Patents by Inventor Toon Hai Foo

Toon Hai Foo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11043365
    Abstract: An apparatus includes a target, wherein the target includes a nonuniform erosion profile. The apparatus also includes a number of interchangeable magnetic and non-magnetic inserts. The interchangeable magnetic and non-magnetic inserts are configured to control a pass through flux based on the nonuniform erosion profile.
    Type: Grant
    Filed: January 23, 2020
    Date of Patent: June 22, 2021
    Assignee: SEAGATE TECHNOLOGY LLC
    Inventors: Toon Hai Foo, Thomas P. Nolan
  • Publication number: 20200234934
    Abstract: An apparatus includes a target, wherein the target includes a nonuniform erosion profile. The apparatus also includes a number of interchangeable magnetic and non-magnetic inserts. The interchangeable magnetic and non-magnetic inserts are configured to control a pass through flux based on the nonuniform erosion profile.
    Type: Application
    Filed: January 23, 2020
    Publication date: July 23, 2020
    Inventors: Toon Hai FOO, Thomas P. Nolan
  • Patent number: 10573500
    Abstract: An apparatus includes a target, wherein the target includes a nonuniform erosion profile. The apparatus also includes a number of interchangeable magnetic and non-magnetic inserts. The interchangeable magnetic and non-magnetic inserts are configured to control a pass through flux based on the nonuniform erosion profile.
    Type: Grant
    Filed: February 17, 2016
    Date of Patent: February 25, 2020
    Assignee: SEAGATE TECHNOLOGY LLC
    Inventors: Toon Hai Foo, Thomas P. Nolan
  • Publication number: 20160163521
    Abstract: An apparatus includes a target, wherein the target includes a nonuniform erosion profile. The apparatus also includes a number of interchangeable magnetic and non-magnetic inserts. The interchangeable magnetic and non-magnetic inserts are configured to control a pass through flux based on the nonuniform erosion profile.
    Type: Application
    Filed: February 17, 2016
    Publication date: June 9, 2016
    Inventors: Toon Hai Foo, Thomas P. Nolan
  • Patent number: 9347129
    Abstract: A sputtering apparatus includes a template having cells. Removable inserts are disposed within the cells. The cells may be circular, triangular, square, diamond shaped, or hex shaped. The removable inserts may be magnetic or non-magnetic inserts. A cover is connected with a first side of the template. A yoke is connected with a second side of the template. The removable inserts are operable to customize or shape a magnetic field over a target. The yoke is operable to provide a return path for the magnetic field.
    Type: Grant
    Filed: December 9, 2011
    Date of Patent: May 24, 2016
    Assignee: Seagate Technology LLC
    Inventor: Toon Hai Foo
  • Publication number: 20130146453
    Abstract: A sputtering apparatus includes a template having cells. Removable inserts are disposed within the cells. The cells may be circular, triangular, square, diamond shaped, or hex shaped. The removable inserts may be magnetic or non-magnetic inserts. A cover is connected with a first side of the template. A yoke is connected with a second side of the template. The removable inserts are operable to customize or shape a magnetic field over a target. The yoke is operable to provide a return path for the magnetic field.
    Type: Application
    Filed: December 9, 2011
    Publication date: June 13, 2013
    Applicant: SEAGATE TECHNOLOGY LLC
    Inventor: Toon Hai Foo