Patents by Inventor Tony E T Liu

Tony E T Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of manufacturing metal-oxide-semiconductor transistor
    Patent number: 7335548
    Abstract: A method of manufacturing a metal-oxide-semiconductor transistor is provided. A substrate having a gate structure thereon is provided. A source/drain extension region is formed in the substrate on each side of the gate structure. Thereafter, a carbon-containing material layer is formed over the substrate and then the carbon-containing material layer is etched back to form spacers on the sidewalls of the gate structure. Finally, a source/drain region is formed in the substrate on each side of the spacer-coated gate structure.
    Type: Grant
    Filed: March 17, 2006
    Date of Patent: February 26, 2008
    Assignee: United Microelectronics Corp.
    Inventors: Yun-Ren Wang, Ying-Wei Yen, Tony E T Liu
  • Method of manufacturing metal-oxide-semiconductor transistor
    Patent number: 7037773
    Abstract: A method of manufacturing a metal-oxide-semiconductor transistor is provided. A substrate having a gate structure thereon is provided. A source/drain extension region is formed in the substrate on each side of the gate structure. Thereafter, a carbon-containing material layer is formed over the substrate and then the carbon-containing material layer is etched back to form spacers on the sidewalls of the gate structure. Finally, a source/drain region is formed in the substrate on each side of the spacer-coated gate structure.
    Type: Grant
    Filed: March 29, 2004
    Date of Patent: May 2, 2006
    Assignee: United Microelectronics Corp.
    Inventors: Yu-Ren Wang, Ying Yen, Tony E T Liu