: December 15, 2022Inventors: Kazuki Nakamura, Junichi Ishii, Tomoyuki Shinohara, Takuma Takahashi
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Publication number: 20220395867Abstract: A first cleaner cleans an upper surface of a substrate by scanning above the substrate to pass through a first point in an outer edge of the substrate in a plan view. A second cleaner cleans an outer peripheral end of the substrate by coming into contact with a second point in the outer edge of the substrate in a plan view. A virtual first straight line passing through the first point and the second point and a virtual second straight line passing through a center of the substrate and is parallel to the first straight line are defined. A third cleaner is arranged below the substrate and opposite to the first cleaner and the second cleaner with the second straight line located between the third cleaner, and the first cleaner and the second cleaner, and cleans a lower surface of the substrate.Type: ApplicationFiled: June 9, 2022Publication date: December 15, 2022Inventors: Tomoyuki SHINOHARA, Yoshifumi OKADA, Nobuaki OKITA, Takashi SHINOHARA, Junichi ISHII, Kazuki NAKAMURA, Takuma TAKAHASHI
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Publication number: 20220093420Abstract: A first substrate holder holds an outer peripheral end of a substrate. A second substrate holder holds a lower-surface center region of the substrate by suction at a position farther downward than the first substrate holder. The second substrate holder and the lower-surface brush are provided on a mobile base that is movable in a horizontal direction. The mobile base is moved between a position at which the lower-surface brush is opposite to a lower-surface outer region of the substrate and a position at which the lower-surface brush is opposite to the lower-surface center region of the substrate. The lower-surface center region of the substrate held by the first substrate holder is cleaned. At this time, a height position of the substrate is higher than an upper end portion of a processing cup. The lower-surface outer region of the substrate held by the second substrate holder is cleaned. At this time, a height position of the substrate is lower than the upper end portion of the processing cup.Type: ApplicationFiled: September 15, 2021Publication date: March 24, 2022Inventors: Tomoyuki SHINOHARA, Yoshifumi OKADA, Nobuaki OKITA, Hiroshi KATO, Takashi SHINOHARA
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Publication number: 20220088793Abstract: A substrate processing apparatus includes a substrate processor and a substrate transporter. The substrate processor includes an upper holding device and a lower holding device configured to be capable of holding a substrate. In the substrate processor, the lower holding device is provided below the upper holding device. Therefore, a height position at which a substrate can be held by the upper holding device is different from a height position at which the substrate can be held by the lower holding device. The substrate transporter has first and second hands that hold a substrate. The second hand is located farther downwardly than the first hand. A substrate is received from or transferred to the upper holding device by the first hand. A substrate is received from or transferred to the lower holding device by the second hand.Type: ApplicationFiled: August 18, 2021Publication date: March 24, 2022Inventors: Tomoyuki SHINOHARA, Yoshifumi OKADA, Nobuaki OKITA
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Patent number: 8416581Abstract: An electronic apparatus wiring harness is provided that includes: a fixed-side casing and a moving-side casing, the moving-side casing being provided with a moving-side casing base which is rotatably journalled to the fixed-side casing, and a sliding portion which is provided so as to be slidable on a slide surface provided in the moving-side casing base. The circuit of the sliding portion and the circuit of the fixed-side casing are electrically connected together by an electric wire, which is a wiring harness having a flat cable portion having electric wire bodies arranged in parallel and formed in a tape shape having a jacket strip portion in which a number of the electric wire bodies are bundled; the flat cable portion is arranged in a bent manner so as to form a U shape on the slide surface of the moving-side casing base.Type: GrantFiled: May 7, 2010Date of Patent: April 9, 2013Assignee: Fujikura Ltd.Inventors: Takashi Matsukawa, Yuuki Tanaka, Masako Ito, Tomoyuki Shinohara, Shigeru Ashida, Yasushi Nakagawa
