Patents by Inventor Tony Zengtao Liu

Tony Zengtao Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • BARRIER AND THIN SPACER FOR 3D-NAND CUA
    Publication number: 20220375946
    Abstract: Systems, apparatuses, and methods may provide for technology for forming a gate polysilicon for 3D-NAND complementary metal-oxide semiconductor under array (CuA) on a substrate with a barrier and spacer structure. For example, the technology includes forming a titanium nitride (TiN) barrier adjacent the gate polysilicon and forming a silicon nitride (SiN) spacer around the polysilicon gate and the titanium nitride barrier.
    Type: Application
    Filed: August 4, 2022
    Publication date: November 24, 2022
    Applicant: Intel NDTM US LLC
    Inventors: Yi Zhang, Hongxiang Mo, Tony Zengtao Liu