Abstract: Embodiments of this disclosure include methods of chucking and de-chucking a substrate. A method of chucking a substrate to a surface of an electrostatic chuck includes applying a first voltage to a chucking electrode in the ESC during a chucking time interval, supplying an inert gas at a first pressure to a backside of the substrate during the chucking time interval, applying a second voltage to the chucking electrode in the ESC after the chucking time interval, the second voltage being higher than the first voltage, and supplying the inert gas at a second pressure to the backside of the substrate after the chucking time interval, the second pressure being higher than the first pressure of the inert gas.

Abstract: The disclosure relates to a substrate support assembly for reducing the evacuation time when using argon gas. In one embodiment, a substrate support assembly includes a porous plug within the substrate support assembly. The porous plug includes a first cylindrical section with a first volume and axial length, a second cylindrical section with a second volume and axial length. The first cylindrical section has a larger volume than the second cylindrical section. The first cylindrical section and second cylindrical section have a volume ratio between about 2 and about 12. The first cylindrical section axial length and second cylindrical section axial length have a length ratio between about 2 and about 10.

Abstract: The disclosed embodiments provide an improved monitoring and security system to identify the presence of persons within a premises, to track the relative location of the person as he or she traverse the premises, and to generate an alert and optionally enter a lockdown mode if the person does not possess a pre-registered computing device or wireless transceiver. In the lockdown mode, doors optionally can be shut and locked through remote or local control or automatically if the distance between the person and the particular door falls below a predetermined threshold.

Abstract: Collapsible insulated covers for devices (e.g., fire sprinklers) are contemplated. The collapsible insulated covers have one or more couplers configured to couple a device. The collapsible insulated covers collapse to thereby position the one or more to couple the device. It is contemplated that the collapsible insulated covers can create one or more seals that reduce heat transfer into its interior space (i.e., pocket) where the device or a portion of the device is placed for thermal insulation.

Abstract: The disclosed embodiments provide an improved monitoring and security system to identify the presence of persons within a premises, to track the relative location of the person as he or she traverse the premises, and to generate an alert and optionally enter a lockdown mode if the person does not possess a pre-registered computing device or wireless transceiver. In the lockdown mode, doors optionally can be shut and locked through remote or local control or automatically if the distance between the person and the particular door falls below a predetermined threshold.

Abstract: The disclosed embodiments provide an intelligent control system to monitor the presence, physical location, and identity of computing devices and wireless transceivers within a defined space. That information is routed to a server that facilitates transactions involving physical assets in which the wireless transceivers are installed among persons who are operating the computing devices.

Abstract: Methods, systems, and apparatus, including computer programs encoded on a computer storage medium, for cooperatively controlling ambient level lighting in a controlled area, and task-level lighting for task areas in the controlled area, where each task area is a separate sub-area of the controlled area.

Abstract: Methods, systems, and apparatus, for wirelessly controlling a power supply device that controls a load. A wireless adapter includes a wireless communication device that receives transmissions from a wireless controller, a serial interface for a serial data connection to a power supply processing device integrated in the power supply device, an adapter processing device that receives the control signals the wireless communication device outputs, generates the control commands from the control signals, and outputs the control commands to the serial interface to cause the power supply processing device to control power provided to the load in a manner specified by the control commands, and an adapter power circuit that receives regulated direct current (DC) power from the power supply device and is powered from the regulated DC power received, and provides power to the wireless communication device and the adapter processing device.

Abstract: Methods, systems, and apparatus, for wirelessly controlling a power supply device that controls a load. A wireless adapter includes a wireless communication device that receives transmissions from a wireless controller, a serial interface for a serial data connection to a power supply processing device integrated in the power supply device, an adapter processing device that receives the control signals the wireless communication device outputs, generates the control commands from the control signals, and outputs the control commands to the serial interface to cause the power supply processing device to control power provided to the load in a manner specified by the control commands, and an adapter power circuit that receives regulated direct current (DC) power from the power supply device and is powered from the regulated DC power received, and provides power to the wireless communication device and the adapter processing device.

Abstract: Methods, systems, and apparatus, including computer programs encoded on a computer storage medium, for cooperatively controlling ambient level lighting in a controlled area, and task-level lighting for task areas in the controlled area, where each task area is a separate sub-area of the controlled area.

Abstract: Methods, systems, and apparatus, for wirelessly controlling a power supply device that controls a load. A wireless adapter includes a wireless communication device that receives transmissions from a wireless controller, a serial interface for a serial data connection to a power supply processing device integrated in the power supply device, an adapter processing device that receives the control signals the wireless communication device outputs, generates the control commands from the control signals, and outputs the control commands to the serial interface to cause the power supply processing device to control power provided to the load in a manner specified by the control commands, and an adapter power circuit that receives regulated direct current (DC) power from the power supply device and is powered from the regulated DC power received, and provides power to the wireless communication device and the adapter processing device.

Abstract: Methods, systems, and apparatus, including computer programs encoded on a computer storage medium, for cooperatively controlling ambient level lighting in a controlled area, and task level lighting for task areas in the controlled area, wherein each task area is a separate sub-area of the controlled area.

Abstract: Methods, systems, and apparatus, for wirelessly controlling a power supply device that controls a load. A wireless adapter includes a wireless communication device that receives transmissions from a wireless controller, a serial interface for a serial data connection to a power supply processing device integrated in the power supply device, an adapter processing device that receives the control signals the wireless communication device outputs, generates the control commands from the control signals, and outputs the control commands to the serial interface to cause the power supply processing device to control power provided to the load in a manner specified by the control commands, and an adapter power circuit that receives regulated direct current (DC) power from the power supply device and is powered from the regulated DC power received, and provides power to the wireless communication device and the adapter processing device.

Abstract: Methods, systems, and apparatus, including computer programs encoded on a computer storage medium, for cooperatively controlling ambient level lighting in a controlled area, and task level lighting for task areas in the controlled area, wherein each task area is a separate sub-area of the controlled area.