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Patent number: 8169794Abstract: A harness-integrated slide hinge is provided that connects between a plurality of casings having circuits therein while allowing the casings to move relatively. The harness-integrated slide hinge includes: a first sliding plate fitted to the one casing; a second sliding plate fitted to the other casing; a sliding mechanism that connects between the first sliding plate and the second sliding plate while allowing them to move relatively; and a harness that has a plurality of wirings, and connection sections provided on both ends of these wirings, and that is routed between the first sliding plate and the second sliding plate, wherein a wiring lamination section having a plurality of the wirings laminated therein is bent in a U-shape and accommodated in a space section between the first sliding plate and the second sliding plate.Type: GrantFiled: May 7, 2010Date of Patent: May 1, 2012Assignee: Fujikura Ltd.Inventors: Takashi Matsukawa, Yuuki Tanaka, Tomoyuki Shinohara, Shigeru Ashida, Yasushi Nakagawa, Shou Ueda
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Publication number: 20110267798Abstract: A harness for electronic device wiring of the present invention, wherein a portion covered by a jacket in a state where each of the electrical wires is bundled so as to be arranged in parallel with each other forms a flat cable part wound around a rotary shaft so that a parallel direction thereof is perpendicular to the overlapping surface, and a portion which is continuous with the flat cable part and in which each of the electrical wires is exposed forms a jacket strip part which is more distant from the rotary shaft than the flat cable part is.Type: ApplicationFiled: July 14, 2011Publication date: November 3, 2011Applicant: FUJIKURA LTD.Inventors: Shigeru NAKAZAKI, Tomoyuki SHINOHARA
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Patent number: 8039746Abstract: An electrical connector includes a terminal (11) fixed to a connector housing (10). The electrical connector includes a conductor (23) exposed from a covering (22) and having a connection portion connected to a connection portion of the terminal (11). The electrical connector includes a foam element (31) at a predetermined foam ratio located around respective connection portions of the conductor (23) and the terminal (11).Type: GrantFiled: August 8, 2003Date of Patent: October 18, 2011Assignee: Fujikura Ltd.Inventors: Shigeru Ashida, Tomoyuki Shinohara
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Publication number: 20110248892Abstract: A method of manufacturing a film antenna includes: a process of sticking a bonding surface of a bonding sheet to a surface of a metal thin film of a plastic film fitted with metal thin film; a process of forming the antenna circuit part by completely cutting the plastic film fitted with metal thin film in a thickness direction thereof from the bonding surface, and half-cutting the bonding sheet in a thickness direction thereof; a process of peeling away portions of the plastic film fitted with metal thin film around the antenna circuit part; a process of laminating a first flexible plastic film onto the plastic film fitted with metal thin film side; a process of peeling away the bonding sheet; and a process of laminating a second flexible plastic film onto the surface of the metal thin film.Type: ApplicationFiled: June 21, 2011Publication date: October 13, 2011Applicant: FUJIKURA LTD.Inventors: Takashi MATSUKAWA, Yoshinori SATOH, Takashi YOKOUCHI, Kensuke YOSHIDA, Tomoyuki SHINOHARA
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Publication number: 20100214761Abstract: An electronic apparatus wiring harness is provided that includes: a fixed-side casing and a moving-side casing each having a circuit and rotatably journalled by a shaft having a through hole at its center, the moving-side casing being provided with a moving-side casing base which is rotatably journalled to the fixed-side casing, and a sliding portion which is provided so as to be slidable on a slide surface provided in the moving-side casing base. The circuit of the sliding portion and the circuit of the fixed-side casing are electrically connected together by an electric wire. The electric wire is a wiring harness having a flat cable portion in which a number of electric wire bodies are arranged in parallel and which is formed in a tape shape by jackets, and a jacket strip portion in which a number of the electric wire bodies are bundled; the flat cable portion is arranged in a bent manner so as to form a U shape on the slide surface of the moving-side casing base.Type: ApplicationFiled: May 7, 2010Publication date: August 26, 2010Applicant: FUJIKURA LTD.Inventors: Takashi MATSUKAWA, Yuuki TANAKA, Masako ITO, Tomoyuki SHINOHARA, Shigeru ASHIDA, Yasushi NAKAGAWA
