Abstract: The present invention discloses an optical measurement and/or inspection device that, in one application, may be used for inspection of semiconductor devices. A method is disclosed for extracting information of a device-under-test for an ellipsometer, comprising the steps: providing a plurality of incoming polarized beams using a plurality of polarizers, where each of the beams being polarized at a designated polarizing angle; using a parabolic reflector to focus said plurality of incoming polarized beams on a spot on a DUT; using a parabolic reflector to collect a plurality of beams reflected from said DUT; and analyzing said collected beams using a plurality of analyzers, wherein each of the analyzers having a designated polarizing angle with respect to its respective polarizer.

Abstract: The present invention is an optical system, comprising: a light source for providing light rays; a combined two or more parabolic reflectors or elliptical reflectors having inner reflecting surfaces, wherein the reflectors sharing a common focal point, and a device-under-test is disposed thereabout the focal point; wherein the collimated light rays coming into the parabolic reflector parallel to the axis of symmetry of each parabolic reflector would be directed to the focal point on the surface of the device-under-test. The reflected light rays from the device-under-test are directed by the other parabolic reflectors along the axes of symmetry of each parabolic reflector and generate information indicative of the device-under-test; wherein the reflected light rays exit the reflector; and a detector for receiving the exited light rays.

Abstract: An optical inspection device of a device-under-test is disclosed, said device comprising a light source, an image rotator, a parabolic reflector, and one or more detectors, wherein said light source provides a light beam traveling through said image rotator and reflecting off said parabolic reflector to a device-under-test and thereby creating diffracted light beams off said device-under-test, and said diffracted light beams reflecting off said parabolic reflector and travels through said image rotator and are received by the detectors.

Abstract: The present invention discloses an optical measurement and/or inspection device that, in one application, may be used for inspection of semiconductor devices. It comprises a light source for providing light rays; a half-parabolic-shaped reflector having an inner reflecting surface, where the reflector having a focal point and an axis of summary, and a device-under-test is disposed thereabout the focal point. The light rays coming into the reflector that is in-parallel with the axis of summary would be directed to the focal point and reflect off said device-under-test and generate information indicative of said device-under-test, and then the reflected light rays exit said reflector. A detector array receives the exited light rays and the light rays can be analyzed to determine the characteristics of the device-under-test.

Abstract: The present invention discloses an optical measurement and/or inspection device that, in one application, may be used for inspection of semiconductor devices. A method is disclosed for extracting information of a device-under-test for an ellipsometer, comprising the steps: providing a plurality of incoming polarized beams using a plurality of polarizers, where each of the beams being polarized at a designated polarizing angle; using a parabolic reflector to focus said plurality of incoming polarized beams on a spot on a DUT; using a parabolic reflector to collect a plurality of beams reflected from said DUT; and analyzing said collected beams using a plurality of analyzers, wherein each of the analyzers having a designated polarizing angle with respect to its respective polarizer.

Abstract: The present invention discloses an optical measurement and/or inspection device that, in one application, may be used for inspection of semiconductor devices. It comprises a light source for providing light rays; a half-parabolic-shaped reflector having an inner reflecting surface, where the reflector having a focal point and an axis of summary, and a device-under-test is disposed thereabout the focal point. The light rays coming into the reflector that is in-parallel with the axis of summary would be directed to the focal point and reflect off said device-under-test and generate information indicative of said device-under-test, and then the reflected light rays exit said reflector. A detector receives the exited light rays and the light rays can be analyzed to determine the characteristics of the device-under-test.

Abstract: A controllable attenuator includes a pair of collimators respectively connected to input and output fibers. A pair of reflection devices are respectively positioned behind the pair of collimators opposite to the corresponding input and output fibers. A U-like light path is defined among the pair of collimators and the pair of reflection devices. A neutral density filter is moveably positioned between the pair of reflection devices wherein a moving direction of the filter is preferably parallel to a longitudinal direction of the pair of collimators. An ND filter position indicator such as a potentiometer, is used to dynamically monitor attenuation setting.

Abstract: Method and apparatus for wavelength control and measurement are disclosed. An optical signal to be measured is tapped off a portion thereof referring to as a source signal. Together with a reference signal, the source signal is coupled to a tunable filter. The frequency response or passing band of the tunable filter is so controlled that one wavelength &lgr;x from the source signal and one wavelength &lgr;rx from the reference signal transmit through. Relying on a band separation filter, the wavelength &lgr;rx is separated from the reference signal and coupled to a gas cell of a known spectrum, a filtered signal of the wavelength &lgr;rx is then coupled to a photo-detector for subsequent electrical measurement. In accordance with the known spectrum, the wavelength &lgr;x can be precisely derived.

Abstract: A controllable attenuator includes a pair of collimators respectively connected to input and output fibers. A pair of reflection devices are respectively positioned behind the pair of collimators opposite to the corresponding input and output fibers. A U-like light path is defined among the pair of collimators and the pair of reflection devices. A neutral density filter is moveably positioned between the pair of reflection devices wherein a moving direction of the filter is preferably parallel to a longitudinal direction of the pair of collimators. An ND filter position indicator such as a potentiometer, is used to dynamically monitor attenuation setting.

Abstract: An optoelectronic tomographic reconstruction system utilizes spacial light modulators in charge couple devices to perform projection iterative reconstruction techniques and simultaneous iterative reconstruction techniques. A back projection processor uses a linear array of analog spacial light modulators in a cylindrical lens, an image detection array, and an image rotator. The image rotator smears a projected image at the same angle as the projection was taken. The back projection processor thus smears the projection back to the image space. An optoelectronic forward projection processor uses an spacial light modulator array, an image rotator, and an image detecting array. A reconstructed image displayed by the spacial light modulator is smeared by the rotator to forward project the reconstructed image on the image detecting array at the same angle as when the measured projection was taken. The forward projection processor thus smears the reconstructed image back into the projection space.

Abstract: An optoelectronic tomographic reconstruction system utilizes spacial light modulators in charge couple devices to perform projection iterative reconstruction techniques and simultaneous iterative reconstruction techniques. A back projection processor uses a linear array of analog spacial light modulators in a cylindrical lens, an image detection array, and an image rotator. The image rotator smears a projected image at the same angle as the projection was taken. The back projection processor thus smears the projection back to the image space. An optoelectronic forward projection processor uses an spacial light modulator array, an image rotator, and an image detecting array. A reconstructed image displayed by the spacial light modulator is smeared by the rotator to forward project the reconstructed image on the image detecting array at the same angle as when the measured projection was taken. The forward projection processor thus smears the reconstructed image back into the projection space.