Patents by Inventor Tonny Shu

Tonny Shu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma chamber with erosion resistive securement screws
    Patent number: 6379491
    Abstract: An apparatus is provided for treating a wafer under fabrication with an erosive plasma, in a contamination controlled environment. The apparatus includes a chamber for containing the wafer to be treated by the plasma, and for isolating the wafer from contaminants external to the chamber during treatment. The chamber also includes one or more plasma erosion resistive screws. Each screw has a shaft secured within the chamber so that the shaft is unexposed to the plasma, and a raised head which is integral with, and made of the same material as, the shaft. The head has a continuous, surface shape with a reduced number of edges so as to reduce the accumulation of charge thereon, thereby resisting erosion by the plasma.
    Type: Grant
    Filed: October 30, 1998
    Date of Patent: April 30, 2002
    Assignees: ProMOS Technologies, Inc., Mosel Vitelic, Inc., Siemens AG
    Inventors: Ray C. Lee, Te-Hsun Pang, Tonny Shu, Birdson Lee