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Publication number: 20100214760Abstract: A harness-integrated slide hinge is provided that connects between a plurality of casings having circuits therein while allowing the casings to move relatively. The harness-integrated slide hinge includes: a first sliding plate fitted to the one casing; a second sliding plate fitted to the other casing; a sliding mechanism that connects between the first sliding plate and the second sliding plate while allowing them to move relatively; and a harness that has a plurality of wirings, and connection sections provided on both ends of these wirings, and that is routed between the first sliding plate and the second sliding plate, wherein a wiring lamination section having a plurality of the wirings laminated therein is bent in a U-shape and accommodated in a space section between the first sliding plate and the second sliding plate.Type: ApplicationFiled: May 7, 2010Publication date: August 26, 2010Applicant: Fujikura Ltd.Inventors: Takashi Matsukawa, Yuuki Tanaka, Tomoyuki Shinohara, Shigeru Ashida, Yasushi Nakagawa, Shou Ueda
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Publication number: 20050255741Abstract: An electrical connector includes a terminal (11) fixed to a connector housing (10). The electrical connector includes a conductor (23) exposed from a covering (22) and having a connection portion connected to a connection portion of the terminal (11). The electrical connector includes a foam element (31) at a predetermined foam ratio located around respective connection portions of the conductor (23) and the terminal (11).Type: ApplicationFiled: August 8, 2003Publication date: November 17, 2005Applicant: FUJIKURA, LTD.Inventors: Shigeru Ashida, Tomoyuki Shinohara
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Patent number: 5577320Abstract: The purpose of the present invention is to improve the performance properties of the cable terminal end assembly and to make its configuration compact. A cable having signal wires and a ground wire are arranged laterally in a casing which is provided with a coupling section for coupling to the electrical device. The signal wires and the ground wires are separated by an insulation plate, and extend out from the ends of the cable into the casing. Signal wires and ground wires are bonded, to specific respective contact strips disposed inside the coupling section. The electrical connections inside the casing are molded with molding.Type: GrantFiled: October 4, 1994Date of Patent: November 26, 1996Assignee: Fujikura Ltd.Inventors: Tomoyuki Shinohara, Ken Yasuoka, Shigeru Ashida, Tsuyoshi Hirahara, Koji Ueda, Hideki Zako
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Patent number: 5407509Abstract: Rolls of toilet paper are produced by winding a paper web around each of a plurality of air permeable cylindrical cores each having a fixed, outer diameter while applying a liquid to only a leading portion of each web so that wound webs each having a wet inner portion are formed. After drying the wound webs to integrally bind the inner portion, the core is separated from each of the wound webs.Type: GrantFiled: May 10, 1994Date of Patent: April 18, 1995Assignee: Ishizu Machinery Co., Ltd.Inventors: Noboru Ishizu, Teruo Takahashi, Tomoyuki Shinohara
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Patent number: 5387124Abstract: The purpose of the present invention is to improve the performance properties of the cable terminal end assembly and to make its configuration compact. A cable having signal wires and a ground wire are arranged laterally in a casing which is provided with a coupling section for coupling to the electrical device. The signal wires and the ground wires are separated by an insulation plate, and extend out from the ends of the cable into the casing. Signal wires and ground wires are bonded, to specific respective contact strips disposed inside the coupling section. The electrical connections inside the casing are molded with moulding.Type: GrantFiled: April 22, 1993Date of Patent: February 7, 1995Assignee: Fujikura Ltd.Inventors: Tomoyuki Shinohara, Ken Yasuoka, Shigeru Ashida, Tsuyoshi Hirahara, Koji Ueda, Hideki Zako
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Patent number: 5352319Abstract: Rolls of toilet paper are produced by winding a paper web around each of a plurality of air permeable cylindrical cores each having a fixed, outer diameter while applying a liquid to only a leading portion of each web so that wound webs each having a wet inner portion are formed. After drying the wound webs to integrally bind the inner portion, the core is separated from each of the wound webs.Type: GrantFiled: June 25, 1993Date of Patent: October 4, 1994Assignee: Ishizu Machinery Co., Ltd.Inventors: Noboru Ishizu, Teruo Takahashi, Tomoyuki Shinohara