Patents by Inventor Tomoyuki Yumoto

Tomoyuki Yumoto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pump, pump device, and liquid supply system
    Patent number: 10655619
    Abstract: A stay of a liquid can be suppressed. A pump 100 includes a tube 102, having elasticity, in which a liquid as a target to be delivered flows; a tube housing 104 which covers an outside of the tube 102 and keeps a gas in an inner space V between an outer surface of the tube 102 and the tube housing 104; and an electropneumatic regulator RE configured to supply the gas into the inner space V and discharge the gas from the inner space V.
    Type: Grant
    Filed: October 21, 2015
    Date of Patent: May 19, 2020
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Takashi Sasa, Daisuke Ishimaru, Takahiro Okubo, Tomoyuki Yumoto, Tomohiko Muta
  • Treatment solution supply method, non-transitory computer-readable storage medium, and treatment solution supply apparatus
    Patent number: 10121685
    Abstract: A treatment solution supply method includes: a degassed treatment solution generating step of degassing a treatment solution by a degassing mechanism to generate a degassed treatment solution; a treatment solution storing step of storing the degassed treatment solution in a container; a filter solution-passing step of bringing a downstream side from a filter connected to a downstream side from the container via a treatment solution supply pipe to a negative pressure with respect to a pressure in the container to pass the treatment solution in the container through the filter; and a negative pressure maintaining step of maintaining a state in which the downstream side from the filter is brought to the negative pressure, for a predetermined period, after stopping supply of the treatment solution from the container to the filter.
    Type: Grant
    Filed: March 23, 2016
    Date of Patent: November 6, 2018
    Assignee: Tokyo Electron Limited
    Inventors: Hideo Shite, Kazuhiko Kimura, Tomoyuki Yumoto
  • TREATMENT SOLUTION SUPPLY METHOD, NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM, AND TREATMENT SOLUTION SUPPLY APPARATUS
    Publication number: 20160288032
    Abstract: A treatment solution supply method includes: a degassed treatment solution generating step of degassing a treatment solution by a degassing mechanism to generate a degassed treatment solution; a treatment solution storing step of storing the degassed treatment solution in a container; a filter solution-passing step of bringing a downstream side from a filter connected to a downstream side from the container via a treatment solution supply pipe to a negative pressure with respect to a pressure in the container to pass the treatment solution in the container through the filter; and a negative pressure maintaining step of maintaining a state in which the downstream side from the filter is brought to the negative pressure, for a predetermined period, after stopping supply of the treatment solution from the container to the filter.
    Type: Application
    Filed: March 23, 2016
    Publication date: October 6, 2016
    Inventors: Hideo SHITE, Kazuhiko KIMURA, Tomoyuki YUMOTO
  • PUMP, PUMP DEVICE, AND LIQUID SUPPLY SYSTEM
    Publication number: 20160115952
    Abstract: A stay of a liquid can be suppressed. A pump 100 includes a tube 102, having elasticity, in which a liquid as a target to be delivered flows; a tube housing 104 which covers an outside of the tube 102 and keeps a gas in an inner space V between an outer surface of the tube 102 and the tube housing 104; and an electropneumatic regulator RE configured to supply the gas into the inner space V and discharge the gas from the inner space V.
    Type: Application
    Filed: October 21, 2015
    Publication date: April 28, 2016
    Inventors: Takashi Sasa, Daisuke Ishimaru, Takahiro Okubo, Tomoyuki Yumoto, Tomohiko Muta